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    • 8. 发明公开
    • 개선된 균질성을 위해 측벽 스페이서를 갖는 메모리 셀
    • 具有改进的均匀性的边框间隔的存储单元
    • KR1020070103699A
    • 2007-10-24
    • KR1020070037937
    • 2007-04-18
    • 키몬다 아게
    • 하프,토마스필립,얀보리스
    • H01L27/115
    • H01L45/06H01L27/2436H01L45/1233H01L45/144H01L45/148H01L45/1675H01L21/28141
    • A memory cell having a lateral wall spacer for improved homogeneity is provided to improve homogeneous property of a layer of a phase change material from over etching in etching an electrode. A memory cell having a lateral wall spacer for improved homogeneity includes a first electrode, a second electrode(122), a layer(124) of a phase change material, and a lateral wall spacer(128). The layer(124) of the phase change extends from a first contact(130) of the first electrode to a second contact(132) of the second electrode(122). The lateral wall spacer(128) contacts the second electrode(122) and the lateral wall of the layer(124) of the phase change material adjacent to the second contact(132). The lateral wall spacer(128) is contacted to the first electrode and the lateral wall of the layer(124) of the phase change material adjacent to the first contact(130). The lateral wall spacer(128) is extended between the first contact(130) of the first electrode and the second contact(132) of the second electrode(122).
    • 提供具有用于改善均匀性的侧壁间隔物的存储单元,以在蚀刻电极时改善相变材料层的过度蚀刻的均匀性。 具有用于改善均匀性的侧壁间隔物的存储单元包括第一电极,第二电极(122),相变材料层(124)和侧壁间隔物(128)。 相变层(124)从第一电极的第一接触(130)延伸到第二电极(122)的第二接触(132)。 侧壁隔离物(128)接触第二电极(122)和与第二接触件(132)相邻的相变材料层(124)的侧壁。 侧壁隔离物(128)与邻近第一接触件(130)的相变材料层(124)的第一电极和侧壁接触。 侧壁隔离物(128)在第一电极的第一接触件(130)和第二电极(122)的第二接触件(132)之间延伸。