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1. 发明授权

US08657962B2 Particle removing method, particle removing device, atomic force microscope, and charged particle beam apparatus 有权
标题翻译：粒子去除法，粒子去除装置，原子力显微镜和带电粒子束装置
公开(公告)号：US08657962B2
公开(公告)日：2014-02-25
申请号：US12139065
申请日：2008-06-13
申请人： Hiroki Hayashi , Takashi Konno , Kouji Iwasaki , Masatoshi Yasutake , Junichi Tashiro
发明人： Hiroki Hayashi , Takashi Konno , Kouji Iwasaki , Masatoshi Yasutake , Junichi Tashiro
IPC分类号： B08B7/00
CPC分类号： B25J7/00 , G01Q80/00
摘要： Small tweezers having a pair of arms openable and closable is moved closer to a sample and grips a particle attached on a surface of the sample and carries it onto an adhesion member to attach it thereto. The small tweezers are opened to release the particle and brought away from the adhesion member to leave the particle on the adhesion member. A particle removing device includes small tweezers having a pair of arms openable and closable; an opening/closing driving unit that drives the arm or arms to open/close the small tweezers; a stage mounting an adhesion member that attaches thereto a particle to withdraw the particle; and a moving mechanism that moves the small tweezers between the sample and the adhesion member mounted on the stage. Also, an atomic force microscope and a charged ion beam apparatus that include the particle removing device are disclosed.
摘要翻译：具有可打开和关闭的一对臂的小镊子移动得更靠近样品并且夹持附着在样品表面上的颗粒并将其携带到粘附构件上以将其附着在其上。打开小镊子以释放颗粒并从附着构件脱离，使颗粒留在粘合构件上。颗粒除去装置包括具有可打开和关闭的一对臂的小镊子; 打开/关闭驱动单元，驱动臂或臂打开/关闭小镊子; 安装附着于其上以吸收颗粒的粘合构件的载物台; 以及移动机构，其将小镊子移动在样品和安装在台架上的粘合构件之间。另外，还公开了包括粒子除去装置的原子力显微镜和带电离子束装置。

2. 发明授权

US07987703B2 Tweezer-equipped scanning probe microscope and transfer method 有权
标题翻译：镊子扫描探针显微镜和转印方法
公开(公告)号：US07987703B2
公开(公告)日：2011-08-02
申请号：US12130311
申请日：2008-05-30
申请人： Takashi Konno , Masatoshi Yasutake
发明人： Takashi Konno , Masatoshi Yasutake
IPC分类号： G01B5/28
CPC分类号： G01Q30/20 , G01Q10/065 , G01Q60/32 , G01Q60/38
摘要： A tweezer-equipped scanning probe microscope comprises a first arm with a probing portion, a second arm that moves along an opening direction or a closing direction relative to the first arm, an electrostatic actuator that drives the second arm along the opening direction or the closing direction based upon an opening/closing drive voltage applied thereto, an amplifier that induces self-oscillation in the electrostatic actuator by using an electrically equivalent circuit accompanying the electrostatic actuator as a feedback circuit and causes the second arm to vibrate through the self-oscillation, and a vibration state detection unit that detects a change of vibration state of the second arm as the second arm contacts an object.
摘要翻译：配有镊子的扫描探针显微镜包括具有探测部分的第一臂，相对于第一臂沿着打开方向或关闭方向移动的第二臂，沿着打开方向或闭合驱动第二臂的静电致动器基于施加到其上的打开/关闭驱动电压的方向，通过使用伴随静电致动器的电等效电路作为反馈电路而在静电致动器中引起自振荡并且使第二臂通过自振荡振动的放大器，以及振动状态检测单元，其检测当所述第二臂接触物体时所述第二臂的振动状态的变化。

3. 发明申请

US20080295585A1 Tweezer-Equipped Scanning Probe Microscope and Transfer Method 有权
标题翻译：镊子扫描探针显微镜和转印方法
公开(公告)号：US20080295585A1
公开(公告)日：2008-12-04
申请号：US12130311
申请日：2008-05-30
申请人： Takashi Konno , Masatoshi Yasutake
发明人： Takashi Konno , Masatoshi Yasutake
IPC分类号： G01B5/28
CPC分类号： G01Q30/20 , G01Q10/065 , G01Q60/32 , G01Q60/38
摘要： A tweezer-equipped scanning probe microscope comprises a first arm with a probing portion, a second arm that moves along an opening direction or a closing direction relative to the first arm, an electrostatic actuator that drives the second arm along the opening direction or the closing direction based upon an opening/closing drive voltage applied thereto, an amplifier that induces self-oscillation in the electrostatic actuator by using an electrically equivalent circuit accompanying the electrostatic actuator as a feedback circuit and causes the second arm to vibrate through the self-oscillation, and a vibration state detection unit that detects a change of vibration state of the second arm as the second arm contacts an object.
摘要翻译：配有镊子的扫描探针显微镜包括具有探测部分的第一臂，相对于第一臂沿打开方向或关闭方向移动的第二臂，沿着打开方向或闭合驱动第二臂的静电致动器基于施加到其上的打开/关闭驱动电压的方向，通过使用伴随静电致动器的电等效电路作为反馈电路而在静电致动器中引起自振荡并且使第二臂通过自振荡振动的放大器，以及振动状态检测单元，其检测当所述第二臂接触物体时所述第二臂的振动状态的变化。

