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1. 发明授权

US06420863B1 Method for monitoring alternating current discharge on a double electrode and apparatus 失效
标题翻译：双电极交流放电监测方法及装置
公开(公告)号：US06420863B1
公开(公告)日：2002-07-16
申请号：US09581208
申请日：2000-06-21
申请人： Falk Milde , Torsten Winkler , Andreas Fickert , Volker Kirchhoff , Matthias Fahland
发明人： Falk Milde , Torsten Winkler , Andreas Fickert , Volker Kirchhoff , Matthias Fahland
IPC分类号： G01R1716
CPC分类号： H01J37/3444 , H01J37/3405 , H05H1/0081
摘要： Process for monitoring an alternating-voltage discharge between the electrodes of a double electrode and an apparatus. The process includes measuring values of at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period, determining a difference between the measured values of a second half-wave and the measured values of the first half-wave, and comparing the determined differences to specific tolerance values. When the specific tolerance values are exceeded by the determined differences, a power supply is reduced, whereby the discharge is at least briefly suppressed. The apparatus includes a double magnetron including first and second targets arranged to form a double electrode, and a power supply coupled to supply power to the first and second targets. The power supply includes a measurement unit for measuring values of at least one of discharge current and discharge voltage, such that at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period is measured. A device for determining a difference between the measured values of a second half-wave and the measured values of the first half-wave is provided, as well as a device for comparing the determined differences to specific tolerance values, and a device for at least briefly suppressing the discharge when the specific tolerance values are exceeded by the determined differences.
摘要翻译：用于监视双电极的电极与装置之间的交流电压放电的方法。该过程包括在交流电压放电周期内测量每个半波的放电电流和放电电压中的至少一个的值，确定第二半波的测量值与第一半波的测量值之间的差值半波，并将确定的差异与特定容差值进行比较。当通过所确定的差异超过特定公差值时，电源减少，从而至少简化了放电。该装置包括双重磁控管，其包括布置成形成双电极的第一和第二靶，以及耦合以向第一和第二靶提供电力的电源。电源包括测量单元，用于测量放电电流和放电电压中的至少一个的值，以便测量交流电压放电周期内的每个半波的放电电流和放电电压中的至少一个。提供了一种用于确定第二半波的测量值与第一半波的测量值之间的差异的装置，以及用于将确定的差异与特定公差值进行比较的装置，以及用于至少当确定的差异超过特定公差值时，暂时抑制放电。

2. 发明申请

US20110033680A1 TRANSPARENT BARRIER LAYER SYSTEM 审中-公开
标题翻译：透明障碍层系统
公开(公告)号：US20110033680A1
公开(公告)日：2011-02-10
申请号：US12937655
申请日：2009-04-09
申请人： John Fahlteich , Matthias Fahland , Waldemar Schoenberger , Nicolas Schiller
发明人： John Fahlteich , Matthias Fahland , Waldemar Schoenberger , Nicolas Schiller
IPC分类号： B32B7/02
CPC分类号： C23C14/00 , C23C16/00 , C23C28/042 , C23C28/048 , C23C28/42 , C23C30/00 , Y10T428/24942
摘要： The invention relates to a transparent barrier layer system on a substrate, wherein the barrier layer system comprises a sequence of individual layers, wherein the individual layers are composed alternately of a layer A and a layer B and wherein a layer A differs from a layer B in terms of the activation energy in the permeation of water vapor with a difference of at least 1.5 kJ/mol.
摘要翻译：本发明涉及一种在衬底上的透明阻挡层系统，其中该阻挡层系统包括单个层序列，其中各层由A层和B层交替组成，其中A层与B层不同就水蒸气的渗透活化能而言，其差异至少为1.5kJ / mol。

3. 发明申请

US20070170050A1 Method for the production of an ultra barrier layer system 有权
标题翻译：用于生产超级势垒层系统的方法
公开(公告)号：US20070170050A1
公开(公告)日：2007-07-26
申请号：US10597625
申请日：2004-11-23
申请人： Christoph Charton , Matthias Fahland , Mario Krug , Nicolas Schiller , Steffen Straach
发明人： Christoph Charton , Matthias Fahland , Mario Krug , Nicolas Schiller , Steffen Straach
IPC分类号： C23C14/00
CPC分类号： C23C14/10 , B05D1/62 , C23C14/081 , C23C16/401
摘要： The invention relates to a method for producing an ultrabarrier layer system through vacuum coating a substrate with a layer stack that is embodied as an alternating layer system of smoothing layers and transparent ceramic layers, but comprising at least one smoothing layer between two transparent ceramic layers, which are applied by sputtering, in which during the deposition of the smoothing layer a monomer is admitted into an evacuated coating chamber in which a magnetron plasma is operated.
摘要翻译：本发明涉及一种制造超载体层系统的方法，该方法通过用层叠法真空涂覆衬底，该层堆叠被实施为平滑层和透明陶瓷层的交替层系统，但是包括两个透明陶瓷层之间的至少一个平滑层，其通过溅射施加，其中在平滑层的沉积期间，将单体进入其中操作磁控管等离子体的抽真空涂层室。

