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131. 发明申请

US20150362391A1 Pressure Sensor, and Mass Flow Meter and Mass Flow Controller Using the Same 有权
标题翻译：压力传感器，质量流量计和质量流量控制器
公开(公告)号：US20150362391A1
公开(公告)日：2015-12-17
申请号：US14763353
申请日：2014-04-15
申请人： HITACHI METALS, LTD.
发明人： Kengo SUZUKI , Isao SAKAGUCHI , Atsushi KAZAMA
IPC分类号： G01L9/00 , G05D7/06 , G01F1/86
CPC分类号： G01L9/0051 , G01F1/86 , G01L9/0044 , G01L9/0047 , G01L9/0055 , G01L19/04 , G05D7/0635 , Y10T137/7837
摘要： There is provided a pressure sensor which includes: a diaphragm having an inside surface facing to a fluid-tight space, the diaphragm including a diaphragm film that is part of the inside surface and deformable in response to a pressure application, and a diaphragm film support that is part of the inside surface and constitutes a periphery of the diaphragm film; a strain sensor bonded to the inside surface so as to lie partially on the periphery and having plural strain gauges thereon; and a depression formed on the inside surface, when defining an x-direction oriented from center of the inside surface to a position bonded of the strain sensor and a y-direction perpendicular to the x-direction on the inside surface, the depression extending a certain length in the y-direction, the depression being adjacent to or a certain distance apart from an edge of the strain sensor in the y-direction.
摘要翻译：提供了一种压力传感器，其包括：具有面向流体密封空间的内表面的隔膜，所述隔膜包括作为内表面的一部分并且可以响应于压力施加而变形的隔膜膜，以及隔膜膜支撑件其是内表面的一部分并且构成隔膜的周边; 应变传感器，其结合到所述内表面，以部分地位于所述周边上并且在其上具有多个应变计; 以及形成在所述内表面上的凹部，当限定从所述内表面的中心到所述应变传感器的接合位置的x方向和在所述内表面上与所述x方向垂直的y方向时，所述凹部延伸在y方向上的一定长度，凹陷与y方向上的应变传感器的边缘相邻或距离一定距离。

132. 发明申请

US20150300903A1 Pressure Measuring Cell 有权
标题翻译：压力测量单元
公开(公告)号：US20150300903A1
公开(公告)日：2015-10-22
申请号：US14647527
申请日：2013-10-29
申请人： ENDRESS+HAUSER GMBH+CO. KG
发明人： Ulfert Drewes , Nils Ponath , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L19/06
CPC分类号： G01L19/06 , G01L9/0044 , G01L19/0618
摘要： A pressure measuring cell includes an elastic measuring membrane which is contactable with a first pressure on a first side and with a second pressure on a second side facing away from the first side. The measuring membrane is deflectable as a function of a difference between the first pressure and the second pressure, wherein the measuring membrane pressure-tightly isolates a first volume, which is facing the first side of the measuring membrane, from a second volume, which is facing the second side of the measuring membrane. The pressure measuring cell further includes a transducer for transducing the pressure dependent deflection of the measuring membrane into an electrical or optical signal. The measuring membrane has in the equilibrium state of the measuring membrane compressive stresses at least at the surface of the measuring membrane at least in a radial edge region, in which in the deflected state of the measuring membrane under pressure loading tensile stress maxima occur.
摘要翻译：压力测量单元包括弹性测量膜，该弹性测量膜可与第一侧上的第一压力接触并且在远离第一侧的第二侧上具有第二压力。测量膜可以作为第一压力和第二压力之间的差异的函数而偏转，其中测量膜将面向测量膜的第一侧的第一体积与第二体积压力紧密地隔离，第二体积面向测量膜的第二面。压力测量单元还包括用于将测量膜的压力相关偏转转换成电或光信号的换能器。测量膜至少在径向边缘区域至少在测量膜的表面处处于测量膜压缩应力的平衡状态，其中测量膜在压力负载拉伸应力最大值的偏转状态下发生。

