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1. 发明授权

US09625335B2 Ceramic pressure measuring cell 有权
公开(公告)号：US09625335B2
公开(公告)日：2017-04-18
申请号：US14000450
申请日：2012-02-10
申请人： Andrea Berlinger , Ulfert Drewes , Michael Philipps , Andreas Rossberg , Elke Schmidt
发明人： Andrea Berlinger , Ulfert Drewes , Michael Philipps , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L9/00
CPC分类号： G01L9/00 , G01L9/0075
摘要： A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.

2. 发明授权

US09459169B2 Pressure sensor and method for its manufacture 有权
标题翻译：压力传感器及其制造方法
公开(公告)号：US09459169B2
公开(公告)日：2016-10-04
申请号：US13993111
申请日：2011-11-23
申请人： Peter Selders , Andreas Rossberg , Elke Schmidt , Andrea Berlinger
发明人： Peter Selders , Andreas Rossberg , Elke Schmidt , Andrea Berlinger
IPC分类号： G06K5/04 , G06K7/10 , G06K9/00 , G01L7/00 , G01L9/00 , B23K31/02
CPC分类号： G01L7/00 , B23K31/02 , G01L9/0044 , G01L9/0075
摘要： A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.
摘要翻译：一种制造压力传感器的方法，包括：提供陶瓷平台，陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。第一表面是平台表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，该表面将通过活性硬的焊接或钎焊。第二表面是测量膜表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，所述中间环将与测量膜连接，借助于活性硬焊料或钎焊。中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热，其中中间环在焊接或钎焊过程中保持基本上固体。

3. 发明申请

US20130327151A1 Ceramic Pressure Measuring Cell 有权
标题翻译：陶瓷压力测量池
公开(公告)号：US20130327151A1
公开(公告)日：2013-12-12
申请号：US14000450
申请日：2012-02-10
申请人： Andrea Berlinger , Ulfert Drewes , Michael Philipps , Andreas Rossberg , Elke Schmidt
发明人： Andrea Berlinger , Ulfert Drewes , Michael Philipps , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L9/00
CPC分类号： G01L9/00 , G01L9/0075
摘要： A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.
摘要翻译：压力测量单元包括至少一个陶瓷测量膜体; 和至少一个陶瓷平台，其中所述测量膜主体沿着环形的周边接头与所述平台连接。接头形成为测量膜体和平台之间的焊接连接，其中测量膜体具有压力可变形的测量膜。压力传感器包括压力测量单元和壳体，其中所述压力测量单元由所述壳体保持，并且其中所述压力测量单元关闭壳体开口，所述压力测量单元通过所述壳体开口与所述壳体的环境连通。密封件夹在围绕壳体开口的密封表面和压力测量单元的密封表面之间。

4. 发明申请

US20100199778A1 CAPACITIVE PRESSURE SENSOR 有权
标题翻译：电容式压力传感器
公开(公告)号：US20100199778A1
公开(公告)日：2010-08-12
申请号：US12451209
申请日：2008-06-04
申请人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Frank Hegner , Andreas Rossberg , Ulfert Drewes , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
IPC分类号： G01L9/12 , H01R43/00
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译：压力传感器包括平台1和弹性测量膜2，其与平台1的表面接合以形成密封在边缘处的测量室3，其中平台1和/或测量膜2包括陶瓷，玻璃或单晶材料，测量膜至少具有面向平台2的表面的第一电极6，平台1的表面至少具有与测量膜2的表面相对的第二电极5，其中所述第一电极和所述第二电极之间的电容是待测压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

5. 发明授权

US06374680B1 Capacitive pressure sensor or capacitive differential pressure sensor 失效
标题翻译：电容式压力传感器或电容差压传感器
公开(公告)号：US06374680B1
公开(公告)日：2002-04-23
申请号：US09511723
申请日：2000-02-21
申请人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
发明人： Ulfert Drewes , Andreas Rossberg , Elke Schmidt , Frank Hegner , Thomas Velten
IPC分类号： G01L912
CPC分类号： G01L9/0075
摘要： The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.
摘要翻译：这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成：压力传感器（10）具有基板（1）和第一主表面（11），第二主表面（12））和圆周表面（13）。导电材料的板状电极（14）以高耐压和高真空密封的方式固定在主表面（11）的凹部（15）中，由连接材料（16），从电极（14）穿过基板（1）到主表面（12）或圆周表面（13）提供贯通连接件（17），陶瓷的隔膜（2）玻璃或单晶材料通过接合材料（26）沿着接头（18）附接到凹部（15）外部的基板（1）上，并且在其上面形成另外的电极或被覆盖在面向电极（14），具有通过接头（18）接触的另一个电极（24）。基板和隔膜 t的陶瓷，玻璃或单晶材料。各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。

