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    • 11. 发明申请
    • Sensor-type semiconductor device and manufacturing method thereof
    • 传感器型半导体器件及其制造方法
    • US20080237767A1
    • 2008-10-02
    • US12080002
    • 2008-03-31
    • Chang-Yueh ChanChien-Ping HuangChih-Ming HuangCheng-Hsu Hsiao
    • Chang-Yueh ChanChien-Ping HuangChih-Ming HuangCheng-Hsu Hsiao
    • H01L31/0203H01L31/18
    • H01L27/14618B81C1/00888B81C2203/0118H01L23/3114H01L24/11H01L27/14683H01L2224/05001H01L2224/05008H01L2224/05024H01L2224/05026H01L2224/05124H01L2224/05147H01L2224/05155H01L2224/05166H01L2224/05184H01L2224/05548H01L2224/05569H01L2224/05644H01L2224/05655H01L2924/14H01L2924/00H01L2924/00014H01L2924/01074H01L2924/01023
    • A sensor-type semiconductor device and manufacturing method thereof are disclosed. The method includes providing a wafer comprising a plurality of sensor chips; forming concave grooves between the solder pads formed on the active surface of adjacent sensor chips; filling a filling material into the concave grooves and forming first conductive circuits electrically connecting the solder pads of adjacent sensor chips; mounting a light permeable body on the active surface of the wafer and thinning the non-active surface of the wafer to expose the filling material; mounting the wafer on a carrier board with second conductive circuits formed thereon corresponding in position to the filling material; forming first openings by cutting the light permeable body and the wafer to a position at which the second conductive circuits are located; forming metallic layers in the first openings by electroplating, the metallic layers electrically connecting the first and second conductive circuits of adjacent sensor chips; forming second openings by cutting the metallic layers to break the first conductive circuit connections and the second conductive circuit connections of adjacent sensor chips and meanwhile keep the first and second conductive circuits of each sensor chip still electrically connected through the metallic layers; filling a dielectric material into the second openings and removing the carrier board; and separating each of the sensor chips to form a plurality of sensor-type semiconductor devices. The invention overcomes the drawbacks of the prior art such as slanting notches formed on the non-active surface of the wafer, displacement of the notches due to the difficulty in precise alignment, as well as broken joints caused by concentrated stress generated in the slanting notches and exposed circuits.
    • 公开了一种传感器型半导体器件及其制造方法。 该方法包括提供包括多个传感器芯片的晶片; 在形成在相邻传感器芯片的有效表面上的焊盘之间形成凹槽; 将填充材料填充到凹槽中并形成电连接相邻传感器芯片的焊盘的第一导电电路; 将透光体安装在晶片的活性表面上并使晶片的非活性表面变薄以暴露填充材料; 将晶片安装在载体板上,其上形成有对应于位于填充材料的第二导电电路; 通过将透光体和晶片切割到第二导电电路所在的位置来形成第一开口; 通过电镀在第一开口中形成金属层,金属层电连接相邻传感器芯片的第一和第二导电电路; 通过切割金属层来形成第二开口,以破坏相邻传感器芯片的第一导电电路连接和第二导电电路连接,同时保持每个传感器芯片的第一和第二导电电路通过金属层电连接; 将电介质材料填充到第二开口中并移除载体板; 并分离每个传感器芯片以形成多个传感器型半导体器件。 本发明克服了现有技术的缺点,例如在晶片的非活性表面上形成的倾斜凹口,由于难以精确对准而导致的凹口位移以及由倾斜凹口产生的集中应力引起的断裂接头 和暴露电路。
    • 13. 发明授权
    • Package structure having MEMS element and fabrication method thereof
    • 具有MEMS元件的封装结构及其制造方法
    • US08154115B1
    • 2012-04-10
    • US13024672
    • 2011-02-10
    • Chang-Yueh ChanChien-Ping HuangChun-Chi KeShih-Kuang Chiu
    • Chang-Yueh ChanChien-Ping HuangChun-Chi KeShih-Kuang Chiu
    • H01L23/12
    • B81B7/007B81C2203/0154H01L2224/48091H01L2924/1461H01L2924/3025H01L2924/00014H01L2924/00
    • A package structure having an MEMS element includes: a chip having at least an MEMS element and a plurality of first conductive pads; a lid disposed on the chip to cover the MEMS element and having a plurality of second conductive pads formed thereon; a plurality of bonding wires electrically connecting the first and second conductive pads; a plurality of first bumps disposed on the second conductive pads, respectively; an encapsulant formed on the chip to encapsulate the lid, the bonding wires, the first and second conductive pads and the first bumps while exposing the top surfaces of the first bumps; and a plurality of circuits formed on the encapsulant and electrically connecting to the exposed first bumps, thereby avoiding the conventional drawback of electrical connection failure caused by position deviation of bonding wires due to mold flow of the encapsulant.