133. 发明申请

US20150192486A1 PRESSURE SENSOR HAVING A BOSSED DIAPHRAGM 有权
标题翻译：压力传感器
公开(公告)号：US20150192486A1
公开(公告)日：2015-07-09
申请号：US14543074
申请日：2014-11-17
申请人： Honeywell International Inc.
发明人： Carl Stewart , Richard Davis , Gilberto Morales
IPC分类号： G01L9/00 , B81B3/00 , B81C1/00 , G01L7/08
CPC分类号： B81C1/00158 , B81B3/0021 , B81B3/007 , B81B2201/0264 , B81B2203/0127 , B81C2201/014 , B81C2201/0198 , B81C2203/0728 , G01L7/08 , G01L9/0042 , G01L9/0044 , G01L9/0047 , G01L9/0054 , G01L9/0055
摘要： A pressure sensor having a diaphragm having a boss with a pattern. The diaphragm having a boss may be regarded as a bossed diaphragm. The bossed diaphragm may have higher sensitivity than a flat plate diaphragm having the same area as the bossed diaphragm. The bossed diaphragm may incorporate a simple cross pattern that can further improve the sensitivity and linearity of a pressure response of the diaphragm at low pressures. Reduction of sharp edges and corners of the boss and its legs around the periphery of the diaphragm may reduce high stress points and thus increase the burst pressure rating of the bossed diaphragm.
摘要翻译：一种压力传感器，具有具有带图案的凸台的隔膜。具有凸台的隔膜可以被认为是凸起的隔膜。凸起的隔膜可能具有比具有与凸起隔膜相同面积的平板隔膜更高的灵敏度。凸起的隔膜可以包括简单的交叉图案，其可以进一步提高隔膜在低压下的压力响应的灵敏度和线性。凸起及其围绕隔膜周边的腿的尖锐边缘和拐角的减小可能会降低高应力点，从而提高凸起隔膜的爆破压力等级。

134. 发明申请

US20150068324A1 LOAD DETECTION DEVICE 有权
标题翻译：负载检测装置
公开(公告)号：US20150068324A1
公开(公告)日：2015-03-12
申请号：US14394604
申请日：2013-05-22
申请人： AISIN SEIKI KABUSHIKI KAISHA
发明人： Yasukuni Ojima , Naoya Iesato
IPC分类号： G01L1/22
CPC分类号： G01L1/22 , G01L1/2231 , G01L5/161 , G01L5/223 , G01L9/0044 , G01L9/0051 , G01L9/0055
摘要： A highly sensitive load detection device includes a tubular peripheral wall portion; a disk-shaped disk portion that has a through hole formed coaxially with the peripheral wall portion and that is supported on an inner surface of the peripheral wall portion with a gap between the disk portion and a placement surface on which the peripheral wall portion is placed; a load input portion that is formed in a spherical shape having a diameter larger than an inside diameter of the through hole on at least a side thereof facing the through hole, that is placed on the through hole, and to which a load of an object to be detected is input; and sensors that are provided on the disk portion so as to be point-symmetric about the through hole, and that detect a strain corresponding to the load input to the load input portion.
摘要翻译：一种高灵敏度的载荷检测装置包括一个管状周壁部分; 盘形盘部，其具有与周壁部同轴地形成的贯通孔，并且在圆周部壁与放置面之间具有间隙地支撑在周壁部的内表面上 ; 负载输入部，其形成为直径大于通孔内径的球形，其至少一侧面向通孔，该通孔位于通孔上，并且物体的负载被检测的是输入; 以及设置在所述盘部上以使所述通孔为点对称的传感器，并且检测与向所述负载输入部输入的负载相对应的应变。

135. 发明申请

US20140096615A1 PRESSURE TRANSDUCER USING CERAMIC DIAPHRAGM 有权
标题翻译：使用陶瓷膜的压力传感器
公开(公告)号：US20140096615A1
公开(公告)日：2014-04-10
申请号：US13648624
申请日：2012-10-10
申请人： Kyong M. Park , Si-Dong Kim
发明人： Kyong M. Park , Si-Dong Kim
IPC分类号： G01L9/04
CPC分类号： G01L9/04 , G01L9/0044 , G01L9/0051
摘要： A pressure transducer using a ceramic diaphragm which is not easily damaged so that there is no risk of leakage of a target medium to be measured, having a superior mass-production capability and a reduced volume and enabling low-price by simplifying a flexible cable and a printed circuit board (PCB) to connect the transducer and a signal processing chip. The pressure transducer includes the ceramic diaphragm formed as a rectangular planar ceramic diaphragm and having a surface having formed thereon a pattern made of an electrically conductive material and strain gages; a base plate configured to face the surface of the ceramic diaphragm having formed thereon the pattern; and an adhesive layer configured to be formed along edges of a contacting surface of the ceramic diaphragm and the base plate so as to bond the ceramic diaphragm and the base plate and form a space for the strain gages.
摘要翻译：一种使用不容易损坏的陶瓷膜片的压力传感器，具有优异的批量生产能力和减小的体积，并且通过简化柔性电缆而能够实现低价格，从而不会有待测量的目标介质泄漏的风险用于连接传感器的印刷电路板（PCB）和信号处理芯片。压力传感器包括形成为矩形平面陶瓷膜的陶瓷膜片，并且具有在其上形成有由导电材料和应变计制成的图案的表面; 基板，被配置为面对其上形成有所述图案的所述陶瓷膜的表面; 以及粘合层，其被构造成沿陶瓷隔膜和基板的接触表面的边缘形成，以便结合陶瓷隔膜和基板，并形成应变计的空间。

