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    • 20. 发明授权
    • Fabrication of large power semiconductor composite by wafer
interconnection of individual devices
    • 通过单个器件的晶片互连制造大功率半导体复合材料
    • US4816422A
    • 1989-03-28
    • US947151
    • 1986-12-29
    • Alexander J. YermanConstantine A. Neugebauer
    • Alexander J. YermanConstantine A. Neugebauer
    • H01L21/66H01L23/528H01L23/538H01L7/00
    • H01L22/22H01L23/528H01L23/5385H01L2924/0002Y10S148/093Y10S148/162
    • A method for fabricating a composite semiconductor from a plurality of substantially identical individual semiconductor devices formed on a common semiconductor wafer includes testing the devices on the wafer to generate a positional mapping of acceptable and non-acceptable devices, dividing the wafer into a plurality of areas of arbitrary size, connecting corresponding contact pads on only the acceptable devices within a given area to each other via common conductive paths which are supported on a dielectric film covering the pads, the film having appropriately located holes filled with conductive material to electrically couple the common conductive paths and the underlying contact pads of only the acceptable devices. The devices within a given area are intercoupled in a manner to form an operational array; single or multiple arrays may be coupled together to form a composite package having common external contacts and heat sink supports.
    • 从形成在公共半导体晶片上的多个基本相同的单个半导体器件制造复合半导体的方法包括测试晶片上的器件以产生可接受和不可接受器件的位置映射,将晶片分成多个区域 通过共同的导电路径将一个给定区域内的可接受的设备上的对应的接触焊盘连接在一起,该导电通路支撑在覆盖焊盘的电介质膜上,该膜具有适当定位的孔,填充有导电材料, 导电路径和仅接受的设备的底层接触垫。 给定区域内的装置以形成操作阵列的方式相互配合; 单个或多个阵列可以耦合在一起以形成具有共同的外部触点和散热器支撑件的复合封装。