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    • 9. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20130307057A1
    • 2013-11-21
    • US13891584
    • 2013-05-10
    • UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
    • Fujio MASUOKAHiroki NAKAMURA
    • H01L29/78
    • H01L29/7827H01L21/823885H01L27/092H01L29/0692H01L29/66666H01L29/7802H01L29/783
    • A semiconductor device includes a first pillar-shaped silicon layer formed on a planar silicon layer, a gate insulating film formed around the first pillar-shaped silicon layer, a first gate electrode formed around the gate insulating film, a gate line connected to the first gate electrode, a first first-conductivity-type diffusion layer formed in an upper portion of the first pillar-shaped silicon layer, a second first-conductivity-type diffusion layer formed in a lower portion of the first pillar-shaped silicon layer and an upper portion of the planar silicon layer, a first sidewall having a laminated structure of an insulating film and polysilicon and being formed on an upper sidewall of the first pillar-shaped silicon layer and an upper portion of the first gate electrode, and a first contact formed on the first first-conductivity-type diffusion layer and the first sidewall.
    • 半导体器件包括形成在平坦硅层上的第一柱状硅层,围绕第一柱状硅层形成的栅极绝缘膜,形成在栅极绝缘膜周围的第一栅电极,与第一柱状硅层连接的栅极线 栅电极,形成在第一柱状硅层的上部的第一第一导电型扩散层,形成在第一柱状硅层的下部的第二第一导电型扩散层和 平面硅层的上部,具有绝缘膜和多晶硅层叠结构并形成在第一柱状硅层的上侧壁和第一栅电极的上部的第一侧壁,以及第一接触部 形成在第一第一导电型扩散层和第一侧壁上。