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1. 发明授权

US06242719B1 Multiple-layered ceramic heater 失效
标题翻译：多层陶瓷加热器
公开(公告)号：US06242719B1
公开(公告)日：2001-06-05
申请号：US09328158
申请日：1999-06-08
申请人： Shoji Kano , Ryouji Iwai , Kenji Ito
发明人： Shoji Kano , Ryouji Iwai , Kenji Ito
IPC分类号： H05B368
CPC分类号： H01L21/67103
摘要： There is disclosed an integrated type multiple-layered ceramic heater based on resistance heating comprising an electrical insulating ceramic support substrate, a heater pattern composed of electroconductive ceramic or metal, which is adhered to a surface of the substrate, and an electrical insulating ceramic protective layer covering the heater pattern, wherein a feeding terminal of the heater is connected to a power source terminal member through a feeding member which generates heat when supplied with electric current. The feeding member preferably generates heat at a power density substantially equal to that of the heater. The multiple-layered ceramic heater of the present invention exhibits excellent thermal uniformity, and does not adversely affect thermal uniformity of an object to be heated even when the feeding terminal is present at a location facing the object to be heated.
摘要翻译：公开了一种基于电阻加热的集成型多层陶瓷加热器，其包括电绝缘陶瓷支撑基板，由导电陶瓷或金属组成的加热器图案，其粘附到基板的表面，以及电绝缘陶瓷保护层覆盖加热器图案，其中加热器的馈电端子通过在被供应电流时产生热量的馈送部件连接到电源端子部件。馈送构件优选地以基本上等于加热器的功率密度的功率密度产生热量。本发明的多层陶瓷加热器具有优异的热均匀性，并且即使当馈电端子存在于面向待加热物体的位置时也不会不利地影响待加热物体的热均匀性。

2. 发明授权

US06917021B2 Heating apparatus with electrostatic attraction function 有权
标题翻译：具有静电吸引功能的加热装置
公开(公告)号：US06917021B2
公开(公告)日：2005-07-12
申请号：US10465324
申请日：2003-06-19
申请人： Shoji Kano , Ryouji Iwai , Nobuo Arai
发明人： Shoji Kano , Ryouji Iwai , Nobuo Arai
IPC分类号： H05B3/20 , C04B35/52 , H01L21/00 , H01L21/02 , H01L21/683 , H05B3/10 , H05B3/14 , H05B3/74
CPC分类号： H05B3/143 , H01L21/67103 , H01L21/6831
摘要： There is disclosed a heating apparatus with electrostatic attraction function 1, comprising at least a supporting base 2, an electrode for electrostatic attraction 4 and a heating layer 5 that are formed on the supporting base, and an insulating layer 6 that is formed on the electrode for electrostatic attraction and the heating layer, wherein the electrode for electrostatic attraction and/or the heating layer are/is composed of pyrolytic graphite containing boron and/or boron carbide of 0.001-30% by weight in terms of boron concentration, and the insulating layer has an electric resistivity of 106-1015 Ωcm. There is provided a heating apparatus with electrostatic attraction function, which has a high thermal shock resistance, no problem of delamination, a proper resistance value, and a sufficient electrostatic attraction force even in a medium and high temperature range of 500-800° C., which causes no breakage of devices due to leakage current, and which can be used stably during rapid rise and rapid drop in temperature.
摘要翻译：公开了一种具有静电吸引功能的加热装置1，至少包括支撑基座2，静电吸引用电极4和形成在支撑基座上的加热层5以及形成在电极上的绝缘层6 静电吸引用电极和/或加热层用硼浓度为0.001-30重量％的含有硼和/或碳化硼的热解石墨构成，绝缘体层的电阻率为10 -6〜15Ω。提供具有静电吸引功能的加热装置，即使在500-800℃的中等和高温范围内，其具有高抗热震性，没有分层问题，适当的电阻值和足够的静电吸引力。，不会由于泄漏电流而导致器件损坏，并且可以在快速上升和温度快速下降时稳定使用。

3. 发明授权

US5607775A Article for use under high vacuum at high temperature 失效
标题翻译：用于高真空高温条件下使用
公开(公告)号：US5607775A
公开(公告)日：1997-03-04
申请号：US558799
申请日：1995-11-15
申请人： Noboru Kimura , Ryouji Iwai , Kazuhito Hirata
发明人： Noboru Kimura , Ryouji Iwai , Kazuhito Hirata
IPC分类号： B01J3/00 , C04B35/583 , C23C14/00 , C23C14/20 , C23C14/24 , C30B23/08 , G04B35/58
CPC分类号： C04B35/583 , Y10T428/265 , Y10T428/31678 , Y10T428/31692
摘要： Proposed is an article of pyrolytic boron nitride such as crucibles for use at a high temperature under an extremely high vacuum as in the molecular beam epitaxy. The article can be used in the high temperature, high vacuum process without the conventional elaborate and time-consuming degassing bake-out treatment because the article is wrapped in a wrapping film having a specified low moisture permeability immediately after a preliminary degassing treatment under specified conditions before the article is wrapped under a low-moisture atmosphere in a glove box.
摘要翻译：提出了热分解氮化硼的制品，例如在分子束外延下在极高真空下在高温下使用的坩埚。该制品可用于高温高真空工艺中，而不需要常规的精细和耗时的脱气烘烤处理，因为在特定条件下的初步脱气处理之后，将物品立即包裹在具有特定的低透湿性的包装膜中之前将物品在手套箱中的低湿度气氛下包裹。

4. 发明授权

US5702764A Method for the preparation of pyrolytic boron nitride-clad double-coated article 失效
标题翻译：制备热解氮化硼复合双层涂层制品的方法
公开(公告)号：US5702764A
公开(公告)日：1997-12-30
申请号：US701563
申请日：1996-08-22
申请人： Noboru Kimura , Ryouji Iwai
发明人： Noboru Kimura , Ryouji Iwai
IPC分类号： C04B41/89 , C04B35/583 , C04B41/91 , C23C14/06 , C23C16/26 , C23C16/34 , H05B3/14 , C23C16/00
CPC分类号： C23C16/26 , C23C16/342 , H05B3/14
摘要： An improvement is proposed in the method for the preparation of a ceramic heater consisting of a substrate of boron nitride, patterned graphite layer thereon as an electric resistance heater element and an overall cladding layer of pyrolytic boron nitride formed on allover the surface after pattern-wise engraving of the graphite layer and the substrate in order to enhance the stability of the cladding layer against crack formation or exfoliation. The improvement is achieved by limiting the depth of engraving not to exceed 200 .mu.m or chamfering and rounding of the edged and recessed ridge lines formed by engraving so that the cross sectional profile is in a smooth contour having a radius of curvature not smaller than 0.5 mm.
摘要翻译：在用于制备陶瓷加热器的方法中提出了一种改进，该陶瓷加热器由氮化硼的基板，作为电阻加热器元件的图案化石墨层和在图案形式之后形成在表面上的热解氮化硼的整体包层石墨层和基板的雕刻，以提高包覆层的抗裂纹形成或剥离的稳定性。通过限制不超过200μm的雕刻深度或通过雕刻形成的边缘和凹入的脊线的倒角和倒角来实现改进，使得横截面轮廓具有不小于0.5的曲率半径的平滑轮廓 mm。

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