6. 发明授权

US08959048B1 Index for set emptiness in temporal databases 有权
标题翻译：时空数据库中的空虚指数
公开(公告)号：US08959048B1
公开(公告)日：2015-02-17
申请号：US13279027
申请日：2011-10-21
申请人： Andreas Rossberg , Ingo Walther
发明人： Andreas Rossberg , Ingo Walther
IPC分类号： G06F17/30
CPC分类号： G06F17/30371
摘要： A temporal database system, method, and computer-readable storage medium in which a database is provided with sets of entities defined by initial tuples having a set ID, a unique timestamp, and a member increment. A write transaction is performed for sets of entities, wherein the write transaction designates the set by said set ID and produces an increment, wherein the increment is a number of entities to be added to or removed from the designated respective set of entities. New tuples including the set ID, the increment, and a new unique timestamp are created for the write transaction. Following the write transaction, an asynchronous compaction operation is performed on the new tuples. The compaction operation aggregates the increment of each new tuple into summary point counts. The compaction operation facilitates efficient queries without contention with write transactions.
摘要翻译：一种时间数据库系统，方法和计算机可读存储介质，其中向数据库提供由具有集ID，唯一时间戳和成员增量的初始元组定义的实体集合。对于一组实体执行写入事务，其中写入事务通过所述集合ID指定集合并产生增量，其中增量是要被添加到或从指定的相应实体集合中移除的实体的数量。为写事务创建包括集ID，增量和新唯一时间戳的新元组。在写事务之后，对新的元组执行异步压缩操作。压缩操作将每个新元组的增量聚合为汇总点数。压缩操作有助于高效的查询，而无需与交易进行争用。

7. 发明申请

US20130263670A1 Pressure Sensor and Method for its Manufacture 有权
标题翻译：压力传感器及其制造方法
公开(公告)号：US20130263670A1
公开(公告)日：2013-10-10
申请号：US13993111
申请日：2011-11-23
申请人： Peter Selders , Andreas Rossberg , Elke Schmidt , Andrea Berlinger
发明人： Peter Selders , Andreas Rossberg , Elke Schmidt , Andrea Berlinger
IPC分类号： G01L7/00 , B23K31/02
CPC分类号： G01L7/00 , B23K31/02 , G01L9/0044 , G01L9/0075
摘要： A method for manufacturing a pressure sensor, comprising: providing a ceramic platform, a ceramic measuring membrane, and an intermediate ring; providing an active braze material by means of gas phase deposition at least on a first surface section of a first surface and on a second surface section of a second surface. The first surface is a platform surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the platform by means of the active hard solder, or braze. The second surface is a measuring membrane surface, which is to be connected with the intermediate ring by means of the active hard solder, or braze, or a surface of the intermediate ring, which is to be connected with the measuring membrane by means of the active hard solder, or braze. The intermediate ring is positioned between the measuring membrane and the platform; the active hard solder, or braze, is heated in a soldering, or brazing, process, wherein the intermediate ring remains essentially solid during the soldering, or brazing, process.
摘要翻译：一种制造压力传感器的方法，包括：提供陶瓷平台，陶瓷测量膜和中间环; 通过气相沉积至少在第一表面的第一表面部分和第二表面的第二表面部分上提供活性钎焊材料。第一表面是平台表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，该表面将通过活性硬的焊接或钎焊。第二表面是测量膜表面，其将通过活性硬焊料或钎焊或中间环的表面与中间环连接，所述中间环将与测量膜连接，借助于活性硬焊料或钎焊。中间环位于测量膜和平台之间; 活性硬焊料或钎焊在焊接或钎焊工艺中被加热，其中中间环在焊接或钎焊过程中保持基本上固体。

