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1. 发明授权

US06437284B1 Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same 有权
标题翻译：用于激光热处理的光学系统和设备以及使用该半导体器件的半导体器件的制造方法
公开(公告)号：US06437284B1
公开(公告)日：2002-08-20
申请号：US09599645
申请日：2000-06-23
申请人： Tatsuki Okamoto , Tetsuya Ogawa , Keisuke Furuta , Hidetada Tokioka , Tomohiro Sasagawa , Junichi Nishimae , Mitsuo Inoue , Yukio Sato
发明人： Tatsuki Okamoto , Tetsuya Ogawa , Keisuke Furuta , Hidetada Tokioka , Tomohiro Sasagawa , Junichi Nishimae , Mitsuo Inoue , Yukio Sato
IPC分类号： B23K2606
CPC分类号： B23K26/0732 , B23K2101/40 , H01L21/02675 , H01L21/2026
摘要： An optical system that controls laser beam spot profile for forming a high performance thin film by a laser heat treatment process is provided. In the optical system that irradiates a rectangular laser beam on a film formed on a substrate, intensity distribution forming, apparatus makes the intensity distribution uniform in the longitudinal direction while maintaining the properties of the laser beam 2 such as directivity in the direction of shorter side, making it possible to concentrate the light to a limit permitted by the nature of the laser beam and achieve the maximum intensity gradient on the film disposed on the substrate. Thus a steep temperature distribution can be generated on the film disposed on the substrate and, as a result, high performance thin film can be formed.
摘要翻译：提供了通过激光热处理工艺控制用于形成高性能薄膜的激光束光斑轮廓的光学系统。在形成在基板上的膜上照射矩形激光束的光学系统中，强度分布形成装置使得强度分布沿长度方向均匀，同时保持激光束2的特性，例如沿短边方向的方向性，使得可以将光集中到由激光束的性质允许的极限，并且在设置在基板上的膜上实现最大强度梯度。因此，可以在设置在基板上的膜上产生陡峭的温度分布，结果，可以形成高性能的薄膜。

2. 发明申请

US20120031883A1 LASER MACHINING DEVICE AND LASER MACHINING METHOD 审中-公开
标题翻译：激光加工设备和激光加工方法
公开(公告)号：US20120031883A1
公开(公告)日：2012-02-09
申请号：US13264640
申请日：2010-05-14
申请人： Kenji Kumamoto , Yushi Takenaka , Kazuki Kuba , Toru Murai , Taira Ogita , Junichi Nishimae , Keisuke Furuta
发明人： Kenji Kumamoto , Yushi Takenaka , Kazuki Kuba , Toru Murai , Taira Ogita , Junichi Nishimae , Keisuke Furuta
IPC分类号： B23K26/00 , B23K26/36
CPC分类号： B23K26/38 , B23K26/0648 , B23K26/0665 , B23K26/073 , B23K2101/18 , B23K2103/04 , H01S2301/206
摘要： The machining device is equipped with a fiber laser oscillator for oscillating laser light of a top hat shape, and a light collecting lens and a machining head for collecting the laser light of the top hat shape and emitting the laser light onto a machining target such that the beam diameter of the laser light of the top hat shape at a position where light intensity becomes the one corresponding to a machining threshold of the machining target is about three times the size of the beam diameter of laser light in a Gaussian mode at the same position, when the laser light in the Gaussian mode has a beam quality substantially the same as that of the laser light of the top hat shape.
摘要翻译：该加工装置配备有用于振荡顶帽形状的激光的光纤激光振荡器，以及聚光透镜和用于收集顶帽形状的激光并将激光发射到加工对象上的加工头，使得在光强度成为与加工对象的加工阈值相对应的位置的顶帽形状的激光的光束直径为相同高斯模式的激光的光束直径的大小的三倍当高斯模式的激光具有与顶帽形状的激光基本相同的光束质量时，

