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    • 15. 发明申请
    • Charged particle beam apparatus
    • 带电粒子束装置
    • US20070045560A1
    • 2007-03-01
    • US11509520
    • 2006-08-24
    • Haruo TakahashiToshiaki FujiiYutaka IkkuKouji IwasakiYo Yamamoto
    • Haruo TakahashiToshiaki FujiiYutaka IkkuKouji IwasakiYo Yamamoto
    • H01J37/20G01N1/28
    • H01J37/304G01N1/32H01J2237/31745H01J2237/31749
    • To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing by irradiating a gas-ion beam onto a surface of the sliced specimen, a specimen stage on which the sliced specimen is fixed and having at least one or more rotation axis, a specimen posture recognition means recognizing positional relation of the sliced specimen with respect to the specimen stage and a specimen stage control means controlling the specimen stage based on a specimen posture recognized by the posture recognition means and an installation angle of the gas-ion beam irradiation apparatus in order to allow an incident angle of the gas-ion beam with respect to the obverse or the reverse of the sliced specimen to be a desired value.
    • 为了包括聚焦离子束装置,通过加工试样和观察切片试样来制造切片样品,观察切片试样的扫描电子显微镜,气相离子束照射装置,通过将气体离子束照射到 切片试样的表面,切片试样固定并具有至少一个以上的旋转轴的试样台,识别切片试样相对于试样台的位置关系的试样姿势识别装置和试样台控制 意味着基于由姿势识别装置识别的样本姿势和气体离子束照射装置的安装角度来控制样本台,以便允许气体离子束相对于正面或反向的入射角 切片样品为期望值。