136. 发明申请

US20140060173A1 Slim Capacitance Sensor for Downhole Applications 有权
标题翻译：用于井下应用的超薄电容传感器
公开(公告)号：US20140060173A1
公开(公告)日：2014-03-06
申请号：US13597827
申请日：2012-08-29
申请人： Goutham R. Kirikera , William M. Patton
发明人： Goutham R. Kirikera , William M. Patton
IPC分类号： E21B47/06
CPC分类号： E21B47/06 , E21B21/08 , G01L9/0044 , G01L9/0072
摘要： A capacitive pressure sensor includes a stator which encircles a portion of a cylindrical diaphragm. This encircling forms a circumferential gap between the sidewalls of the stator and the diaphragm. Therefore, a greater area “A” can be achieved in smaller diameter sensor footprint than prior art designs and yet still detect relatively small changes in capacitance. Additionally, the width “g1” of the gap can be wider than prior art designs without negatively affecting capacitance detection. A bonding agent which has a melting temperature of about half that of bonding agents used in prior art designs, secures the stator to the diaphragm and reduces oxidation issues during assembly, thereby decreasing manufacturing time and cost. To ensure proper side-to-side alignment of the stator relative to the diaphragm, a centering sleeve, which is removed after bonding, is placed over as stub at the upper end of the diaphragm.
摘要翻译：电容式压力传感器包括环绕圆柱形隔膜的一部分的定子。这种环绕在定子的侧壁和隔膜之间形成圆周间隙。因此，与现有技术的设计相比，在较小直径的传感器覆盖区域可以实现更大的面积“A”，并且仍然检测相对小的电容变化。此外，间隙的宽度“g1”可以比现有技术的设计宽，而不会不利地影响电容检测。熔融温度约为现有技术设计中使用的粘合剂的一半的粘合剂，将定子固定在膜片上，减少组装过程中的氧化问题，从而减少制造时间和成本。为了确保定子相对于隔膜的正确的侧向对准，在接合之后被移除的定心套被放置在隔膜的上端作为短截线。

137. 发明授权

US08656784B2 Flat covered leadless pressure sensor assemblies suitable for operation in extreme environments 有权
标题翻译：平面无铅压力传感器组件适用于极端环境中的操作
公开(公告)号：US08656784B2
公开(公告)日：2014-02-25
申请号：US13213448
申请日：2011-08-19
申请人： Alexander Ned , Leo Geras , Joseph Van de Weert
发明人： Alexander Ned , Leo Geras , Joseph Van de Weert
IPC分类号： G01L7/08 , H01L29/84
CPC分类号： G01L19/0681 , G01L9/0044 , G01L9/0047 , G01L9/0048 , G01L9/0054 , G01L19/0076 , G01L19/0627 , Y10T29/49826
摘要： An enclosed, flat covered leadless pressure sensor assembly suitable for extreme environment operation including dynamic, ultra-high temperature heating, light and heat flash, and high-speed, flow-related environments. The pressure sensor assembly comprises a substrate comprising a micromachined sensing diaphragm defined on a first side. A cover is attached to the first side of the substrate such that it covers at least the sensing diaphragm. The top surface of the cover is substantially flat, thereby promoting uniformity in the distribution of stress and thermal effects across a top surface of the cover.
摘要翻译：封闭式平面封装的无铅压力传感器组件，适用于极端环境操作，包括动态，超高温加热，光和闪光，以及高速，流量相关的环境。压力传感器组件包括基板，该基板包括限定在第一侧上的微加工感测膜。覆盖物附接到基板的第一侧，使得其至少覆盖感测膜片。盖的顶表面基本上是平坦的，从而促进横跨顶盖表面的应力分布和热效应的均匀性。

