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    • 5. 发明申请
    • Method of producing single crystal
    • 生产单晶的方法
    • US20100018454A1
    • 2010-01-28
    • US12458410
    • 2009-07-10
    • Ken HamadaHiroaki TaguchiKazuyuki Egashira
    • Ken HamadaHiroaki TaguchiKazuyuki Egashira
    • C30B15/14
    • C30B15/14C30B15/20C30B15/203C30B29/06C30B35/00
    • After melting raw materials, a distance between a raw material melt surface and a heat-shielding member disposed so as to face to the melt surface is adjusted based on temporal changes in chamber inside conditions, such as the heater temperature at the time of completion of the seed crystal equilibration operation carried out after completion of the raw material melting procedure and/or lag time required for completion of the seed crystal equilibration operation following completion of the raw material melting procedure. As a result, single crystals can be produced efficiently and in high yield, and further, by controlling the crystal interior temperature gradient by modifying the distance between the melt surface and the heat-shielding member, it becomes possible to control the ratio V/G (V:pulling speed, G:crystal interior temperature gradient) to thereby produce single crystals free of crystal defects such as COPs and/or dislocation clusters.
    • 在原料熔化之后,基于室内条件的时间变化(例如,完成时的加热器温度)来调节原料熔体表面和设置成面对熔体表面的隔热部件之间的距离 在完成原料熔化步骤后完成原料熔化步骤和/或完成晶种平衡操作所需的滞后时间之后进行晶种平衡操作。 结果,可以有效且高产率地制造单晶,另外,通过改变熔融面和隔热构件之间的距离来控制晶体内部温度梯度,可以控制比率V / G (V:拉伸速度,G:晶体内部温度梯度),从而产生没有诸如COP和/或位错簇的晶体缺陷的单晶。