专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明申请

US20080219816A1 SMALL LOT LOADPORT CONFIGURATIONS 审中-公开
标题翻译：小载荷配置
公开(公告)号：US20080219816A1
公开(公告)日：2008-09-11
申请号：US12026452
申请日：2008-02-05
申请人： Michael R. Rice , Jeffrey C. Hudgens , Vinay K. Shah
发明人： Michael R. Rice , Jeffrey C. Hudgens , Vinay K. Shah
IPC分类号： H01L21/677
CPC分类号： H01L21/67126 , H01L21/67353 , H01L21/67373 , H01L21/67379 , H01L21/67772 , H01L21/67775
摘要： A substrate handling apparatus and method include a small lot loadport configuration having a plurality of small lot loadports adapted to be coupled to an equipment front end module (EFEM) designed for use with a large lot substrate carrier and having a large lot loadport envelope, where the small lot loadport configuration has a combined envelope substantially similar to the large lot loadport envelope, and where each small lot loadport is adapted to dock with a small lot substrate carrier. A system also is provided that includes (1) the (EFEM) and (2) the small lot loadport configuration. Numerous other aspects are provided.
摘要翻译：一种基板处理装置和方法包括小批量载荷端口配置，其具有多个小批量载荷端口，其适于耦合到设计用于大批量基板载体并且具有大批载荷端口封套的设备前端模块（EFEM），其中小批量装载端口配置具有基本上类似于大批量装载端口封套的组合封套，并且其中每个小批量装载端口适于与小批量衬底载体对准。还提供了一种系统，其中包括（1）（EFEM）和（2）小批量装载端口配置。提供了许多其他方面。

12. 发明授权

US08886354B2 Methods, systems and apparatus for rapid exchange of work material 有权
标题翻译：用于快速交换工作材料的方法，系统和装置
公开(公告)号：US08886354B2
公开(公告)日：2014-11-11
申请号：US12684660
申请日：2010-01-08
申请人： Vinay K. Shah , Sushant S. Koshti
发明人： Vinay K. Shah , Sushant S. Koshti
IPC分类号： G06F7/00 , H01L21/677
CPC分类号： H01L21/67766
摘要： Systems, apparatus and methods for the rapid exchange of work material in a facility processing substrates (e.g., LCD panels, solar panels, semiconductor wafers, or the like) are disclosed. The system may include load ports associated with a process tool, local storage units, and a work material exchange apparatus adapted to rapidly exchange work material at the ports, units, or other exchange locations. The work material exchange apparatus may include two or more end effectors coupled to one or more actuator members and which may be adapted to rapidly exchange two or more carriers containing work material at an exchange location.
摘要翻译：公开了用于在处理基板（例如，LCD面板，太阳能电池板，半导体晶片等）的设备中快速更换工作材料的系统，装置和方法。系统可以包括与处理工具相关联的装载端口，本地存储单元和适于在端口，单元或其他交换位置快速交换工作材料的工作材料交换装置。工作材料交换装置可以包括耦合到一个或多个致动器构件的两个或更多个端部执行器，并且可以适于在交换位置快速地交换包含工作材料的两个或更多个载体。

13. 发明授权

US08318512B2 Automated substrate handling and film quality inspection in solar cell processing 失效
标题翻译：太阳能电池加工中的自动基板处理和薄膜质量检测
公开(公告)号：US08318512B2
公开(公告)日：2012-11-27
申请号：US12769517
申请日：2010-04-28
申请人： Vinay K. Shah , Suresh Kumaraswami , Damon K. Cox
发明人： Vinay K. Shah , Suresh Kumaraswami , Damon K. Cox
IPC分类号： H01L21/66 , H04N7/18
CPC分类号： H01L21/67259 , H01L21/67155
摘要： The present invention generally provides an apparatus and a method for automatically calibrating the placement of fragile substrates into a substrate carrier. Embodiments of the present invention also provide an apparatus and a method for inspecting the fragile substrates prior to processing to prevent damaged substrates from being further processed or broken in subsequent transferring steps. Embodiments of the invention also generally provide an apparatus and a method for determining the alignment and orientation substrates that are to be delivered into or removed from a substrate carrier. Embodiments of the invention further provide an apparatus and method for accurately positioning the substrate carrier for substrate loading. The substrate carriers are generally used to support a batch of substrates that are to be processed in a batch processing chamber.
摘要翻译：本发明总体上提供了一种用于自动校准易碎基底放置到基底载体中的装置和方法。本发明的实施例还提供了一种用于在处理之前检查脆性基底以防止损坏的基底在随后的转移步骤中被进一步加工或破裂的装置和方法。本发明的实施例还总体上提供了一种用于确定将被输送到衬底载体或从衬底载体移除的对准和取向衬底的装置和方法。本发明的实施例还提供了一种用于精确地定位用于衬底加载的衬底载体的装置和方法。衬底载体通常用于支持待批处理室中待处理的一批衬底。