4. 发明申请

US20070278177A1 Processing method using atomic force microscope microfabrication device 审中-公开
标题翻译：使用原子力显微镜微加工装置的加工方法
公开(公告)号：US20070278177A1
公开(公告)日：2007-12-06
申请号：US11809518
申请日：2007-06-01
申请人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
发明人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68
CPC分类号： C03C19/00 , B82Y10/00 , G01Q80/00
摘要： Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.
摘要翻译：通过关闭具有探针的原子力显微镜的悬臂的Z型压电致动器的反馈控制系统，该高度被固定在目标高度的条件下，其比加工材料更硬，悬臂的弯曲和扭曲当在被处理区域（在检测弯曲的情况下，与悬臂平行的情况下，并且在检测到扭转的情况下，与悬臂垂直的情况下）进行机械处理时，通过象限光电二极管位置感测检测器监视重复加工直到挠曲量或扭转量，即直到悬臂的弹性变形量变得不大于确定的阈值。在获得用于检测终点的高度信息时，不需要进行观察的扫描，从而可以提高处理的吞吐量。

5. 发明申请

US20050263700A1 Processing method using probe of scanning probe microscope 失效
标题翻译：使用扫描探针显微镜探头的加工方法
公开(公告)号：US20050263700A1
公开(公告)日：2005-12-01
申请号：US11135076
申请日：2005-05-23
申请人： Osamu Takaoka , Masatoshi Yasutake , Shigeru Wakiyama , Maoya Watanabe
发明人： Osamu Takaoka , Masatoshi Yasutake , Shigeru Wakiyama , Maoya Watanabe
IPC分类号： B81C99/00 , B82B3/00 , B82Y15/00 , B82Y40/00 , G01N23/00 , G01Q60/10 , G01Q80/00 , G01Q90/00 , G03F1/08 , G03F1/68 , G03F1/72
CPC分类号： G03F1/72 , G01Q10/06 , G01Q70/04 , G01Q80/00
摘要： Fine markers are formed by thrusting a probe, which is harder than material to be processed, the formed fine markers are observed in the course of processing, the drift amount is obtained from the change of the position of the center of gravity of the hole, and the processing is restarted in the processing area corrected by the obtained drift amount.
摘要翻译：通过推出比待处理材料更难的探针来形成精细标记，在加工过程中观察形成的精细标记，漂移量由孔的重心位置的变化获得，并且在通过所获得的漂移量校正的处理区域中重新开始处理。

6. 发明申请

US20050089463A1 Method for fabricating nanometer-scale structure 有权
标题翻译：制造纳米级结构的方法
公开(公告)号：US20050089463A1
公开(公告)日：2005-04-28
申请号：US10951000
申请日：2004-09-27
申请人： Masatoshi Yasutake , Takashi Kaito , Yoshiharu Shirakawabe , Itaru Kitajima
发明人： Masatoshi Yasutake , Takashi Kaito , Yoshiharu Shirakawabe , Itaru Kitajima
IPC分类号： B82B3/00 , B82B1/00 , C01B31/00 , C01B31/02 , C23C16/48 , D01C5/00 , D01F9/12 , D01F9/127 , G01Q60/00 , G01Q70/12
CPC分类号： G01Q70/12 , C01B32/162 , D01F9/12 , D01F9/1276
摘要： In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy beam to the sample, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.
摘要翻译：在通过在预定位置处以预定方向布置纳米管制造纳米级结构的方法中，纳米级结构的制造方法包括：通过照射聚焦能量束来蚀刻预定部分来平坦化基板的第一步骤以样品的方式分解和沉积有机气体到目标为确定位置和方向的柱状结构中的第二步骤，以及通过使用这样沉积的柱状结构作为位置标准来附着和固定纳米管的第三步骤和方向。