3. 发明授权

US06721346B2 Solid state laser apparatus 失效
标题翻译：固态激光装置
公开(公告)号：US06721346B2
公开(公告)日：2004-04-13
申请号：US09883956
申请日：2001-06-20
申请人： Yoko Inoue , Shuichi Fujikawa , Keisuke Furuta
发明人： Yoko Inoue , Shuichi Fujikawa , Keisuke Furuta
IPC分类号： H01S3091
CPC分类号： H01S3/0941 , H01S3/094057 , H01S3/094076 , H01S3/09408 , H01S3/1024 , H01S3/1028 , H01S5/06216 , H01S5/0622
摘要： A solid state laser excited by a semiconductor laser can generate a stable and highly efficient high power laser beam. The laser apparatus includes a solid state laser element containing an active medium, a semiconductor laser for optically exciting the solid state laser element, a power supply for supplying pulses of current having magnitudes that change with time during each pulse to the semiconductor laser, and an optical resonator for emission of a laser beam from the solid state laser element. When the semiconductor laser is driven with the pulses that change in magnitude during each pulse, it produces pulsed excitation light that excites the solid state laser element. A stable laser beam is produced because changes in thermally sensitive light-generating parameters of the semiconductor laser are compensated.
摘要翻译：由半导体激光器激发的固态激光器可以产生稳定且高效的高功率激光束。该激光装置包括：含有活性介质的固体激光元件，用于光学激发固体激光元件的半导体激光器;用于在每个脉冲期间向半导体激光器供给具有随时间变化的大小的电流脉冲的电源;以及用于从固体激光元件发射激光束的光学谐振器。当半导体激光器以每个脉冲内的幅度变化的脉冲驱动时，产生激发固态激光元件的脉冲激发光。由于半导体激光器的热敏光产生参数的变化被补偿，所以产生稳定的激光束。

4. 发明申请

US20060153258A1 Laser beam transmitter 失效
标题翻译：激光束发射机
公开(公告)号：US20060153258A1
公开(公告)日：2006-07-13
申请号：US10545614
申请日：2003-03-17
申请人： Shuichi Fujikawa , Takafumi Kawai , Keisuke Furuta , Masaki Seguchi
发明人： Shuichi Fujikawa , Takafumi Kawai , Keisuke Furuta , Masaki Seguchi
IPC分类号： H01S3/04
CPC分类号： H01S3/025 , H01S3/0407 , H01S3/042 , H01S3/061 , H01S3/094084 , H01S3/0941 , H01S3/1611 , H01S3/1643
摘要： A laser oscillator includes a light condensing block having a through-hole for housing a laser medium, and an aperture for introducing excitation light from an excitation light source module into the through-hole; an end plate fixed to an end of the light condensing block, in which a cooling water channel for leading cooling water to the light condensing block and a cooling water channel for leading cooling water to the excitation light source module are formed; and a flow tube fixed and sealed by the end plate, for forming a cooling water passage for the laser medium; and an excitation light source module in which a cooling water channel, communicating with the water channel for the excitation light source module in the end plate, is formed for cooling its excitation light source.
摘要翻译：激光振荡器包括具有用于容纳激光介质的通孔的聚光块和用于将来自激发光源模块的激发光引入到通孔中的孔; 固定到聚光块的端部的端板，其中形成有用于将冷却水引导到聚光块的冷却水通道和用于将冷却水引导到激发光源模块的冷却水通道; 以及由所述端板固定和密封的流动管，用于形成用于所述激光介质的冷却水通道; 以及激励光源模块，其中形成有与端板中的激发光源模块的水通道连通的冷却水通道，用于冷却其激发光源。

5. 发明授权

US09188834B2 Wavelength conversion crystal and wavelength conversion laser device 有权
标题翻译：波长转换晶体和波长转换激光器件
公开(公告)号：US09188834B2
公开(公告)日：2015-11-17
申请号：US14007469
申请日：2012-03-13
申请人： Shuichi Fujikawa , Susumu Konno , Keisuke Furuta , Tomotaka Katsura
发明人： Shuichi Fujikawa , Susumu Konno , Keisuke Furuta , Tomotaka Katsura
IPC分类号： G02F1/35 , G02F1/37 , G02F1/355 , H01S3/109 , H01S3/08 , H01S3/081 , H01S3/082 , H01S3/0941 , H01S3/117 , H01S3/16 , H01S3/00
CPC分类号： G02F1/37 , G02F1/3551 , G02F2001/354 , H01S3/0092 , H01S3/08054 , H01S3/08059 , H01S3/0815 , H01S3/082 , H01S3/0941 , H01S3/109 , H01S3/117 , H01S3/1611 , H01S3/1643
摘要： A wavelength conversion crystal including: a single nonlinear optical crystal which satisfies both of a first phase-matching condition and a second phase-matching condition, the first phase-matching condition being required for first wavelength conversion to convert a fundamental wave having a wavelength of 1064 nm into a second harmonic having a wavelength of 532 nm, and the second phase-matching condition being required for second wavelength conversion to convert the light having a wavelength of 532 nm into a fourth harmonic having a wavelength of 266 nm; and a first reflective face and a second reflective face for reflecting the light having a wavelength of 532 nm generated by the first wavelength conversion to supply it to the second wavelength conversion. This approach can efficiently generate a third or higher-order harmonic with a reliable and simple configuration.
摘要翻译：一种波长转换晶体，包括：单一非线性光学晶体，其满足第一相位匹配条件和第二相位匹配条件，第一相位匹配条件是第一波长转换所需的，以将波长为 1064nm变为波长为532nm的二次谐波，第二波长转换所需的第二相位匹配条件将波长为532nm的光转换成波长为266nm的四次谐波; 以及第一反射面和第二反射面，用于反射通过第一波长转换产生的波长为532nm的光，以将其提供给第二波长转换。这种方法可以有效地生成具有可靠和简单配置的第三或更高次谐波。

