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11. 发明授权

US09117637B2 Redundant anode sputtering method and assembly 有权
标题翻译：冗余阳极溅射法和组装
公开(公告)号：US09117637B2
公开(公告)日：2015-08-25
申请号：US12092279
申请日：2006-11-06
申请人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
发明人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
IPC分类号： H01J37/34 , H01J37/32 , C23C14/35 , C23C14/56
CPC分类号： H01J37/3444 , C23C14/354 , C23C14/564 , H01J37/32532 , H01J37/3405 , H01J37/3408 , H01J37/3438
摘要： A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.
摘要翻译：提供了一种借助于磁控管阴极和两个被正电位和负电位交替冲击的电极涂覆衬底的方法。还公开了一种用于涂覆基板的组件，包括真空室，磁控管阴极，两个电极和电压源。在不大于阴极电位的水平的水平下产生负电位，因此防止被清洗的电极被剥离的程度大于在前一半波中涂覆的电极的程度。磁控管阴极和电极通过开关元件而不是电流地连接到电压源，使得从电压源产生的负电压和正电压可以替代地施加到电极，所述电压的电平不大于阴极电压。

12. 发明授权

US08367226B2 Annealable layer system 失效
标题翻译：可再生层系统
公开(公告)号：US08367226B2
公开(公告)日：2013-02-05
申请号：US12842497
申请日：2010-07-23
申请人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
发明人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
IPC分类号： B32B15/04
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译：可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。层序列包括基底近端阻挡层，选择层和底物远侧阻断层。还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。

13. 发明授权

US06942768B2 Vacuum coating apparatus 失效
标题翻译：真空镀膜设备
公开(公告)号：US06942768B2
公开(公告)日：2005-09-13
申请号：US10259973
申请日：2002-09-27
申请人： Wolfgang Erbkamm , Hans-Christian Hecht , Michael Hofmann , Falk Milde
发明人： Wolfgang Erbkamm , Hans-Christian Hecht , Michael Hofmann , Falk Milde
IPC分类号： C23C14/34 , C23C14/56 , C23C14/35 , C23C16/00
CPC分类号： C23C14/564 , C23C14/562 , C23C14/568
摘要： A system for coating band-shaped material, where the band-shaped material travels through at least one process chamber in which there is a vacuum, and at least one cooling roller. On the peripheral surface of each cooling roller are at least two magnetron sputter sources that are arranged separate from one another in magnetron chambers, which are formed by separate magnetron chamber walls and allow each chamber to be evacuated, so the pressure in the magnetron chamber can be maintained higher than that in the process chamber. The magnetron chamber walls and the magnetron sputter sources can be mounted on a common carriage, which is displaceable parallel to the cooling roller axis. The result is the reduction in the maintenance costs in cleaning of the magnetron chamber walls and at the same time improvement of the separation of gas between the magnetron chambers and the process chamber.
摘要翻译：用于涂覆带状材料的系统，其中带状材料穿过其中存在真空的至少一个处理室，以及至少一个冷却辊。每个冷却辊的圆周表面上至少有两个磁控溅射源，这些磁控溅射源在磁控管腔室中彼此分开设置，这些磁控管是通过单独的磁控管壁形成的，并允许每个腔室被抽真空，因此磁控管腔中的压力可以保持比处理室高。磁控管室壁和磁控溅射源可以安装在平行于冷却辊轴线移动的公共托架上。结果是在磁控管室壁的清洁中降低了维护成本，同时改善了磁控管室和处理室之间的气体分离。

14. 发明申请

US20100291393A1 ANNEALABLE LAYER SYSTEM 失效
标题翻译：可靠层系统
公开(公告)号：US20100291393A1
公开(公告)日：2010-11-18
申请号：US12842497
申请日：2010-07-23
申请人： Joerg FIUKOWSKI , Matthias List , Hans-Christian Hecht , Falk Milde
发明人： Joerg FIUKOWSKI , Matthias List , Hans-Christian Hecht , Falk Milde
IPC分类号： B32B17/06 , B32B9/00
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译：可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。层序列包括基底近端阻挡层，选择层和底物远侧阻断层。还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。

