专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US07072442B1 X-ray metrology using a transmissive x-ray optical element 有权
标题翻译：使用透射X射线光学元件的X射线测量
公开(公告)号：US07072442B1
公开(公告)日：2006-07-04
申请号：US10300107
申请日：2002-11-20
申请人： Gary R. Janik
发明人： Gary R. Janik
IPC分类号： G21K1/06
CPC分类号： G21K1/06
摘要： An x-ray metrology system includes one or more transmissive x-ray optical elements, such as zone plates or compound refractive x-ray lenses, to shape the x-ray beams used in the measurement operations. Each transmissive x-ray optical element can focus or collimate a source x-ray beam onto a test sample. Another transmissive x-ray optical element can be used to focus reflected or scattered x-rays onto a detector to enhance the resolving capabilities of the system. The compact geometry of transmissive x-ray optical element allows for more flexible placement and positioning than would be feasible with conventional curved crystal reflectors. For example, multiple x-ray beams can be focused onto a test sample using a transmissive x-ray optical element array. Robust zone plates can be efficiently produced using a damascene process.
摘要翻译： X射线测量系统包括一个或多个透射X射线光学元件，例如区域板或复合折射X射线透镜，以对在测量操作中使用的x射线束进行整形。每个透射x射线光学元件可以将源X射线束聚焦或准直到测试样本上。另一个透射型X射线光学元件可用于将反射或散射的X射线聚焦到检测器上，以增强系统的分辨能力。透射式X射线光学元件的紧凑几何形状允许比常规弯曲晶体反射器可行的更灵活的放置和定位。例如，可以使用透射x射线光学元件阵列将多个X射线束聚焦到测试样品上。可以使用镶嵌工艺有效地生产坚固的板材板。

12. 发明授权

US07006596B1 Light element measurement 失效
标题翻译：轻元素测量
公开(公告)号：US07006596B1
公开(公告)日：2006-02-28
申请号：US10434861
申请日：2003-05-09
申请人： Gary R. Janik
发明人： Gary R. Janik
IPC分类号： G01N23/223
CPC分类号： H01J37/244 , G01N23/2252 , H01J37/252 , H01J2237/2442 , H01J2237/24592
摘要： A spectrometer for detecting and quantifying elements in a sample. An exciter ionizes atoms in the sample, and the atoms thereby produce characteristic x-rays. A detector receives the x-rays and produces signals based on the x-rays. A filter system selectively blocks the x-rays from attaining the detector. The selective blocking of the x-rays is accomplished based on an energy of the x-rays. An analyzer receives the signals from the detector and detects and quantifies the elements in the sample based at least in part on the signals. In this manner, detector receives the light element x-rays, and the medium and heavy element x-rays are filtered out to avoid overwhelming the detector. This invention combines the large solid angle, high efficiency, and ability to measure the continuous background spectrum of the energy dispersive x-ray detector with the selectivity of the wavelength dispersive x-ray detector. It thus enables faster and more accurate measurement of light elements in thin films. This invention enhances the light element performance of a system by enabling higher throughput, lower e-beam and x-ray dose to the sample, and improved accuracy from the capability to measure the background radiation.
摘要翻译：用于检测和量化样品中元素的光谱仪。激发器将样品中的原子电离，从而产生特征X射线。检测器接收X射线并根据x射线产生信号。过滤系统选择性地阻止x射线获得检测器。基于x射线的能量来实现x射线的选择性阻挡。分析仪接收来自检测器的信号，并至少部分地基于信号来检测和量化样本中的元素。以这种方式，检测器接收光元件x射线，并且滤出中等和重元素x射线以避免检测器压倒。本发明结合了大的立体角，高效率和能量色散X射线检测器的连续背景光谱的能力，具有波长色散X射线检测器的选择性。因此，可以更快更准确地测量薄膜中的光元件。本发明通过对样品进行更高的产量，更低的电子束和x射线剂量来提高系统的光元件性能，并且从测量背景辐射的能力提高了精度。