138. 发明申请

US20130263670A1 Pressure Sensor and Method for its Manufacture 有权
标题翻译：压力传感器及其制造方法
公开(公告)号：US20130263670A1
公开(公告)日：2013-10-10
申请号：US13993111
申请日：2011-11-23
申请人： Peter Selders , Andreas Rossberg , Elke Schmidt , Andrea Berlinger
发明人： Peter Selders , Andreas Rossberg , Elke Schmidt , Andrea Berlinger
IPC分类号： G01L7/00 , B23K31/02
CPC分类号： G01L7/00 , B23K31/02 , G01L9/0044 , G01L9/0075
摘要： A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.
摘要翻译：一种制造压力传感器的方法，包括：提供陶瓷平台，陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。第一表面是平台表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，该表面将通过活性硬的焊接或钎焊。第二表面是测量膜表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，所述中间环将与测量膜连接，借助于活性硬焊料或钎焊。中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热，其中中间环在焊接或钎焊过程中保持基本上固体。

139. 发明申请

US20130234263A1 MEMS ELEMENT 有权
标题翻译： MEMS元件
公开(公告)号：US20130234263A1
公开(公告)日：2013-09-12
申请号：US13603967
申请日：2012-09-05
申请人： Tamio IKEHASHI
发明人： Tamio IKEHASHI
IPC分类号： B81B3/00
CPC分类号： B81B3/0018 , B81B3/0051 , B81B2201/0264 , G01L9/0044 , G01L9/0072
摘要： According to one embodiment, a MEMS element comprises a first electrode that is fixed on a substrate and has plate shape, a second electrode that is disposed above the first electrode while facing the first electrode, the second electrode being movable in a vertical direction and having plate shape, and a first film that includes a first cavity in which the second electrode is accommodated on the substrate. The second electrode is connected to an anchor portion connected to the substrate via a spring portion. An upper surface of the second electrode is connected to the first film.
摘要翻译：根据一个实施例，MEMS元件包括固定在基板上并具有板形状的第一电极，第二电极，其设置在第一电极的上方，同时面向第一电极，第二电极可在垂直方向上移动并具有板状，以及包括第一空腔的第一膜，其中第二电极容纳在基板上。第二电极经由弹簧部连接到与基板连接的锚定部。第二电极的上表面与第一膜连接。

140. 发明申请

US20130042694A1 FLAT COVERED LEADLESS PRESSURE SENSOR ASSEMBLIES SUITABLE FOR OPERATION IN EXTREME ENVIRONMENTS 有权
标题翻译：平面覆盖无铅压力传感器组件，适用于极端环境中操作
公开(公告)号：US20130042694A1
公开(公告)日：2013-02-21
申请号：US13213448
申请日：2011-08-19
申请人： ALEXANDER NED , Leo Geras , Joseph VanDeWeert
发明人： ALEXANDER NED , Leo Geras , Joseph VanDeWeert
IPC分类号： G01L9/06 , B23P11/00
CPC分类号： G01L19/0681 , G01L9/0044 , G01L9/0047 , G01L9/0048 , G01L9/0054 , G01L19/0076 , G01L19/0627 , Y10T29/49826
摘要： An enclosed, flat covered leadless pressure sensor assembly suitable for extreme environment operation including dynamic, ultra-high temperature heating, light and heat flash, and high-speed, flow-related environments. The pressure sensor assembly comprises a substrate comprising a micromachined sensing diaphragm defined on a first side. A cover is attached to the first side of the substrate such that it covers at least the sensing diaphragm. The top surface of the cover is substantially flat, thereby promoting uniformity in the distribution of stress and thermal effects across a top surface of the cover.
摘要翻译：封闭式平面封装的无铅压力传感器组件，适用于极端环境操作，包括动态，超高温加热，光和闪光，以及高速，流量相关的环境。压力传感器组件包括基板，该基板包括限定在第一侧上的微加工感测膜。覆盖物附接到基板的第一侧，使得其至少覆盖感测膜片。盖的顶表面基本上是平坦的，从而促进横跨顶盖表面的应力分布和热效应的均匀性。

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