4. 发明授权

US08535810B2 Transparent plastic film for shielding electromagnetic waves and method for producing a plastic film of this type 失效
标题翻译：用于屏蔽电磁波的透明塑料薄膜和这种塑料薄膜的制造方法
公开(公告)号：US08535810B2
公开(公告)日：2013-09-17
申请号：US12809435
申请日：2008-10-16
申请人： Matthias Fahland , Tobias Vogt , Nicolas Schiller , Waldemar Schoenberger , Steffen Guenther , John Fahlteich
发明人： Matthias Fahland , Tobias Vogt , Nicolas Schiller , Waldemar Schoenberger , Steffen Guenther , John Fahlteich
IPC分类号： H05K9/00 , C23C14/34 , C23C14/35
CPC分类号： H05K9/0094
摘要： A transparent plastic film for screening electromagnetic waves includes a transparent film substrate and a layer system comprising at least one silver layer and two niobium oxide layers. The silver layer is embedded between the two niobium oxide layers.
摘要翻译：用于屏蔽电磁波的透明塑料膜包括透明膜基板和包括至少一个银层和两个氧化铌层的层系统。银层嵌入在两个氧化铌层之间。

5. 发明申请

US20120052244A1 LAYER SYSTEM HAVING BARRIER PROPERTIES AND A STRUCTURED CONDUCTIVE LAYER, METHOD FOR PRODUCING THE SAME, AND USE OF SUCH A LAYER SYSTEM 审中-公开
标题翻译：具有障碍物特性的层系统和结构化导电层，其制造方法以及这种层系统的使用
公开(公告)号：US20120052244A1
公开(公告)日：2012-03-01
申请号：US13319002
申请日：2010-04-29
申请人： Waldemar Schoenberger , Matthias Fahland , John Fahlteich , Ulrich Todt , Christian Kirchhof
发明人： Waldemar Schoenberger , Matthias Fahland , John Fahlteich , Ulrich Todt , Christian Kirchhof
IPC分类号： B32B3/00 , H05K13/00
CPC分类号： C23C14/086 , H01L31/02167 , H01L31/022466 , H01L31/022475 , H01L31/0392 , H01L31/03926 , H01L31/1884 , Y02E10/50 , Y10T428/24355
摘要： The invention relates to a layer system, comprising a substrate (1) on which firstly at least one barrier layer (2), followed by an intermediate layer (3) acting as an etch-stop layer and subsequently at least one electrically conductive layer (4) are deposited, and wherein the electrically conductive layer (4) is structured with wet-chemical etching media. The invention further relates to a method for the production and uses of a layer system of this type.
摘要翻译：本发明涉及一种层系统，其包括基底（1），其上首先至少一个阻挡层（2），之后是用作蚀刻停止层的中间层（3），随后至少一个导电层 4），并且其中导电层（4）由湿化学蚀刻介质构成。本发明还涉及一种用于生产和使用这种类型的层系统的方法。

6. 发明申请

US20110091662A1 COATING METHOD AND DEVICE USING A PLASMA-ENHANCED CHEMICAL REACTION 审中-公开
标题翻译：涂料方法和使用等离子体增强化学反应的装置
公开(公告)号：US20110091662A1
公开(公告)日：2011-04-21
申请号：US12997388
申请日：2009-05-15
申请人： Matthias Fahland , Tobias Vogt , Steffen Guenther , John Fahlteich , Waldemar Schoenberger , Alexander Schoenberger
发明人： Matthias Fahland , Tobias Vogt , Steffen Guenther , John Fahlteich , Waldemar Schoenberger , Alexander Schoenberger
IPC分类号： C23C16/503 , C23C16/515 , C23C16/455 , H05H1/24 , C23C14/34
CPC分类号： C23C16/401 , C23C14/0057 , C23C14/0078 , C23C14/08 , C23C14/35 , C23C14/562 , C23C16/40 , C23C16/503 , C23C16/545
摘要： The invention relates to a method and a device for the plasma-enhanced deposition of a layer on a substrate (12) by means of a chemical reaction inside a vacuum chamber (11), wherein at least one starting material of the chemical reaction is guided into the vacuum chamber (11) through an inlet (13), and wherein the inlet (13) is connected as an electrode of a gas discharge at least in the region of the inlet opening (18). A magnetron can also be used in the reactive sputtering method.
摘要翻译：本发明涉及一种用于通过真空室（11）内的化学反应等离子体增强沉积在衬底（12）上的方法和装置，其中至少一个化学反应原料被引导通过入口（13）进入真空室（11），并且其中入口（13）至少在入口开口（18）的区域中作为气体放电的电极连接。磁控管也可用于反应溅射法。