13. 发明授权

US07688454B1 Scatterometry metrology using inelastic scattering 有权
标题翻译：散射测量使用非弹性散射
公开(公告)号：US07688454B1
公开(公告)日：2010-03-30
申请号：US12200325
申请日：2008-08-28
申请人： Gary R. Janik
发明人： Gary R. Janik
IPC分类号： G01B11/30 , G01B11/14 , G01J3/44 , G01J3/427 , G01J3/28
CPC分类号： G01B11/0616 , G01N21/65 , G01N2021/653
摘要： A system for characterizing material properties in miniature semiconductor structures performs a scatterometry analysis on inelastically scattered light. The system can include a narrowband probe beam generator and a detector. A single wavelength probe beam from the narrowband probe beam generator produces scattered light from a measurement pattern on a test sample. The scattered light is measured by the detector, and the measurement data (e.g., Raman spectrum) is used in a scatterometry analysis to determine material properties for the measurement pattern. The detector can measure either incoherent inelastically scattered light (e.g., using a spectrometer) or coherent inelastically scattered light (e.g., using an array detector). If the measurement pattern dimensions are substantially similar to actual device dimensions, the material property distributions determined for the measurement pattern can be applied to the actual devices on the test sample.
摘要翻译：用于表征微型半导体结构中的材料性质的系统对非弹性散射光进行散射分析。该系统可以包括窄带探测光束发生器和检测器。来自窄带探测光束发生器的单个波长探测光束从测试样品上的测量图形产生散射光。通过检测器测量散射光，并且在散射分析中使用测量数据（例如，拉曼光谱）来确定测量图案的材料特性。检测器可以测量非相干非弹性散射光（例如，使用光谱仪）或相干非弹性散射光（例如，使用阵列检测器）。如果测量图形尺寸基本上类似于实际的装置尺寸，则可以将测量图案确定的材料特性分布应用于测试样品上的实际装置。

14. 发明授权

US07427757B1 Large collection angle x-ray monochromators for electron probe microanalysis 失效
标题翻译：用于电子探针微量分析的大型收集角x射线单色仪
公开(公告)号：US07427757B1
公开(公告)日：2008-09-23
申请号：US11295258
申请日：2005-12-05
申请人： Gary R. Janik , Jeffrey A. Moore
发明人： Gary R. Janik , Jeffrey A. Moore
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G21K1/06 , H01J37/244 , H01J37/252 , H01J2237/24425 , H01J2237/2561
摘要： X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a turret. The cassette stores a plurality of reflectors that can be inserted into a conventional Rowland circle monochromator geometry. A transfer mechanism selectively moves reflectors from the cassette to a reflector positioner. The use of the cassette allows each reflector to be placed closer to a source of x-rays, thereby allowing a larger solid angle for x-ray collection. An alternative x-ray monochromator uses a non-focusing reflector that can be fixed, scanned axially or scanned radially to provide large solid angle detection of x-rays at various energies with a single reflector.
摘要翻译：公开了使用这种单色仪的X射线单色仪和电子探针微分析（EPMA）系统。无转塔X射线单色仪可以具有一个反射镜盒而不是一个转盘。磁带盒存储可以插入常规罗兰圆单色仪几何形状的多个反射器。传送机构选择性地将反射器从盒子移动到反射器定位器。使用盒式磁带允许每个反射器被放置得更靠近X射线源，从而允许用于x射线收集的更大的立体角。另一种x射线单色仪使用非聚焦反射器，其可以被固定，轴向扫描或径向扫描，以提供具有单个反射器的各种能量的X射线的大的立体角检测。

15. 发明授权

US07253901B2 Laser-based cleaning device for film analysis tool 有权
公开(公告)号：US07253901B2
公开(公告)日：2007-08-07
申请号：US10056271
申请日：2002-01-23
申请人： Gary R. Janik , Patrick M. Maxton
发明人： Gary R. Janik , Patrick M. Maxton
IPC分类号： G01J4/00 , G01N21/55 , G01N23/00 , G01N21/86 , G01N23/223 , G01B11/30 , G01B11/24 , G01B11/28 , G01B15/02 , G02F1/01 , H01J40/14 , G21K7/00 , G01V8/00 , G01R31/26 , G01R27/26 , G01R31/305 , G01R31/302 , H01L21/66 , G01T1/36 , B08B3/12 , B08B6/00 , B08B7/00 , B08B7/02 , C25F1/00 , C25F3/30 , C25F5/00
CPC分类号： G01N21/211
摘要： A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough of the contaminant layer to allow analysis of the underlying thin film, thereby enhancing analysis throughput while minimizing the chances of recontamination and/or damage to the thin film. An energy beam source can be readily incorporated into a conventional thin film analysis tool, thereby minimizing total analysis system footprint. Throughput can be maximized by focusing the probe beam (or probe structure) for the analysis operation at the same location as the energy beam so that repositioning is not required after the cleaning operation. Alternatively, the probe beam (structure) and the energy beam can be directed at different locations to reduce the chances of contamination of the analysis optics.