14. 发明申请

US20110116900A1 SUBSTRATE ALIGNMENT APPARATUS 审中-公开
标题翻译：基板对准装置
公开(公告)号：US20110116900A1
公开(公告)日：2011-05-19
申请号：US12948111
申请日：2010-11-17
申请人： Tristan R. Holtam , Keith B. Porthouse , Vinay K. Shah
发明人： Tristan R. Holtam , Keith B. Porthouse , Vinay K. Shah
IPC分类号： H01L21/677 , B65G47/22 , H01L21/68 , B65G47/24
CPC分类号： H01L21/68 , H01L21/67766 , H01L21/67781 , H01L21/6779
摘要： Embodiments of the present invention generally relate to an apparatus and method for accurately aligning a plurality of substrates arranged in a planar array for batch processing. In one embodiment, the substrate alignment apparatus includes an array of oversized, recessed pockets for receiving the plurality of substrates. The substrate alignment apparatus may pick up the plurality of substrates from a location in which each substrate is not accurately positioned. Each pocket is configured at an angle from horizontal such that each substrate slides to a predefined corner of the pocket resulting in accurate alignment of each substrate. A vibration, tilting, directional brushes, or gas cushion may be provided to the substrate alignment apparatus to aid in low friction alignment of each substrate within its respective pocket. In one embodiment, the substrate alignment apparatus is an end effector for use on a transfer robot for use in a cluster-type processing system. In another embodiment, the substrate alignment apparatus is an alignment table for use in an in-line processing system.
摘要翻译：本发明的实施例总体上涉及用于准确地对准布置在平面阵列中的多个基板以进行批量处理的装置和方法。在一个实施例中，基板对准装置包括用于容纳多个基板的尺寸过大的凹陷凹坑阵列。基板对准装置可以从每个基板未准确定位的位置拾取多个基板。每个口袋配置成与水平方向成一定角度，使得每个基底滑动到口袋的预定角度，导致每个基底的精确对准。可以向基板对准装置提供振动，倾斜，方向刷或气垫，以帮助每个基板在其相应的凹部内的低摩擦对准。在一个实施例中，基板对准装置是用于在簇型处理系统中使用的传送机器人上的端部执行器。在另一个实施例中，衬底对准装置是用于在线处理系统中的对准工作台。

15. 发明申请

US20100055901A1 LASER MATERIAL REMOVAL METHODS AND APPARATUS 失效
标题翻译：激光材料去除方法和装置
公开(公告)号：US20100055901A1
公开(公告)日：2010-03-04
申请号：US12545488
申请日：2009-08-21
申请人： Zhenhua Zhang , Virendra V.S. Rana , Vinay K. Shah , Chris Eberspacher
发明人： Zhenhua Zhang , Virendra V.S. Rana , Vinay K. Shah , Chris Eberspacher
IPC分类号： H01L21/30 , B23K26/38 , B05C11/00
CPC分类号： B23K26/03 , B23K26/06 , B23K26/0624 , B23K26/082 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2101/40 , B23K2103/50 , H01L31/022441 , H01L31/0682 , H01L31/18 , Y02E10/547
摘要： Embodiments of the present invention generally provide methods and apparatus for material removal using lasers in the fabrication of solar cells. In one embodiment, an apparatus is provided that precisely removes portions of a dielectric layer deposited on a solar cell substrate according to a desired pattern and deposits a conductive layer over the patterned dielectric layer. In one embodiment, the apparatus also removes portions of the conductive layer in a desired pattern. In certain embodiments, methods for removing a portion of a material via a laser without damaging the underlying substrate are provided. In one embodiment, the intensity profile of the beam is adjusted so that the difference between the maximum and minimum intensity within a spot formed on a substrate surface is reduced to an optimum range. In one example, the substrate is positioned such that the peak intensity at the center versus the periphery of the substrate is lowered. In one embodiment, the pulse energy is improved to provide thermal stress and physical lift-off of a desired portion of a dielectric layer.
摘要翻译：本发明的实施例一般提供了在制造太阳能电池中使用激光去除材料的方法和装置。在一个实施例中，提供了一种装置，其根据期望的图案精确地去除沉积在太阳能电池基板上的电介质层的部分，并且在图案化的电介质层上沉积导电层。在一个实施例中，该装置还以期望的图案去除导电层的部分。在某些实施例中，提供了用于通过激光去除材料的一部分而不损坏下面的衬底的方法。在一个实施例中，调整光束的强度分布，使得在衬底表面上形成的斑点内的最大和最小强度之间的差减小到最佳范围。在一个示例中，衬底被定位成使得在中心处的衬底的峰值强度相对于衬底的周边被降低。在一个实施例中，改善脉冲能量以提供电介质层的期望部分的热应力和物理剥离。