6. 发明申请

US20140016186A1 WAVELENGTH CONVERSION CRYSTAL AND WAVELENGTH CONVERSION LASER DEVICE 有权
标题翻译：波长转换晶体和波长转换激光器件
公开(公告)号：US20140016186A1
公开(公告)日：2014-01-16
申请号：US14007469
申请日：2012-03-13
申请人： Shuichi Fujikawa , Susumu Konno , Keisuke Furuta , Tomotaka Katsura
发明人： Shuichi Fujikawa , Susumu Konno , Keisuke Furuta , Tomotaka Katsura
IPC分类号： G02F1/37
CPC分类号： G02F1/37 , G02F1/3551 , G02F2001/354 , H01S3/0092 , H01S3/08054 , H01S3/08059 , H01S3/0815 , H01S3/082 , H01S3/0941 , H01S3/109 , H01S3/117 , H01S3/1611 , H01S3/1643
摘要： A wavelength conversion crystal including: a single nonlinear optical crystal which satisfies both of a first phase-matching condition and a second phase-matching condition, the first phase-matching condition being required for first wavelength conversion to convert a fundamental wave having a wavelength of 1064 nm into a second harmonic having a wavelength of 532 nm, and the second phase-matching condition being required for second wavelength conversion to convert the light having a wavelength of 532 nm into a fourth harmonic having a wavelength of 266 nm; and a first reflective face and a second reflective face for reflecting the light having a wavelength of 532 nm generated by the first wavelength conversion to supply it to the second wavelength conversion. This approach can efficiently generate a third or higher-order harmonic with a reliable and simple configuration.
摘要翻译：一种波长转换晶体，包括：单一非线性光学晶体，其满足第一相位匹配条件和第二相位匹配条件，第一相位匹配条件是第一波长转换所需的，以将波长为 1064nm变为波长为532nm的二次谐波，第二波长转换所需的第二相位匹配条件将波长为532nm的光转换成波长为266nm的四次谐波; 以及第一反射面和第二反射面，用于反射通过第一波长转换产生的波长为532nm的光，以将其提供给第二波长转换。这种方法可以有效地生成具有可靠和简单配置的第三或更高次谐波。

7. 发明授权

US07386022B2 Laser beam transmitter 失效
标题翻译：激光束发射机
公开(公告)号：US07386022B2
公开(公告)日：2008-06-10
申请号：US10545614
申请日：2003-03-17
申请人： Shuichi Fujikawa , Takafumi Kawai , Keisuke Furuta , Masaki Seguchi
发明人： Shuichi Fujikawa , Takafumi Kawai , Keisuke Furuta , Masaki Seguchi
IPC分类号： H01S3/04
CPC分类号： H01S3/025 , H01S3/0407 , H01S3/042 , H01S3/061 , H01S3/094084 , H01S3/0941 , H01S3/1611 , H01S3/1643
摘要： A laser oscillator includes a light condensing block having a through-hole for housing a laser medium, and an aperture for introducing excitation light from an excitation light source module into the through-hole; an end plate fixed to an end of the light condensing block, in which a cooling water channel for leading cooling water to the light condensing block and a cooling water channel for leading cooling water to the excitation light source module are formed; and a flow tube fixed and sealed by the end plate, for forming a cooling water passage for the laser medium; and an excitation light source module in which a cooling water channel, communicating with the water channel for the excitation light source module in the end plate, is formed for cooling its excitation light source.
摘要翻译：激光振荡器包括具有用于容纳激光介质的通孔的聚光块和用于将来自激发光源模块的激发光引入到通孔中的孔; 固定到聚光块的端部的端板，其中形成有用于将冷却水引导到聚光块的冷却水通道和用于将冷却水引导到激发光源模块的冷却水通道; 以及由所述端板固定和密封的流动管，用于形成用于所述激光介质的冷却水通道; 以及激励光源模块，其中形成有与端板中的激发光源模块的水通道连通的冷却水通道，用于冷却其激发光源。

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