16. 发明授权

US07075073B1 Angle resolved x-ray detection 有权
标题翻译：角度分辨X线检测
公开(公告)号：US07075073B1
公开(公告)日：2006-07-11
申请号：US10851437
申请日：2004-05-21
申请人： Gary R. Janik , Jeffrey A. Moore , Edward M. James
发明人： Gary R. Janik , Jeffrey A. Moore , Edward M. James
IPC分类号： G21K1/02
CPC分类号： G01N23/20 , G21K1/06
摘要： An apparatus for detecting properties of a sample. An electron beam generator produces an electron beam and directs the electron beam at a desired point on the sample. The sample thereby emits characteristic x-rays at takeoff angles. A collimator receives and parallelizes the x-rays and converts the takeoff angles of the x-rays to positional differences between the parallelized x-rays. A diffractor receives and deflects the x-rays. A position sensitive detector receives the deflected x-rays and detects the positional differences between the x-rays, and generates signals that are characteristic of the received x-rays. An analyzer receives the signals from the detector and determines the properties of the sample based at least in part on the positional differences between the x-rays.
摘要翻译：一种用于检测样品特性的装置。电子束发生器产生电子束并将电子束引导到样品上的所需点。因此，样品从而以起飞角发射特征性X射线。准直器接收并平行X射线，并将x射线的射出角度转换为平行X射线之间的位置差异。衍射器接收和偏转x射线。位置敏感检测器接收偏转的x射线并检测x射线之间的位置差异，并产生作为接收到的x射线的特征的信号。分析仪接收来自检测器的信号，并且至少部分地基于X射线之间的位置差异来确定样品的性质。

17. 发明授权

US5676830A Method and apparatus for reducing band broadening in chromatographic detectors 失效
标题翻译：用于降低色谱检测器中带宽变宽的方法和装置
公开(公告)号：US5676830A
公开(公告)日：1997-10-14
申请号：US632035
申请日：1996-04-12
申请人： Gary R. Janik , Douglas W. Shepard
发明人： Gary R. Janik , Douglas W. Shepard
IPC分类号： G01N30/74 , B01D15/08
CPC分类号： G01N30/74
摘要： A capillary tube used to transfer a liquid sample into a detection cell following separation by a chromatographic system is modified by plugging or otherwise severely restricting its flow. Near its plugged end, said tube is drilled to provide a plurality of holes or ports perpendicular thereto and penetrating into the central flowing core of said tube so as to direct outflow from the tube perpendicularly therefrom. The outer diameter of this so-modified capillary tube is selected to be of a size comparable to, though smaller than, the detection cell diameter into which it transfers the flowing sample. In this manner, fluid transferred into a detection cell by said modified capillary tube will be split into a plurality of smaller streams flowing outwardly therefrom and striking the adjacent detector cell walls almost immediately. Because of the close proximity of the emerging split streams to the walls of the detection cell, the eddies produced thereby will be very small and the contents of the detection cell will be homogenized rapidly.
摘要翻译：用于在通过色谱系统分离后将液体样品转移到检测单元中的毛细管通过堵塞或以其他方式严格限制其流动来改变。在其堵塞端附近，所述管被钻孔以提供与其垂直的多个孔或孔，并且穿透到所述管的中心流动的芯中，以便从管垂直地引导从管垂直流出。该经修改的毛细管的外径被选择为与其传送流动样品的检测池直径相当的尺寸。以这种方式，通过所述改进的毛细管转移到检测单元中的流体将被分成多个从其向外流动的较小流，并几乎立即撞击相邻的检测器单元壁。由于新出现的分流与检测单元的壁的紧密接近，因此产生的涡流将非常小，并且检测单元的内容物将迅速均匀化。

