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11. 发明授权

US07688454B1 Scatterometry metrology using inelastic scattering 有权
标题翻译：散射测量使用非弹性散射
公开(公告)号：US07688454B1
公开(公告)日：2010-03-30
申请号：US12200325
申请日：2008-08-28
申请人： Gary R. Janik
发明人： Gary R. Janik
IPC分类号： G01B11/30 , G01B11/14 , G01J3/44 , G01J3/427 , G01J3/28
CPC分类号： G01B11/0616 , G01N21/65 , G01N2021/653
摘要： A system for characterizing material properties in miniature semiconductor structures performs a scatterometry analysis on inelastically scattered light. The system can include a narrowband probe beam generator and a detector. A single wavelength probe beam from the narrowband probe beam generator produces scattered light from a measurement pattern on a test sample. The scattered light is measured by the detector, and the measurement data (e.g., Raman spectrum) is used in a scatterometry analysis to determine material properties for the measurement pattern. The detector can measure either incoherent inelastically scattered light (e.g., using a spectrometer) or coherent inelastically scattered light (e.g., using an array detector). If the measurement pattern dimensions are substantially similar to actual device dimensions, the material property distributions determined for the measurement pattern can be applied to the actual devices on the test sample.
摘要翻译：用于表征微型半导体结构中的材料性质的系统对非弹性散射光进行散射分析。该系统可以包括窄带探测光束发生器和检测器。来自窄带探测光束发生器的单个波长探测光束从测试样品上的测量图形产生散射光。通过检测器测量散射光，并且在散射分析中使用测量数据（例如，拉曼光谱）来确定测量图案的材料特性。检测器可以测量非相干非弹性散射光（例如，使用光谱仪）或相干非弹性散射光（例如，使用阵列检测器）。如果测量图形尺寸基本上类似于实际的装置尺寸，则可以将测量图案确定的材料特性分布应用于测试样品上的实际装置。

12. 发明授权

US07427757B1 Large collection angle x-ray monochromators for electron probe microanalysis 失效
标题翻译：用于电子探针微量分析的大型收集角x射线单色仪
公开(公告)号：US07427757B1
公开(公告)日：2008-09-23
申请号：US11295258
申请日：2005-12-05
申请人： Gary R. Janik , Jeffrey A. Moore
发明人： Gary R. Janik , Jeffrey A. Moore
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G21K1/06 , H01J37/244 , H01J37/252 , H01J2237/24425 , H01J2237/2561
摘要： X-ray monochromators and electron probe micro-analysis (EPMA) systems using such monochromators are disclosed. A turretless x-ray monochromator may have a cassette of reflectors instead of a turret. The cassette stores a plurality of reflectors that can be inserted into a conventional Rowland circle monochromator geometry. A transfer mechanism selectively moves reflectors from the cassette to a reflector positioner. The use of the cassette allows each reflector to be placed closer to a source of x-rays, thereby allowing a larger solid angle for x-ray collection. An alternative x-ray monochromator uses a non-focusing reflector that can be fixed, scanned axially or scanned radially to provide large solid angle detection of x-rays at various energies with a single reflector.
摘要翻译：公开了使用这种单色仪的X射线单色仪和电子探针微分析（EPMA）系统。无转塔X射线单色仪可以具有一个反射镜盒而不是一个转盘。磁带盒存储可以插入常规罗兰圆单色仪几何形状的多个反射器。传送机构选择性地将反射器从盒子移动到反射器定位器。使用盒式磁带允许每个反射器被放置得更靠近X射线源，从而允许用于x射线收集的更大的立体角。另一种x射线单色仪使用非聚焦反射器，其可以被固定，轴向扫描或径向扫描，以提供具有单个反射器的各种能量的X射线的大的立体角检测。