8. 发明授权

US08104353B2 Capacitive pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：US08104353B2
公开(公告)日：2012-01-31
申请号：US12451209
申请日：2008-06-04
申请人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
发明人： Ulfert Drewes , Frank Hegner , Andreas Rossberg , Elke Schmidt , Sabine Stolle , Christel Kretschmar , Melanie Hentsche
IPC分类号： G01L9/12 , H01R43/00
CPC分类号： G01L9/0075 , G01L13/025 , Y10T29/49117
摘要： A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.
摘要翻译：压力传感器包括平台和弹性测量膜，其与平台的表面结合以形成密封在边缘处的测量室，其中平台和/或测量膜包括陶瓷，玻璃或单晶材料测量膜至少具有面向平台表面的第一电极，平台的表面具有至少第二电极，其面向测量膜的表面。第一电极和第二电极之间的电容是测量压力的量度; 其中另外所述第一和第二电极中的至少一个包括含有金属和玻璃的导电层，并且其中所述金属包括至少两种贵金属元素。

9. 发明申请

US20110041618A1 ELASTIC CERAMIC BODY AND PRESSURE SENSOR WITH AN ELASTIC CERAMIC BODY 有权
标题翻译：具有弹性陶瓷体的弹性陶瓷体和压力传感器
公开(公告)号：US20110041618A1
公开(公告)日：2011-02-24
申请号：US12312722
申请日：2007-11-27
申请人： Frank Hegner , Andreas Rossberg
发明人： Frank Hegner , Andreas Rossberg
IPC分类号： G01L13/02 , B32B18/00 , B32B5/00 , B32B7/02
CPC分类号： C04B41/5031 , C04B35/111 , C04B37/005 , C04B37/006 , C04B41/009 , C04B41/87 , C04B2111/503 , C04B2235/785 , C04B2237/10 , C04B2237/12 , C04B2237/343 , C04B2237/348 , C04B2237/592 , C04B2237/708 , G01L9/0075 , G01L19/0627 , Y10T428/2495 , Y10T428/26 , Y10T428/265 , C04B41/4525 , C04B35/10 , C04B35/48
摘要： An elastic ceramic body and a pressure sensor. The elastic ceramic body comprises: a base body of an elastic ceramic material; and a cover layer, which covers at least one section of a surface of the base body, wherein the cover layer is of a material other than that of the base body, and the cover layer comprises microcrystalline A12O3 (corundum). The cover layer is preferably prepared in a sol gel process. The pressure sensor, comprises: a disk-shaped measuring membrane, which is embodied as an elastic ceramic body according to the above definition; and at least one membrane support body, on which the measuring membrane is connected at its edge region along an encircling joint to form a pressure-tight measuring chamber between the membrane support body and the measuring membrane.
摘要翻译：一个弹性陶瓷体和一个压力传感器。弹性陶瓷体包括：弹性陶瓷材料的基体; 以及覆盖层，其覆盖基体的表面的至少一个部分，其中覆盖层是不同于基体的覆盖层，并且覆盖层包含微晶A12O3（刚玉）。覆盖层优选以溶胶凝胶法制备。压力传感器包括：盘状测量膜，其被实施为根据上述定义的弹性陶瓷体; 以及至少一个膜支撑体，测量膜在其边缘区域沿着环绕接头连接在其上，以在膜支撑体和测量膜之间形成压力测量室。

10. 发明授权

US06941814B2 Hydrophobically coated pressure sensor 有权
标题翻译：疏水涂层压力传感器
公开(公告)号：US06941814B2
公开(公告)日：2005-09-13
申请号：US10498515
申请日：2002-12-18
申请人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
发明人： Frank Hegner , Ulfert Drewes , Andreas Rossberg , Elke Schmidt
IPC分类号： G01L19/06 , G01L7/00 , G01L9/00 , G01L9/12
CPC分类号： G01L9/0075
摘要： A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.
摘要翻译：用于测量压力的压力传感器包括压力室; 以及变形体，其可以在压力下暴露于介质，并且另外至少部分地限定压力室并且与介质如此压力地密封; 其中传感器室的壁具有通过气相和/或气相沉积施加的疏水涂层。疏水涂层优选包括硅烷。特别优选的是具有一个或多个疏水基团R和一个或多个锚定基团X的硅烷。特别优选的是：R-Si-X 3，R 1 R 1， 2 -Si-X 2，R 1 R 2 R 3 -Si-X。疏水性基团R优选为烷基，全氟烷基，苯基或全氟苯基。锚定基团X优选为-OH（硅烷醇），-X（卤化物，例如-Cl），-OR（酯，例如-OCH 3），-NH 2（胺）或-SH（巯基甲硅烷）。另外，脂族或环状硅氮烷-Si-NH-Si-，例如六甲基二硅氮烷。同样合适的是类型R a-Me-X z z的化合物，其中Me = Zr，Ti。

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