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    • 3. 发明授权
    • Package structure having MEMS element and fabrication method thereof
    • 具有MEMS元件的封装结构及其制造方法
    • US08154115B1
    • 2012-04-10
    • US13024672
    • 2011-02-10
    • Chang-Yueh ChanChien-Ping HuangChun-Chi KeShih-Kuang Chiu
    • Chang-Yueh ChanChien-Ping HuangChun-Chi KeShih-Kuang Chiu
    • H01L23/12
    • B81B7/007B81C2203/0154H01L2224/48091H01L2924/1461H01L2924/3025H01L2924/00014H01L2924/00
    • A package structure having an MEMS element includes: a chip having at least an MEMS element and a plurality of first conductive pads; a lid disposed on the chip to cover the MEMS element and having a plurality of second conductive pads formed thereon; a plurality of bonding wires electrically connecting the first and second conductive pads; a plurality of first bumps disposed on the second conductive pads, respectively; an encapsulant formed on the chip to encapsulate the lid, the bonding wires, the first and second conductive pads and the first bumps while exposing the top surfaces of the first bumps; and a plurality of circuits formed on the encapsulant and electrically connecting to the exposed first bumps, thereby avoiding the conventional drawback of electrical connection failure caused by position deviation of bonding wires due to mold flow of the encapsulant.
    • 具有MEMS元件的封装结构包括:具有至少MEMS元件和多个第一导电焊盘的芯片; 设置在所述芯片上以覆盖所述MEMS元件并且具有形成在其上的多个第二导电焊盘的盖; 电连接第一和第二导电焊盘的多个接合线; 分别设置在第二导电焊盘上的多个第一凸块; 密封剂,形成在所述芯片上以封装所述盖,所述接合线,所述第一和第二导电焊盘和所述第一凸起,同时暴露所述第一凸块的顶表面; 以及形成在密封剂上并与露出的第一凸起电连接的多个电路,从而避免了由于密封剂的模具流动导致的接合线的位置偏移导致的电连接故障的常规缺点。