7. 发明授权

US06787769B2 Conductive probe for scanning microscope and machining method using the same 失效
标题翻译：用于扫描显微镜的导电探针及使用其的加工方法
公开(公告)号：US06787769B2
公开(公告)日：2004-09-07
申请号：US10182331
申请日：2002-07-26
申请人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
发明人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
IPC分类号： G01N2300
CPC分类号： G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/12
摘要： A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the cantilever, a conductive nonatube with its base end portion being fixed in contact which the surface of a predetermined of the cantilever, and a conductive deposit which fastens the conductive nanotube by covering from the base end portion of the nonatube to a part of the conductive film. The conductive nonatube and the conductive film are electrically connected to each other by the conductive deposit.
摘要翻译：一种用于扫描型显微镜的导电探针，其通过固定到悬臂的导电纳米管探针的尖端捕获试样表面的物质信息，其中导电探针由形成在表面上的导电膜构成悬臂，其基端部固定为导电的非导管，其中预定的悬臂的表面是接触的，以及导电沉积物，其通过从非管形管的基端部分覆盖到导电的一部分来紧固导电纳米管电影。导电非导体和导电膜通过导电沉积物彼此电连接。

8. 发明授权

US06759653B2 Probe for scanning microscope produced by focused ion beam machining 失效
标题翻译：通过聚焦离子束加工扫描显微镜的探头
公开(公告)号：US06759653B2
公开(公告)日：2004-07-06
申请号：US10182330
申请日：2002-07-26
申请人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
发明人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
IPC分类号： G21K700
CPC分类号： G01Q60/38 , G01Q70/12
摘要： A scanning type microscope that captures substance information of the surface of a specimen by the tip end of a nanotube probe needle fastened to a cantilever, in which an organic gas is decomposed by a focused ion beam in a focused ion beam apparatus, and the nanotube is bonded to the cantilever with a deposit of the decomposed component thus produced. With this probe, the quality of the nanotube probe needle can be improved by removing an unnecessary deposit adhering to the nanotube tip end portion using a ion beam, by cutting an unnecessary part of the nanotube in order to control length of the probe needle and by injecting ions into the tip end portion of the nanotube.
摘要翻译：一种扫描型显微镜，其通过紧固在悬臂上的纳米管探针的前端捕获试样表面的物质信息，其中有机气体在聚焦离子束装置中被聚焦离子束分解，并且纳米管与由此产生的分解成分的沉积物粘合到悬臂上。利用该探针，可以通过使用离子束除去附着在纳米管末端部分的不必要的沉积物，通过切割不需要的纳米管部分来控制探针的长度，并且通过将离子注入纳米管的前端部。

9. 发明授权

US6078044A Probe scanning apparatus 失效
标题翻译：探头扫描仪
公开(公告)号：US6078044A
公开(公告)日：2000-06-20
申请号：US855543
申请日：1997-05-13
申请人： Masatoshi Yasutake , Yukihiro Sato
发明人： Masatoshi Yasutake , Yukihiro Sato
IPC分类号： F16F9/30 , F16F9/52 , G01B7/34 , G01N27/00 , G01Q10/02 , G01Q10/04 , G01Q70/02 , H01J37/00
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/02 , Y10S977/872
摘要： A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample comprises a probe and voice coil motors for generating a moving force for moving the probe in each of three directions x, y and z upon activation of the voice coil motors. A probe supporting mechanism is mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y.
摘要翻译：用于测量表面形状或样品的物理特性的装置中的探针扫描装置包括用于产生用于在三个方向x，y和z中的每一个方向上移动探针的移动力的探针和音圈电机激活音圈电机。安装探头支撑机构，用于在音圈电动机激活时由音圈电动机产生的移动力在三个方向x，y和z上移动，以使探针在方向z上粗略/精细地移动，并扫描探针方向x和y。

10. 发明授权

US5440121A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5440121A
公开(公告)日：1995-08-08
申请号：US174292
申请日：1993-12-28
申请人： Masatoshi Yasutake , Nobutaka Nakamura
发明人： Masatoshi Yasutake , Nobutaka Nakamura
IPC分类号： G01Q10/00 , G01Q60/30 , G01Q60/32 , G01Q60/40 , H01J37/00
CPC分类号： G01Q60/30 , B82Y35/00 , G01Q60/32 , G01Q60/40 , Y10S977/852 , Y10S977/86
摘要： A scanning probe microscope uses a conductive material as a probe of AFM. The probe scans a sample while the probe is forcibly oscillated by applying alternating current voltage from an oscillator between the probe and the sample. Signals .omega. and 2.omega. from the probe are extracted with an analog processor using a discrete Fourier transformation, so that distribution of surface potential of the sample is obtained using the signals .omega. and 2.omega..
摘要翻译：扫描探针显微镜使用导电材料作为AFM的探针。探头通过从探头和样品之间的振荡器施加交流电压强制振荡探针，扫描样品。使用离散傅里叶变换，用模拟处理器提取来自探针的信号ω和2ω，从而使用信号ω和2ω获得样品的表面电位分布。

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