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    • 1. 发明授权
    • Resistive memory with small electrode and method for fabricating the same
    • 具有小电极的电阻记忆及其制造方法
    • US09142768B2
    • 2015-09-22
    • US13698799
    • 2012-05-02
    • Yimao CaiJun MaoRu HuangShenghu TanYinglong HuangYue Pan
    • Yimao CaiJun MaoRu HuangShenghu TanYinglong HuangYue Pan
    • H01L45/00
    • H01L45/1253H01L45/04H01L45/122H01L45/1233H01L45/1273H01L45/146H01L45/1608H01L45/1616H01L45/1625
    • Systems and methods are disclosed involving a resistive memory with a small electrode, relating to the field of semiconductor resistive memory in ULSI. An illustrative resistive memory may include an Al electrode layer, a SiO2 layer, a Si layer, a resistive material layer and a lower electrode layer in sequence, wherein the Al electrode layer and the resistive material layer are electrically connected through one or more conductive channel and the conductive channel is formed by penetrating Al material into the Si layer via defects in the SiO2 layer and dissolving Si material into the Al material. Methods may include forming a lower electrode layer, a resistive layer, a Si layer and a SiO2 layer over a substrate; fabricating a Al electrode layer over the SiO2 layer; and performing an anneal process to the resultant structure. Consistent with innovations herein, a small electrode may be obtained via a conventional process.
    • 公开了涉及具有与ULSI中的半导体电阻性存储器的领域相关的具有小电极的电阻性存储器的系统和方法。 示例性电阻存储器可以依次包括Al电极层,SiO 2层,Si层,电阻材料层和下电极层,其中Al电极层和电阻材料层通过一个或多个导电沟道电连接 并且通过SiO 2层中的缺陷将Al材料穿过Si层而将Si材料溶解到Al材料中而形成导电通道。 方法可以包括在衬底上形成下电极层,电阻层,Si层和SiO 2层; 在SiO 2层上制造Al电极层; 对所得到的结构进行退火处理。 与本文的创新一致,可以通过常规方法获得小电极。
    • 6. 发明授权
    • Tunneling current amplification transistor
    • 隧道电流放大晶体管
    • US08895980B2
    • 2014-11-25
    • US13255087
    • 2011-05-26
    • Ru HuangZhan ZhanQianqian HuangYangyuan Wang
    • Ru HuangZhan ZhanQianqian HuangYangyuan Wang
    • H01L29/73H01L29/739H01L29/00
    • H01L29/7391
    • The present invention discloses a tunneling current amplification transistor, which relates to an area of field effect transistor logic devices in CMOS ultra large scale semiconductor integrated circuits (ULSI). The tunneling current amplification transistor includes a semiconductor substrate, a gate dielectric layer, an emitter, a drain, a floating tunneling base and a control gate, wherein the drain, the floating tunneling base and the control gate forms a conventional TFET structure, and a doping type of the emitter is opposite to that of the floating tunneling base. A position of the emitter is at the other side of the floating tunneling base with respect to the drain. A type of the semiconductor between the emitter and the floating tunneling base is the same as that of the floating tunneling base. As compared with the conventional TFET, the tunneling current amplification transistor of the present invention can increase the on-current of the device effectively and increase the driving capability of the device.
    • 本发明公开了一种隧道电流放大晶体管,其涉及CMOS超大规模半导体集成电路(ULSI)中的场效应晶体管逻辑器件的面积。 隧道电流放大晶体管包括半导体衬底,栅极电介质层,发射极,漏极,浮动隧道基极和控制栅极,其中漏极,浮动隧道基极和控制栅极形成传统的TFET结构,以及 发射极的掺杂类型与浮动隧道基体的掺杂类型相反。 发射极的位置相对于漏极在浮动基底的另一侧。 发射极和浮动隧道基底之间的半导体类型与浮动隧道基底的相同。 与常规TFET相比,本发明的隧道电流放大晶体管可以有效地增加器件的导通电流,并提高器件的驱动能力。
    • 8. 发明授权
    • Strained channel field effect transistor and the method for fabricating the same
    • 应变通道场效应晶体管及其制造方法
    • US08673722B2
    • 2014-03-18
    • US13255443
    • 2011-03-23
    • Ru HuangQuanxin YunXia AnYujie AlXing Zhang
    • Ru HuangQuanxin YunXia AnYujie AlXing Zhang
    • H01L21/336
    • H01L29/0653H01L29/1083H01L29/66545H01L29/66636H01L29/7833H01L29/7834H01L29/7848H01L29/7849
    • The present invention discloses a strained channel field effect transistor and a method for fabricating the same. The field effect transistor comprises a substrate, a source/drain, a gate dielectric layer, and a gate, characterized in that, an “L” shaped composite isolation layer, which envelops a part of a side face of the source/drain adjacent to a channel and the bottom of the source/drain, is arranged between the source/drain and the substrate; the composite isolation layer is divided into two layers, that is, an “L” shaped insulation thin layer contacting directly with the substrate and an “L” shaped high stress layer contacting directly with the source and the drain. The field effect transistor of such a structure improves the mobility of charge carriers by introducing stress into the channel by means of the high stress layer, while fundamentally improving the device structure of the field effect transistor and improving the short channel effect suppressing ability of the device.
    • 本发明公开了一种应变通道场效应晶体管及其制造方法。 场效应晶体管包括衬底,源极/漏极,栅极电介质层和栅极,其特征在于,“L”形复合隔离层,其包围与源极/漏极相邻的侧面的一部分 沟道和源极/漏极的底部布置在源极/漏极和衬底之间; 复合隔离层分为两层,即与基板直接接触的“L”形绝缘薄层和与源极和漏极直接接触的“L”形高应力层。 这种结构的场效应晶体管通过高应力层向沟道中引入应力而提高了载流子的迁移率,同时从根本上改善了场效应晶体管的器件结构,提高了器件的短沟道效应抑制能力 。
    • 10. 发明授权
    • Resistive-switching memory and fabrication method thereof
    • 电阻式开关存储器及其制造方法
    • US08513639B2
    • 2013-08-20
    • US13254570
    • 2011-04-12
    • Yimao CaiRu HuangYangyuan WangYinglong Huang
    • Yimao CaiRu HuangYangyuan WangYinglong Huang
    • H01L47/00
    • H01L45/1233H01L27/2472H01L45/08H01L45/085H01L45/1273H01L45/145H01L45/146H01L45/147H01L45/16
    • The present invention discloses a resistive-switching memory and the fabrication method thereof. The resistive-switching memory comprises a substrate, a top electrode, a bottom electrode, and a resistive-switching material interposed between the top and bottom electrodes, wherein the central portion of the bottom electrode protrudes upwards to form a peak shape, and the top electrode is in a plate shape. The peak structure of the bottom electrode reduces power consumption of the device. The fabrication method thereof comprises forming peak structures on the surface of the substrate by means of corrosion, and then growing bottom electrodes thereon to form bottom electrodes having peak shapes, and depositing resistive-switching material and top electrodes. The entire fabrication process is simple, and high integration degree of the device can be achieved.
    • 本发明公开了一种电阻式开关存储器及其制造方法。 电阻开关存储器包括插入在顶部和底部电极之间的衬底,顶部电极,底部电极和电阻开关材料,其中底部电极的中心部分向上突出以形成峰形,顶部 电极为板状。 底部电极的峰值结构降低了器件的功耗。 其制造方法包括通过腐蚀在基板的表面上形成峰值结构,然后在其上生长底部电极,以形成具有峰形的底部电极,以及沉积电阻式切换材料和顶部电极。 整个制造工艺简单,可以实现高集成度的装置。