13. 发明授权

US07253901B2 Laser-based cleaning device for film analysis tool 有权
公开(公告)号：US07253901B2
公开(公告)日：2007-08-07
申请号：US10056271
申请日：2002-01-23
申请人： Gary R. Janik , Patrick M. Maxton
发明人： Gary R. Janik , Patrick M. Maxton
IPC分类号： G01J4/00 , G01N21/55 , G01N23/00 , G01N21/86 , G01N23/223 , G01B11/30 , G01B11/24 , G01B11/28 , G01B15/02 , G02F1/01 , H01J40/14 , G21K7/00 , G01V8/00 , G01R31/26 , G01R27/26 , G01R31/305 , G01R31/302 , H01L21/66 , G01T1/36 , B08B3/12 , B08B6/00 , B08B7/00 , B08B7/02 , C25F1/00 , C25F3/30 , C25F5/00
CPC分类号： G01N21/211
摘要： A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough of the contaminant layer to allow analysis of the underlying thin film, thereby enhancing analysis throughput while minimizing the chances of recontamination and/or damage to the thin film. An energy beam source can be readily incorporated into a conventional thin film analysis tool, thereby minimizing total analysis system footprint. Throughput can be maximized by focusing the probe beam (or probe structure) for the analysis operation at the same location as the energy beam so that repositioning is not required after the cleaning operation. Alternatively, the probe beam (structure) and the energy beam can be directed at different locations to reduce the chances of contamination of the analysis optics.

14. 发明授权

US07075073B1 Angle resolved x-ray detection 有权
标题翻译：角度分辨X线检测
公开(公告)号：US07075073B1
公开(公告)日：2006-07-11
申请号：US10851437
申请日：2004-05-21
申请人： Gary R. Janik , Jeffrey A. Moore , Edward M. James
发明人： Gary R. Janik , Jeffrey A. Moore , Edward M. James
IPC分类号： G21K1/02
CPC分类号： G01N23/20 , G21K1/06
摘要： An apparatus for detecting properties of a sample. An electron beam generator produces an electron beam and directs the electron beam at a desired point on the sample. The sample thereby emits characteristic x-rays at takeoff angles. A collimator receives and parallelizes the x-rays and converts the takeoff angles of the x-rays to positional differences between the parallelized x-rays. A diffractor receives and deflects the x-rays. A position sensitive detector receives the deflected x-rays and detects the positional differences between the x-rays, and generates signals that are characteristic of the received x-rays. An analyzer receives the signals from the detector and determines the properties of the sample based at least in part on the positional differences between the x-rays.
摘要翻译：一种用于检测样品特性的装置。电子束发生器产生电子束并将电子束引导到样品上的所需点。因此，样品从而以起飞角发射特征性X射线。准直器接收并平行X射线，并将x射线的射出角度转换为平行X射线之间的位置差异。衍射器接收和偏转x射线。位置敏感检测器接收偏转的x射线并检测x射线之间的位置差异，并产生作为接收到的x射线的特征的信号。分析仪接收来自检测器的信号，并且至少部分地基于X射线之间的位置差异来确定样品的性质。

15. 发明授权

US5676830A Method and apparatus for reducing band broadening in chromatographic detectors 失效
标题翻译：用于降低色谱检测器中带宽变宽的方法和装置
公开(公告)号：US5676830A
公开(公告)日：1997-10-14
申请号：US632035
申请日：1996-04-12
申请人： Gary R. Janik , Douglas W. Shepard
发明人： Gary R. Janik , Douglas W. Shepard
IPC分类号： G01N30/74 , B01D15/08
CPC分类号： G01N30/74
摘要： A capillary tube used to transfer a liquid sample into a detection cell following separation by a chromatographic system is modified by plugging or otherwise severely restricting its flow. Near its plugged end, said tube is drilled to provide a plurality of holes or ports perpendicular thereto and penetrating into the central flowing core of said tube so as to direct outflow from the tube perpendicularly therefrom. The outer diameter of this so-modified capillary tube is selected to be of a size comparable to, though smaller than, the detection cell diameter into which it transfers the flowing sample. In this manner, fluid transferred into a detection cell by said modified capillary tube will be split into a plurality of smaller streams flowing outwardly therefrom and striking the adjacent detector cell walls almost immediately. Because of the close proximity of the emerging split streams to the walls of the detection cell, the eddies produced thereby will be very small and the contents of the detection cell will be homogenized rapidly.
摘要翻译：用于在通过色谱系统分离后将液体样品转移到检测单元中的毛细管通过堵塞或以其他方式严格限制其流动来改变。在其堵塞端附近，所述管被钻孔以提供与其垂直的多个孔或孔，并且穿透到所述管的中心流动的芯中，以便从管垂直地引导从管垂直流出。该经修改的毛细管的外径被选择为与其传送流动样品的检测池直径相当的尺寸。以这种方式，通过所述改进的毛细管转移到检测单元中的流体将被分成多个从其向外流动的较小流，并几乎立即撞击相邻的检测器单元壁。由于新出现的分流与检测单元的壁的紧密接近，因此产生的涡流将非常小，并且检测单元的内容物将迅速均匀化。