15. 发明申请

US20080057319A1 Layer System that can be Annealed and Method for Producing the Same 有权
标题翻译：可以退火的层系统及其生产方法
公开(公告)号：US20080057319A1
公开(公告)日：2008-03-06
申请号：US11575985
申请日：2005-09-21
申请人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
发明人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
IPC分类号： B32B9/04 , B05D1/00 , C23C14/54
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译：可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。层序列包括基底近端阻挡层，选择层和底物远侧阻断层。还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。

16. 发明申请

US20060236935A1 Coating installation with coolable diaphragm 审中-公开
标题翻译：涂层安装具有可冷却的隔膜
公开(公告)号：US20060236935A1
公开(公告)日：2006-10-26
申请号：US11243039
申请日：2005-10-04
申请人： Jochen Krause , Joern Brueckner , Dietmar Schulze , Falk Milde
发明人： Jochen Krause , Joern Brueckner , Dietmar Schulze , Falk Milde
IPC分类号： C23C16/00
CPC分类号： C23C14/564 , H01J37/3405 , H01J37/3497
摘要： A coating installation is provided with diaphragms that are convenient to mechanically install and remove. A coating installation, which has a coating chamber delimited by chamber walls, has at least one cooling device arranged on a chamber wall. A bracket in thermal contact with the cooling device, is configured with a bearing surface to receive the diaphragm. The bearing surface may be a horizontal or an inclined surface on which the diagram can be lowered or pressure fitted so that it is in thermal contact with the bracket. In coating installation operation, heat is conducted from the diagram to the cooling device through the bracket.
摘要翻译：涂层设备设有方便机械安装和拆卸的隔膜。具有由室壁限定的涂布室的涂布装置具有布置在室壁上的至少一个冷却装置。与冷却装置热接触的托架被构造成具有用于接收隔膜的支承表面。轴承表面可以是水平或倾斜表面，在该表面上，图可以被降低或压配合，使得其与支架热接触。在涂装安装操作中，热量通过支架从图中传导到冷却装置。

17. 发明授权

US06420863B1 Method for monitoring alternating current discharge on a double electrode and apparatus 失效
标题翻译：双电极交流放电监测方法及装置
公开(公告)号：US06420863B1
公开(公告)日：2002-07-16
申请号：US09581208
申请日：2000-06-21
申请人： Falk Milde , Torsten Winkler , Andreas Fickert , Volker Kirchhoff , Matthias Fahland
发明人： Falk Milde , Torsten Winkler , Andreas Fickert , Volker Kirchhoff , Matthias Fahland
IPC分类号： G01R1716
CPC分类号： H01J37/3444 , H01J37/3405 , H05H1/0081
摘要： Process for monitoring an alternating-voltage discharge between the electrodes of a double electrode and an apparatus. The process includes measuring values of at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period, determining a difference between the measured values of a second half-wave and the measured values of the first half-wave, and comparing the determined differences to specific tolerance values. When the specific tolerance values are exceeded by the determined differences, a power supply is reduced, whereby the discharge is at least briefly suppressed. The apparatus includes a double magnetron including first and second targets arranged to form a double electrode, and a power supply coupled to supply power to the first and second targets. The power supply includes a measurement unit for measuring values of at least one of discharge current and discharge voltage, such that at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period is measured. A device for determining a difference between the measured values of a second half-wave and the measured values of the first half-wave is provided, as well as a device for comparing the determined differences to specific tolerance values, and a device for at least briefly suppressing the discharge when the specific tolerance values are exceeded by the determined differences.
摘要翻译：用于监视双电极的电极与装置之间的交流电压放电的方法。该过程包括在交流电压放电周期内测量每个半波的放电电流和放电电压中的至少一个的值，确定第二半波的测量值与第一半波的测量值之间的差值半波，并将确定的差异与特定容差值进行比较。当通过所确定的差异超过特定公差值时，电源减少，从而至少简化了放电。该装置包括双重磁控管，其包括布置成形成双电极的第一和第二靶，以及耦合以向第一和第二靶提供电力的电源。电源包括测量单元，用于测量放电电流和放电电压中的至少一个的值，以便测量交流电压放电周期内的每个半波的放电电流和放电电压中的至少一个。提供了一种用于确定第二半波的测量值与第一半波的测量值之间的差异的装置，以及用于将确定的差异与特定公差值进行比较的装置，以及用于至少当确定的差异超过特定公差值时，暂时抑制放电。

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