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    • 7. 发明申请
    • Method of producing single crystal
    • 生产单晶的方法
    • US20100018454A1
    • 2010-01-28
    • US12458410
    • 2009-07-10
    • Ken HamadaHiroaki TaguchiKazuyuki Egashira
    • Ken HamadaHiroaki TaguchiKazuyuki Egashira
    • C30B15/14
    • C30B15/14C30B15/20C30B15/203C30B29/06C30B35/00
    • After melting raw materials, a distance between a raw material melt surface and a heat-shielding member disposed so as to face to the melt surface is adjusted based on temporal changes in chamber inside conditions, such as the heater temperature at the time of completion of the seed crystal equilibration operation carried out after completion of the raw material melting procedure and/or lag time required for completion of the seed crystal equilibration operation following completion of the raw material melting procedure. As a result, single crystals can be produced efficiently and in high yield, and further, by controlling the crystal interior temperature gradient by modifying the distance between the melt surface and the heat-shielding member, it becomes possible to control the ratio V/G (V:pulling speed, G:crystal interior temperature gradient) to thereby produce single crystals free of crystal defects such as COPs and/or dislocation clusters.
    • 在原料熔化之后,基于室内条件的时间变化(例如,完成时的加热器温度)来调节原料熔体表面和设置成面对熔体表面的隔热部件之间的距离 在完成原料熔化步骤后完成原料熔化步骤和/或完成晶种平衡操作所需的滞后时间之后进行晶种平衡操作。 结果,可以有效且高产率地制造单晶,另外,通过改变熔融面和隔热构件之间的距离来控制晶体内部温度梯度,可以控制比率V / G (V:拉伸速度,G:晶体内部温度梯度),从而产生没有诸如COP和/或位错簇的晶体缺陷的单晶。
    • 8. 发明申请
    • Method for pulling a single crystal
    • 拉单晶的方法
    • US20050022722A1
    • 2005-02-03
    • US10923864
    • 2004-08-24
    • Keiichi TakanashiTokuji MaedaKen Hamada
    • Keiichi TakanashiTokuji MaedaKen Hamada
    • C30B15/26C30B15/20C30B15/30C30B29/06H01L21/208C30B15/00C30B21/06C30B27/02C30B28/10C30B30/04
    • C30B15/20C30B15/30Y10T117/1032Y10T117/1068Y10T117/1072
    • An apparatus is used to pull a single crystal, wherein a flow of an inert gas to the single crystal to be grown, a pressure in an apparatus body, and a temperature environment are always kept constant by keeping a melt level at a prescribed position in spite of changes in volume of a quartz crucible between batches and thermal deformation of the quartz crucible, so that high quality single crystals can be pulled. The apparatus has a reference reflector arranged inside an apparatus body, a level position measuring unit to measure an actual level position by detecting a mirror image position of the reference reflector reflected in the melt surface using a one-dimensional CCD camera arranged outside the apparatus body, a crucible ascent speed adjustment value calculating unit to calculate an adjustment value of the crucible ascent speed based on an output from the level position measuring unit, an adjustment value adding unit to add the adjustment value to the crucible ascent speed, and a level position controlling unit to control the level position in the crucible by controlling a motor for crucible lifting based on an output from the adjustment value adding means to control the crucible ascent speed.
    • 使用一种装置来拉动单晶,其中通过将熔体水平保持在规定位置的熔融水平,使得待生长的单晶的惰性气体流,装置主体中的压力和温度环境总是保持恒定 尽管石英坩埚在批次之间的体积变化和石英坩埚的热变形,从而可以拉高品质的单晶。 该装置具有布置在装置本体内的参考反射器,水平位置测量单元,用于通过使用布置在装置主体外部的一维CCD照相机检测反射在熔体表面中的参考反射体的镜像位置来测量实际水平位置 坩埚上升速度调节值计算单元,用于根据来自水平位置测量单元的输出来计算坩埚上升速度的调节值;调节值添加单元,用于将调节值加到坩埚上升速度;以及水平位置 控制单元,通过基于来自调节值相加装置的输出控制坩埚上升的电动机来控制坩埚上升速度来控制坩埚中的液位位置。
    • 10. 发明授权
    • Apparatus of producing silicon single crystal and method of producing silicon single crystal
    • 硅单晶的制造装置及其制造方法
    • US09284660B2
    • 2016-03-15
    • US13314503
    • 2011-12-08
    • Keiichi TakanashiKen Hamada
    • Keiichi TakanashiKen Hamada
    • C30B29/06C30B15/26
    • C30B15/26C30B29/06Y10T117/1008
    • An apparatus of producing a silicon single crystal including: an imaging device; a heat shield that has a circular opening; a first operation unit that operates the imaging device and takes a real image of the heat shield and a mirror image of the heat shield reflected on a surface of the silicon melt, measures a spacing between the real image and the mirror image, and calculates a position of a melt-surface; a second operating unit that operates the imaging device and takes an image of a bright-zone in the vicinity of the solid-liquid interface, and calculates a position of the melt-surface based on the image of the bright zone; and a controlling unit that refers a data of the position of the silicon melt obtained by the first operation unit and the second operation unit, and controls the position of the silicon melt.
    • 一种制造单晶硅的装置,包括:成像装置; 具有圆形开口的隔热罩; 第一操作单元,操作成像装置并获取热屏蔽的真实图像和在硅熔体的表面上反射的热屏蔽的镜像,测量实像和镜像之间的间隔,并计算出 熔体表面的位置; 第二操作单元,其操作所述成像装置并拍摄所述固液界面附近的亮区图像,并且基于所述亮区的图像来计算所述熔体表面的位置; 以及控制单元,其参考由第一操作单元和第二操作单元获得的硅熔体的位置的数据,并控制硅熔体的位置。