16. 发明申请

US20090101483A1 METHODS AND APPARATUS FOR TRANSPORTING SUBSTRATE CARRIERS 有权
标题翻译：运输基板载体的方法和装置
公开(公告)号：US20090101483A1
公开(公告)日：2009-04-23
申请号：US12254839
申请日：2008-10-21
申请人： Vinay K. Shah , Jeffrey C. Hudgens
发明人： Vinay K. Shah , Jeffrey C. Hudgens
IPC分类号： B65G15/22 , B65G15/60 , B65G47/00
CPC分类号： B65G15/44 , B65G15/56
摘要： A conveyor apparatus adapted to transport and article is provided. The conveyor apparatus has a belt section including a plurality of slots and a plurality of T-shaped stiffeners extending in the slots. Respective belt sections may be spliced together using a plurality of T-shaped stiffeners extending through slots in diagonally-formed ends of each belt section. Methods of the invention are described as are numerous other aspects.
摘要翻译：提供适于运输和物品的输送设备。输送装置具有带部分，该带部分包括多个槽和在槽中延伸的多个T形加强件。可以使用多个T形加强筋将相应的带部分拼接在一起，每个T形加强件穿过每个带部分的对角线形成的端部中的槽。本发明的方法被描述为许多其它方面。

17. 发明申请

US20120210937A1 SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER 审中-公开
标题翻译：使用批处理室的基板处理装置
公开(公告)号：US20120210937A1
公开(公告)日：2012-08-23
申请号：US13458520
申请日：2012-04-27
申请人： RANDHIR THAKUR , STEVE G. GHANAYEM , JOSEPH YUDOVSKY , AARON WEBB , ADAM ALEXANDER BRAILOVE , NIR MERRY , VINAY K. SHAH , ANDREAS G. HEGEDUS
发明人： RANDHIR THAKUR , STEVE G. GHANAYEM , JOSEPH YUDOVSKY , AARON WEBB , ADAM ALEXANDER BRAILOVE , NIR MERRY , VINAY K. SHAH , ANDREAS G. HEGEDUS
IPC分类号： C23C16/46 , C23C16/50 , F28F3/12 , C23C16/44
CPC分类号： H01L21/67109 , C23C16/4412 , C23C16/45546 , C23C16/45593 , C23C16/4584 , C23C16/481 , C23C16/54 , H01L21/67017 , H01L21/67115 , H01L21/67167 , H01L21/6719 , H01L21/67207 , H01L21/67745 , H01L21/67757 , H01L21/67781
摘要： Aspects of the invention include a method and apparatus for processing a substrate using a multi-chamber processing system (e.g., a cluster tool) adapted to process substrates in one or more batch and/or single substrate processing chambers to increase the system throughput.
摘要翻译：本发明的方面包括使用适于在一个或多个批次和/或单个基板处理室中处理基板以增加系统吞吐量的多室处理系统（例如，集群工具）来处理基板的方法和装置。

18. 发明申请

US20110245957A1 ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS 审中-公开
标题翻译：用于加工结晶硅太阳能电池的先进平台
公开(公告)号：US20110245957A1
公开(公告)日：2011-10-06
申请号：US12755255
申请日：2010-04-06
申请人： KEITH B. PORTHOUSE , Tristan R. Holtam , Lisong Zhou , Vinay K. Shah , Damon K. Cox
发明人： KEITH B. PORTHOUSE , Tristan R. Holtam , Lisong Zhou , Vinay K. Shah , Damon K. Cox
IPC分类号： G06F19/00 , B08B1/02
CPC分类号： H01L21/68742 , H01L21/67109 , H01L21/67201 , H01L21/67236 , H01L21/67736 , H01L21/67742 , H01L21/67769
摘要： The present invention generally provides a batch substrate processing system for in-situ processing of a film stack used to form regions of a solar cell device. The batch processing system is configured to process an array of substrates positioned on a substrate carrier. The batch processing system includes a substrate transport interface that provides loading an unloading of the array of substrates in a production line environment. The substrate transport interface may include one or more of a substrate carrier cleaning module, a substrate carrier cooling module, and a substrate carrier buffer module.
摘要翻译：本发明通常提供了用于原位处理用于形成太阳能电池装置的区域的薄膜叠层的批量衬底处理系统。批处理系统被配置为处理位于衬底载体上的衬底阵列。批量处理系统包括基板输送界面，其在生产线环境中提供加载基板阵列的卸载。衬底传输界面可以包括衬底载体清洁模块，衬底载体冷却模块和衬底载体缓冲模块中的一个或多个。