7. 发明申请

US20100307812A1 TRANSPARENT PLASTIC FILM FOR SHIELDING ELECTROMAGNETIC WAVES AND METHOD FOR PRODUCING A PLASTIC FILM OF THIS TYPE 失效
标题翻译：用于屏蔽电磁波的透明塑料薄膜和用于生产这种类型的塑料薄膜的方法
公开(公告)号：US20100307812A1
公开(公告)日：2010-12-09
申请号：US12809435
申请日：2008-10-16
申请人： Matthias Fahland , Tobias Vogt , Nicolas Schiller , Waldemar Schoenberger , Steffen Guenther , John Fahlteich
发明人： Matthias Fahland , Tobias Vogt , Nicolas Schiller , Waldemar Schoenberger , Steffen Guenther , John Fahlteich
IPC分类号： H05K9/00 , C23C14/34 , C23C14/35
CPC分类号： H05K9/0094
摘要： The invention relates to a transparent plastic film for screening electromagnetic waves, comprising a transparent film substrate and a layer system that has at least one silver layer, as well as a method for producing a plastic film of this type, wherein the silver layer is embedded between two niobium oxide layers.
摘要翻译：本发明涉及一种用于屏蔽电磁波的透明塑料薄膜，其中包括透明薄膜基片和至少有一层银层的层系，以及一种这种塑料薄膜的制造方法，其中银层被嵌入两个铌氧化物层之间。

8. 发明授权

US07541070B2 Method of vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide 有权
标题翻译：用由氧化铝制成的透明阻挡层气相沉积带状基材的方法
公开(公告)号：US07541070B2
公开(公告)日：2009-06-02
申请号：US10536329
申请日：2003-10-16
申请人： Nicolas Schiller , Steffen Straach , Mathias Räbisch , Matthias Fahland , Christoph Charton
发明人： Nicolas Schiller , Steffen Straach , Mathias Räbisch , Matthias Fahland , Christoph Charton
IPC分类号： H05H1/24
CPC分类号： C23C14/0021 , C23C14/027 , C23C14/081
摘要： The invention relates to a method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide by reactively vaporizing aluminum and admitting reactive gas in a strip vapor-deposition installation. The invention provides that, before coating with aluminum oxide, a partially enclosed layer made of a metal or of a metal oxide is applied to the substrate by magnetron sputtering.
摘要翻译：本发明涉及一种通过在带状气相沉积设备中反应性汽化铝和引入反应性气体来将具有由氧化铝制成的透明阻挡层气相沉积的带状基板的方法。本发明提供了在用氧化铝涂覆之前，通过磁控溅射将由金属或金属氧化物制成的部分封闭层施加到基板上。

9. 发明申请

US20060257585A1 Method of vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide 有权
公开(公告)号：US20060257585A1
公开(公告)日：2006-11-16
申请号：US10536329
申请日：2003-10-16
申请人： Nicolas Schiller , Steffen Straach , Mathias Rabisch , Matthias Fahland
发明人： Nicolas Schiller , Steffen Straach , Mathias Rabisch , Matthias Fahland
IPC分类号： C23C16/00 , C23C14/32
CPC分类号： C23C14/0021 , C23C14/027 , C23C14/081
摘要： The invention relates to a method for vapor-depositing strip-shaped substrates with a transparent barrier layer made of aluminum oxide by reactively vaporizing aluminum and admitting reactive gas in a strip vapor-deposition installation. The invention provides that, before coating with aluminum oxide, a partially enclosed layer made of a metal or of a metal oxide is applied to the substrate by magnetron sputtering.

10. 发明申请

US20140072721A1 Method for Modifying a Surface of a Substrate using Ion Bombardment 审中-公开
标题翻译：使用离子轰击改性基材表面的方法
公开(公告)号：US20140072721A1
公开(公告)日：2014-03-13
申请号：US14005239
申请日：2012-03-14
申请人： Ulrike Schulz , Peter Munzert , Roland Thielsch , Waldemar Schoenberger , Matthias Fahland , Ronny Kleinhempel
发明人： Ulrike Schulz , Peter Munzert , Roland Thielsch , Waldemar Schoenberger , Matthias Fahland , Ronny Kleinhempel
IPC分类号： C23C14/48 , H01J37/34
CPC分类号： C23C14/48 , B29C59/14 , C08J7/123 , H01J37/3402 , H01J37/3405
摘要： A process is described for modification of a surface of a substrate by ion bombardment, in which the ions are produced by means of a magnetic field-assisted glow discharge in a process gas. The magnetic field-assisted glow discharge is produced by means of a magnetron having an electrode and at least one magnet for production of the magnetic field. The process gas has at least one electronegative constituent, such that negative ions are produced in the magnetic field-assisted glow discharge, and the negative ions which are produced at the surface of the electrode are accelerated in the direction of the substrate by an electrical voltage applied to the electrode.
摘要翻译：描述了通过离子轰击修饰基底表面的方法，其中通过在工艺气体中的磁场辅助辉光放电产生离子。磁场辅助辉光放电通过具有电极和用于产生磁场的至少一个磁体的磁控管产生。处理气体具有至少一个电负性成分，使得在磁场辅助辉光放电中产生负离子，并且在电极表面产生的负离子通过电压在衬底的方向上加速施加到电极。

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