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    • 1. 发明授权
    • Ceramic heating jig
    • 陶瓷加热夹具
    • US06384383B2
    • 2002-05-07
    • US09728082
    • 2000-12-04
    • Shoji KanoKenji ItoAkira Sato
    • Shoji KanoKenji ItoAkira Sato
    • H05B368
    • H01L21/67103
    • There is disclosed a ceramic heating jig consisting of a susceptor 2 on which a work to be heated is placed, a ceramic heater 3 for heating the susceptor and at least one heat shielding plate 4 for shielding heat of the ceramic heater wherein the susceptor and the heat shielding plate are located so that each of them is located across the ceramic heater each leaving a certain space therefrom, a thickness of the susceptor is 0.5 m to 5 mm, a thickness of the ceramic heater is 0.5 mm to 3 mm, a thickness of the heat shielding plate is 0.5 mm to 3 mm. Preferably, an interval between the members is 0.5 mm to 10 mm, and the members are elastically held as an integration by the elastic means 6 and the restraint means 7. There can be provided a ceramic heating jig wherein defects such as thermal deformation, breakage or the like of the susceptor or the like are hardly caused, temperature can be raised or lowered rapidly, and flatness of a susceptor can be kept even at high temperature.
    • 公开了一种陶瓷加热夹具,其由待加热的工件的基座2,用于加热基座的陶瓷加热器3和用于屏蔽陶瓷加热器的热量的至少一个热屏蔽板4组成,其中基座和 隔热板的位置使得它们各自位于陶瓷加热器两侧,留下一定的空间,基座的厚度为0.5μm至5mm,陶瓷加热器的厚度为0.5mm至3mm,厚度为 的隔热板为0.5mm〜3mm。 优选地,构件之间的间隔为0.5mm至10mm,并且通过弹性装置6和约束装置7将构件弹性保持为一体。可以提供陶瓷加热夹具,其中诸如热变形,断裂的缺陷 感受器等不易引起温度的升高或降低,即使在高温下也能保持基座的平坦度。
    • 3. 发明授权
    • Multiple-layered ceramic heater
    • 多层陶瓷加热器
    • US06242719B1
    • 2001-06-05
    • US09328158
    • 1999-06-08
    • Shoji KanoRyouji IwaiKenji Ito
    • Shoji KanoRyouji IwaiKenji Ito
    • H05B368
    • H01L21/67103
    • There is disclosed an integrated type multiple-layered ceramic heater based on resistance heating comprising an electrical insulating ceramic support substrate, a heater pattern composed of electroconductive ceramic or metal, which is adhered to a surface of the substrate, and an electrical insulating ceramic protective layer covering the heater pattern, wherein a feeding terminal of the heater is connected to a power source terminal member through a feeding member which generates heat when supplied with electric current. The feeding member preferably generates heat at a power density substantially equal to that of the heater. The multiple-layered ceramic heater of the present invention exhibits excellent thermal uniformity, and does not adversely affect thermal uniformity of an object to be heated even when the feeding terminal is present at a location facing the object to be heated.
    • 公开了一种基于电阻加热的集成型多层陶瓷加热器,其包括电绝缘陶瓷支撑基板,由导电陶瓷或金属组成的加热器图案,其粘附到基板的表面,以及电绝缘陶瓷保护层 覆盖加热器图案,其中加热器的馈电端子通过在被供应电流时产生热量的馈送部件连接到电源端子部件。 馈送构件优选地以基本上等于加热器的功率密度的功率密度产生热量。 本发明的多层陶瓷加热器具有优异的热均匀性,并且即使当馈电端子存在于面向待加热物体的位置时也不会不利地影响待加热物体的热均匀性。
    • 4. 发明申请
    • WAFER HEATING APPARATUS HAVING ELECTROSTATIC ATTRACTION FUNCTION
    • 具有静电吸引功能的加热装置
    • US20090242544A1
    • 2009-10-01
    • US12064338
    • 2006-10-10
    • Shoji Kano
    • Shoji Kano
    • H05B3/68
    • H01L21/6831H01L21/67103
    • In a wafer heating apparatus having an electrostatic attraction function, a conductive heat generating layer is formed on one plane of a supporting substrate, and a conductive electrode for electrostatic attraction is formed on the other plane, and furthermore, an insulating layer is formed to cover the heat generating layer and the electrode for electrostatic attraction. The wafer heating apparatus has the electrostatic attraction function characterized in that the insulating layer covering the electrode for electrostatic attraction has a lower surface resistivity (ρsE) in a portion on the side of an object to be attracted compared with a surface resistivity (ρsE) in a portion on the side of the electrostatic attraction electrode.
    • 在具有静电吸引功能的晶片加热装置中,在支撑基板的一个平面上形成导电发热层,在另一平面上形成静电吸引用导电电极,此外,形成绝缘层以覆盖 发热层和静电吸引用电极。 晶片加热装置具有静电吸引功能,其特征在于,覆盖静电吸引用电极的绝缘层的表面电阻率(rhosE)与表面电阻率(rhosE)相比具有较低的待吸附物体侧部分的表面电阻率(rhosE) 静电吸引电极一侧的一部分。
    • 6. 发明申请
    • Heating element
    • 加热元件
    • US20070241095A1
    • 2007-10-18
    • US11783580
    • 2007-04-10
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • F27D11/00
    • H01L21/67103H01L21/67098H05B3/143H05B2203/003
    • There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p,或者由在保护层上形成的含有掺杂剂的化合物构成 第4层。 可以提供一种加热元件,其中在保护层上形成氮气渗透性,电阻率或硬度的耐腐蚀层,即使在高温环境下也难以将腐蚀性气体透过 并且可以避免腐蚀性气体,并且可以避免由于导电层,特别是电源端子部分的腐蚀而导致的劣化,并且另外,即使当具有卡盘图案也能够实现作为静电卡盘的高功能,并且具有 使用寿命长,能够以低成本生产。
    • 8. 发明授权
    • Heating element
    • 加热元件
    • US08115141B2
    • 2012-02-14
    • US11783580
    • 2007-04-10
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • Noboru KimuraYoshihiro KubotaWaichi YamamuraShoji Kano
    • F27D11/00C23C16/00
    • H01L21/67103H01L21/67098H05B3/143H05B2203/003
    • There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.
    • 公开了一种加热元件10,其包括:至少一个耐热底座件1; 导电层3,其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p,或由保护层4上形成的含有掺杂剂的化合物构成。可以提供一种加热元件,其中腐蚀 氮气渗透性,电阻率或硬度被控制的耐热层形成在保护层上,即使在高温环境和腐蚀性气体环境下腐蚀性气体也难以透过,腐蚀性降低 导电层,特别是电源端子部分,可以避免和附加地,即使当具有卡盘图案并且具有长的使用寿命并且能够在 低成本。