    • 具有MEMS元件的封装结构包括:具有至少MEMS元件和多个第一导电焊盘的芯片; 设置在所述芯片上以覆盖所述MEMS元件并且具有形成在其上的多个第二导电焊盘的盖; 电连接第一和第二导电焊盘的多个接合线; 分别设置在第二导电焊盘上的多个第一凸块; 密封剂,形成在所述芯片上以封装所述盖,所述接合线,所述第一和第二导电焊盘和所述第一凸起,同时暴露所述第一凸块的顶表面; 以及形成在密封剂上并与露出的第一凸起电连接的多个电路,从而避免了由于密封剂的模具流动导致的接合线的位置偏移导致的电连接故障的常规缺点。
    • 18. 发明申请
    • Semiconductor device and fabrication method thereof
    • 半导体器件及其制造方法
    • US20070164386A1
    • 2007-07-19
    • US11648045
    • 2006-12-28
    • Cheng-Yi ChangChien-Ping HuangYu-Po WangChih-Ming HuangCheng-Hsu Hsiao
    • Cheng-Yi ChangChien-Ping HuangYu-Po WangChih-Ming HuangCheng-Hsu Hsiao
    • H01L31/0203H01L21/56
    • H01L27/14687H01L24/97H01L27/14618H01L2224/48091H01L2224/48227H01L2224/8592H01L2224/97H01L2924/01033H01L2924/15311H01L2924/16195H01L2224/85H01L2924/00014
    • A semiconductor device and the fabrication method thereof are provided. The fabrication method includes providing a substrate module plate having a plurality of substrates; attaching at least one sensor chip to each of the substrates of the substrate module plate; electrically connecting each of the sensor chips to each of the substrates through bonding wires; forming an insulating layer between each sensor chip on the substrate module plate, wherein the height of the insulating layers are not greater than the thickness of the sensor chips so as to prevent flash from the insulating layers from contaminating the sensor chips; forming an adhesive lip on the insulating layer or forming a second insulating layer followed by forming the adhesive layer, wherein the adhesive layer or the second insulating layer is higher than the highest loop-height of the bonding wires; adhering a light transmitting cover to each adhesive layer to cover the sensor chip; and cutting the substrate module plate to separate the substrates to form a plurality of semiconductor devices each integrated with at least one sensor chip. As the adhesive layers are not in contact with the bonding wires, the problems of damaging or breaking the bonding wires can be prevented in the process of adhering the light transmitting cover.
    • 提供半导体器件及其制造方法。 该制造方法包括提供具有多个基板的基板模块板; 将至少一个传感器芯片附接到所述基板模块板的每个基板; 通过接合线将每个传感器芯片电连接到每个基板; 在衬底模块板上的每个传感器芯片之间形成绝缘层,其中绝缘层的高度不大于传感器芯片的厚度,以防止来自绝缘层的闪光污染传感器芯片; 在所述绝缘层上形成粘合剂唇缘或形成第二绝缘层,接着形成所述粘合剂层,其中所述粘合剂层或所述第二绝缘层高于所述接合线的最高环高度; 将透光盖粘附到每个粘合剂层以覆盖传感器芯片; 以及切割所述基板模块板以分离所述基板以形成多个半导体器件,每个半导体器件与至少一个传感器芯片集成。 由于粘合层不与接合线接触,所以在粘接透光罩的过程中可以防止损坏或断裂接合线的问题。