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    • 105. 发明授权
    • Semiconductor integrated circuit device
    • 半导体集成电路器件
    • US07781846B2
    • 2010-08-24
    • US12348524
    • 2009-01-05
    • Kenichi OsadaMasataka MinamiShuji IkedaKoichiro Ishibashi
    • Kenichi OsadaMasataka MinamiShuji IkedaKoichiro Ishibashi
    • H01L29/76H01L27/11
    • H01L27/1104G11C11/412G11C11/417H01L27/11H01L29/4916H01L29/783Y10S257/904
    • Prior known static random access memory (SRAM) cells are required that a diffusion layer be bent into a key-like shape in order to make electrical contact with a substrate with a P-type well region formed therein, which would result in a decrease in asymmetry leading to occurrence of a problem as to the difficulty in micro-patterning. To avoid this problem, the P-type well region in which an inverter making up an SRAM cell is formed is subdivided into two portions, which are disposed on the opposite sides of an N-type well region NW1 and are formed so that a diffusion layer forming a transistor has no curvature while causing the layout direction to run in a direction parallel to well boundary lines and bit lines. At intermediate locations of an array, regions for use in supplying power to the substrate are formed in parallel to word lines in such a manner that one regions is provided per group of thirty two memory cell rows or sixty four cell rows.
    • 现有的已知的静态随机存取存储器(SRAM)单元需要将扩散层弯曲成键状形状,以便与其中形成有P型阱区的衬底进行电接触,这将导致 不对称性导致了微图案化困难的问题的发生。 为了避免这个问题,构成SRAM单元的逆变器的P型阱区被细分成两部分,它们设置在N型阱区NW1的相对侧上,并形成为扩散 形成晶体管的层没有曲率,同时使得布局方向在平行于阱边界线和位线的方向上运行。 在阵列的中间位置处,以与字线平行的方式形成用于向基板供电的区域,以每组三十二个存储单元行或六十四个单元行提供一个区域。
    • 106. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07608899B2
    • 2009-10-27
    • US11936443
    • 2007-11-07
    • Tomio IwasakiHiroshi MoriyaHideo MiuraShuji Ikeda
    • Tomio IwasakiHiroshi MoriyaHideo MiuraShuji Ikeda
    • H01L29/76H01L29/94
    • H01L21/823462H01L21/28097H01L21/28185H01L21/28194H01L21/28518H01L21/31604H01L21/823412H01L27/1085H01L27/10873H01L29/045H01L29/4908H01L29/4975H01L29/513H01L29/516H01L29/517H01L29/78696
    • Diffusion layers 2-5 are formed on a silicon substrate 1, and gate dielectric films 6, 7 and gate lectrodes 8, 9 are formed on these diffusion layers 2-5 so as to be MOS transistors. Zirconium oxide or hafnium oxide is used as a major component of gate dielectric films 6, 7. Gate dielectric films 6, 7 are formed, for example, by CVD. As substrate 1, there is used one of which the surface is (111) crystal face so as to prevent diffusion of oxygen into silicon substrate 1 or gate electrodes 8, 9. In case of using a substrate of which the surface is (111) crystal face, diffusion coefficient of oxygen is less than 1/100 of the case in which a silicon substrate of which the surface is (001) crystal face is used, and oxygen diffusion is controlled. Thus, oxygen diffusion is controlled, generation of leakage current is prevented and properties are improved. There is realized a semiconductor device having high reliability and capable of preventing deterioration of characteristics concomitant to miniaturization.
    • 在硅衬底1上形成扩散层2-5,并且在这些扩散层2-5上形成栅极电介质膜6,7和栅极放电层8,9作为MOS晶体管。 氧化锆或氧化铪被用作栅极电介质膜6,7的主要成分。例如通过CVD形成栅极绝缘膜6,7。 作为基板1,使用表面为(111)晶面的其中之一,以防止氧扩散到硅基板1或栅电极8,9中。在使用其表面为(111)的基板的情况下, 在使用表面为(001)晶面的硅衬底的情况下,氧的扩散系数小于氧的扩散系数的1/100,并且控制氧扩散。 因此,控制氧扩散,防止漏电流的产生,提高性能。 实现了具有高可靠性并且能够防止伴随小型化的特性劣化的半导体器件。