18. 发明授权

US5475235A Control of laser light power output for use in light scattering instruments by inducing mode hopping and averaging result 失效
标题翻译：通过诱导跳频和平均结果控制用于光散射仪器的激光功率输出
公开(公告)号：US5475235A
公开(公告)日：1995-12-12
申请号：US105200
申请日：1993-08-09
申请人： David T. Phillips , Gary R. Janik
发明人： David T. Phillips , Gary R. Janik
IPC分类号： G01N15/02 , H01S5/042 , G01N15/06
CPC分类号： H01S5/042 , G01N15/0205 , H01S5/0427
摘要： The incorporation of certain classes of solid state lasers into light scattering instrumentation is desirable because of their compact structure. However, mode hopping often causes the output power produced by such lasers to be unstable. The frequency of such output power fluctuations is often so broad that output power monitoring means, characteristic of the light scattering instrumentation into which such lasers are incorporated, cannot track accurately the temporal output power fluctuations. A method, and associated apparatus, is described whereby the laser drive current is modulated at low frequency and amplitude sufficient to induce and thereby control mode hopping so as to permit accurate measurement of the ratio of light scattering signals to the laser output power.
摘要翻译：由于其紧凑的结构，将某些类别的固态激光器并入光散射仪器是合乎需要的。然而，跳频通常会导致由这种激光器产生的输出功率不稳定。这种输出功率波动的频率通常如此宽泛，使得其中结合有这种激光器的光散射仪器的特征的输出功率监视装置不能精确地跟踪时间输出功率波动。描述了一种方法和相关联的装置，其中激光驱动电流被调制在足够低的频率和幅度，以便引起并由此控制模式跳变，以便准确地测量光散射信号与激光输出功率的比率。

19. 发明授权

US07903260B1 Scatterometry metrology using inelastic scattering 有权
标题翻译：散射测量使用非弹性散射
公开(公告)号：US07903260B1
公开(公告)日：2011-03-08
申请号：US12699816
申请日：2010-02-03
申请人： Gary R. Janik
发明人： Gary R. Janik
IPC分类号： G01B11/30 , G01B11/14 , G01J3/44 , G01J3/427 , G01J3/28
CPC分类号： G01B11/0616 , G01N21/65 , G01N2021/653
摘要： A system for characterizing material properties in miniature semiconductor structures performs a scatterometry analysis on inelastically scattered light. The system can include a narrowband probe beam generator and a detector. A single wavelength probe beam from the narrowband probe beam generator produces scattered light from a measurement pattern on a test sample. The scattered light is measured by the detector, and the measurement data (e.g., Raman spectrum) is used in a scatterometry analysis to determine material properties for the measurement pattern. The detector can measure either incoherent inelastically scattered light (e.g., using a spectrometer) or coherent inelastically scattered light (e.g., using an array detector). If the measurement pattern dimensions are substantially similar to actual device dimensions, the material property distributions determined for the measurement pattern can be applied to the actual devices on the test sample.
摘要翻译：用于表征微型半导体结构中的材料性质的系统对非弹性散射光进行散射分析。该系统可以包括窄带探测光束发生器和检测器。来自窄带探测光束发生器的单个波长探测光束从测试样品上的测量图形产生散射光。通过检测器测量散射光，并且在散射分析中使用测量数据（例如，拉曼光谱）来确定测量图案的材料特性。检测器可以测量非相干非弹性散射光（例如，使用光谱仪）或相干非弹性散射光（例如，使用阵列检测器）。如果测量图形尺寸基本上类似于实际的装置尺寸，则可以将测量图案确定的材料特性分布应用于测试样品上的实际装置。

20. 发明授权

US07139365B1 X-ray reflectivity system with variable spot 有权
标题翻译：具有可变光斑的X射线反射系统
公开(公告)号：US07139365B1
公开(公告)日：2006-11-21
申请号：US11025472
申请日：2004-12-28
申请人： Gary R. Janik
发明人： Gary R. Janik
IPC分类号： G01N23/20
CPC分类号： G01N23/20
摘要： Thin film thickness measurement accuracy in x-ray reflectometry systems can be enhanced by minimizing scattering and beam spreading effects. A reflectometry system can include an x-ray tube that can produce an x-ray beam having any cross-sectional shape by scanning an electron beam in an appropriate pattern over a target in an x-ray tube. For example, the electron beam can be scanned over the target in a pattern having a non-unitary aspect ratio, so that the x-ray beam is generated from a source region having a non-unitary aspect ratio. The elongation allows the beam direction dimension to be substantially reduced, without causing overheating of the target. By blocking portions of the x-ray beam focused on the thin film and generating reflectivity curves in increments, the effects of scattering can be minimized.
摘要翻译：通过最小化散射和光束扩散效应可以增强x射线反射系统中的薄膜厚度测量精度。反射系统可以包括可以通过在X射线管中的靶上以适当的图案扫描电子束来产生具有任何横截面形状的X射线束的X射线管。例如，可以以具有非单位宽高比的图案在目标上扫描电子束，从而从具有非单一纵横比的源区产生x射线束。伸长率允许梁方向尺寸大大减小，而不会导致靶材过热。通过阻挡聚焦在薄膜上的X射线束的部分并以增量产生反射率曲线，可以使散射的影响最小化。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式