19. 发明申请

US20110162706A1 PASSIVATED POLYSILICON EMITTER SOLAR CELL AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：被分解的多晶硅发射体太阳能电池及其制造方法
公开(公告)号：US20110162706A1
公开(公告)日：2011-07-07
申请号：US12983846
申请日：2011-01-03
申请人： Peter G. Borden , Li Xu , Tristan R. Holtam , Vinay K. Shah
发明人： Peter G. Borden , Li Xu , Tristan R. Holtam , Vinay K. Shah
IPC分类号： H01L31/0216 , H01L31/18
CPC分类号： H01L31/03682 , H01L31/03921 , H01L31/068 , H01L31/182 , H01L31/1864 , H01L31/1868 , Y02E10/546 , Y02E10/547 , Y02P70/521
摘要： A method for manufacturing a polysilicon emitter solar cell with a passivating layer over its polysilicon emitter layer is disclosed. The method includes steps of preparing a substrate, forming a first polysilicon layer over the substrate, and forming a first passivating layer over the first polysilicon layer. Another embodiment of the present invention discloses a solar cell apparatus. The solar cell apparatus includes a substrate, a first polysilicon layer over the substrate, and a first passivating layer on first polysilicon layer.
摘要翻译：公开了一种在其多晶硅发射极层上制造具有钝化层的多晶硅发射极太阳能电池的方法。该方法包括制备衬底，在衬底上形成第一多晶硅层，以及在第一多晶硅层上形成第一钝化层的步骤。本发明的另一实施例公开了一种太阳能电池装置。太阳能电池装置包括衬底，衬底上的第一多晶硅层和第一多晶硅层上的第一钝化层。

20. 发明授权

US07833351B2 Batch processing platform for ALD and CVD 失效
标题翻译： ALD和CVD的批处理平台
公开(公告)号：US07833351B2
公开(公告)日：2010-11-16
申请号：US11426563
申请日：2006-06-26
申请人： Aaron Webb , Adam Brailove , Joseph Yudovsky , Nir Merry , Andrew Constant , Efrain Quiles , Michael R. Rice , Gary J. Rosen , Vinay K. Shah
发明人： Aaron Webb , Adam Brailove , Joseph Yudovsky , Nir Merry , Andrew Constant , Efrain Quiles , Michael R. Rice , Gary J. Rosen , Vinay K. Shah
IPC分类号： C23F1/00 , H01L21/306
CPC分类号： C23C16/54 , C23C16/4583 , H01L21/67173 , H01L21/67742 , H01L21/67757 , H01L21/67769 , Y10S414/14
摘要： A batch processing platform used for ALD or CVD processing is configured for high throughput and minimal footprint. In one embodiment, the processing platform comprises an atmospheric transfer region, at least one batch processing chamber with a buffer chamber and staging platform, and a transfer robot disposed in the transfer region wherein the transfer robot has at least one substrate transfer arm that comprises multiple substrate handling blades. The platform may include two batch processing chambers configured with a service aisle disposed therebetween to provide necessary service access to the transfer robot and the deposition stations. In another embodiment, the processing platform comprises at least one batch processing chamber, a substrate transfer robot that is adapted to transfer substrates between a FOUP and a processing cassette, and a cassette transfer region containing a cassette handler robot. The cassette handler robot may be a linear actuator or a rotary table.
摘要翻译：用于ALD或CVD处理的批处理平台配置为高吞吐量和最小占地面积。在一个实施例中，处理平台包括大气传送区域，具有缓冲室和分段平台的至少一个批处理室和设置在传送区域中的传送机器人，其中传送机器人具有至少一个基板传送臂，该基板传送臂包括多个基板处理刀片。平台可以包括两个批处理室，其配置有设置在其间的服务通道，以提供对传送机器人和沉积站的必要的服务访问。在另一个实施例中，处理平台包括至少一个批处理室，适于在FOUP和处理盒之间传送基板的基板传送机器人以及包含盒式处理机器人的盒传送区域。盒式处理机器人可以是线性致动器或旋转台。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式