16. 发明授权

US5475235A Control of laser light power output for use in light scattering instruments by inducing mode hopping and averaging result 失效
标题翻译：通过诱导跳频和平均结果控制用于光散射仪器的激光功率输出
公开(公告)号：US5475235A
公开(公告)日：1995-12-12
申请号：US105200
申请日：1993-08-09
申请人： David T. Phillips , Gary R. Janik
发明人： David T. Phillips , Gary R. Janik
IPC分类号： G01N15/02 , H01S5/042 , G01N15/06
CPC分类号： H01S5/042 , G01N15/0205 , H01S5/0427
摘要： The incorporation of certain classes of solid state lasers into light scattering instrumentation is desirable because of their compact structure. However, mode hopping often causes the output power produced by such lasers to be unstable. The frequency of such output power fluctuations is often so broad that output power monitoring means, characteristic of the light scattering instrumentation into which such lasers are incorporated, cannot track accurately the temporal output power fluctuations. A method, and associated apparatus, is described whereby the laser drive current is modulated at low frequency and amplitude sufficient to induce and thereby control mode hopping so as to permit accurate measurement of the ratio of light scattering signals to the laser output power.
摘要翻译：由于其紧凑的结构，将某些类别的固态激光器并入光散射仪器是合乎需要的。然而，跳频通常会导致由这种激光器产生的输出功率不稳定。这种输出功率波动的频率通常如此宽泛，使得其中结合有这种激光器的光散射仪器的特征的输出功率监视装置不能精确地跟踪时间输出功率波动。描述了一种方法和相关联的装置，其中激光驱动电流被调制在足够低的频率和幅度，以便引起并由此控制模式跳变，以便准确地测量光散射信号与激光输出功率的比率。

17. 发明授权

US07606677B1 Dynamic measurement control 失效
标题翻译：动态测量控制
公开(公告)号：US07606677B1
公开(公告)日：2009-10-20
申请号：US10986269
申请日：2004-11-10
申请人： Gary R. Janik , Eric Bouche , John Fielden
发明人： Gary R. Janik , Eric Bouche , John Fielden
IPC分类号： G06F3/01
CPC分类号： H01L22/20 , H01L22/12
摘要： A metrology recipe includes dynamic instructions that allow a metrology tool to perform a secondary metrology operation on a test wafer when previous measurement data indicates a process issue with that test wafer. The metrology recipe can instruct the metrology tool to perform an efficient default metrology operation on all test wafers, and perform a more in-depth secondary metrology operation on only those wafers that warrant additional scrutiny. In this manner, critical metrology data can be captured with a minimum of effect on metrology throughput. The metrology data used to determine whether or not the secondary metrology operation is to be performed can be generated from default metrology operations within the same tool, or can be generated by measurements taken by a completely different tool. Such “external” metrology data can be received via a communications network, either directly or from a server on the network for processing the metrology data.
摘要翻译：计量配方包括动态指令，允许计量工具在测试晶片上执行次级测量操作，以前的测量数据表明该测试晶片的过程问题。计量配方可以指示计量工具在所有测试晶圆上执行有效的默认计量操作，并对仅需要额外检查的晶圆进行更深入的次级测量操作。以这种方式，可以以最小的测量吞吐量影响来捕获关键测量数据。用于确定是否要执行二次测量操作的计量数据可以由同一工具内的默认计量操作生成，也可以通过完全不同的工具进行测量来生成。这样的“外部”计量学数据可以经由通信网络直接地或从网络上的服务器接收以处理度量数据。

