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    • 11. 发明授权
    • Apparatus and method for scribing semiconductor wafers using vision recognition
    • 使用视觉识别刻划半导体晶片的装置和方法
    • US06822315B2
    • 2004-11-23
    • US10076818
    • 2002-02-14
    • Nikhil V. KelkarLuu T. Nguyen
    • Nikhil V. KelkarLuu T. Nguyen
    • H01L23544
    • H01L21/3043H01L21/67092H01L21/681
    • An apparatus and method for scribing a semiconductor wafer coated with a substantially opaque material using vision recognition is disclosed. The apparatus includes a stage configured to hold a wafer, an imaging unit configured to generate an image of the wafer, and a computer configured to identify the coordinates of the scribe lines on the wafer from the image. During operation, the wafer is imaged using the imaging unit. The computer then identifies the coordinates of the scribe lines on the wafer from the image. Thereafter the coordinates are provided to a dicing machine which performs the dicing of the wafer. Accuracy is therefore improved since the dicing machine relies on the coordinates of the scribe lines as opposed to attempting to recognize the scribe lines through the opaque material. According to various embodiments of the invention, the imaging unit may use infrared, X-ray or ultrasound waves to generate the image of the wafer.
    • 公开了一种用于使用视觉识别来划刻涂有基本不透明材料的半导体晶片的装置和方法。 该装置包括配置成保持晶片的台,被配置为产生晶片的图像的成像单元和被配置为从图像识别晶片上的划线的坐标的计算机。 在操作期间,使用成像单元对晶片进行成像。 然后,计算机从图像中识别晶片上划线的坐标。 此后,将坐标提供给执行晶片切割的切割机。 因此,由于切割机依赖于划痕线的坐标,而是试图通过不透明材料识别划线,因此精度得到改善。 根据本发明的各种实施例,成像单元可以使用红外,X射线或超声波来产生晶片的图像。