18. 发明授权

US07196801B1 Patterned substrate surface mapping 有权
标题翻译：图案衬底表面映射
公开(公告)号：US07196801B1
公开(公告)日：2007-03-27
申请号：US10771020
申请日：2004-02-03
申请人： Gary R. Janik , Liang-Guo Wang , Christopher M. Pohlhammer
发明人： Gary R. Janik , Liang-Guo Wang , Christopher M. Pohlhammer
IPC分类号： G01B11/30
CPC分类号： G01B11/306
摘要： A method for measuring a characteristic of a substrate, including directing an incident beam at an inspection grid of points on the substrate, receiving the reflected beam with a position sensitive detector, measuring the displacement of the reflected beam from its expected location, compiling a database of the displacement measurements, examining the database for effects of a pattern induced anomaly in the displacement measurements, producing an adjusted database, and deriving the characteristic of the substrate from the adjusted database. Thus, pattern induced errors from the displacement measurements are corrected. In this manner, problems with interpreting the reflection angles of a beam in substrate stress analysis equipment are overcome where distortions in the reflection angles are caused by deposition patterns on the substrates.
摘要翻译：一种用于测量衬底的特性的方法，包括将入射光束定向在衬底上的点的检查栅格处，用位置敏感检测器接收反射光束，测量反射光束从其预期位置的位移，编译数据库的位移测量，检查数据库中位移测量中模式引起的异常的影响，产生调整后的数据库，以及从调整后的数据库导出底物的特征。因此，校正来自位移测量的图案诱导误差。以这种方式，克服了在基板应力分析设备中解释光束的反射角度的问题，其中反射角的失真是由基板上的沉积图案引起的。

19. 发明授权

US07190441B1 Methods and systems for preparing a sample for thin film analysis 有权
标题翻译：制备薄膜分析样品的方法和系统
公开(公告)号：US07190441B1
公开(公告)日：2007-03-13
申请号：US11021555
申请日：2004-12-22
申请人： James T. McWhirter , Liang-Guo Wang , Hidong Kwak , Haixing Zou , Dan Georgesco , Bernard Lautee , Jennming James Chen , Gary R. Janik , Patrick M. Maxton
发明人： James T. McWhirter , Liang-Guo Wang , Hidong Kwak , Haixing Zou , Dan Georgesco , Bernard Lautee , Jennming James Chen , Gary R. Janik , Patrick M. Maxton
IPC分类号： G01N1/00
CPC分类号： G01N1/32 , G01N1/2813 , H01L21/67028
摘要： Methods and systems for preparing a sample for thin film analysis are provided. One system includes an energy beam source configured to generate an energy beam. The system also includes an energy beam delivery subsystem configured to direct the energy beam to a sample and to modify the energy beam such that the energy beam has a substantially flat-top profile on the sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample. One method includes generating an energy beam and modifying the energy beam such that the energy beam has a substantially flat-top profile. The method also includes directing the energy beam to a sample. The energy beam removes a portion of a contaminant layer on the sample to expose an analysis area of a thin film on the sample.
摘要翻译：提供了制备用于薄膜分析的样品的方法和系统。一个系统包括被配置为产生能量束的能量束源。该系统还包括能量束传送子系统，其配置成将能量束引导到样品并修改能量束，使得能量束在样品上具有基本上平顶的轮廓。能量束去除样品上的污染物层的一部分以暴露样品上薄膜的分析区域。一种方法包括产生能量束并修改能量束，使得能量束具有基本平坦的轮廓。该方法还包括将能量束引导到样品。能量束去除样品上的污染物层的一部分以暴露样品上薄膜的分析区域。

20. 发明授权

US07039158B1 Multi-technique thin film analysis tool 有权
公开(公告)号：US07039158B1
公开(公告)日：2006-05-02
申请号：US10966468
申请日：2004-10-14
申请人： Gary R. Janik , Jeffrey Moore
发明人： Gary R. Janik , Jeffrey Moore
IPC分类号： G01N23/223
CPC分类号： G01B15/02 , G01N23/20
摘要： A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.

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