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1. 发明授权

KR101408164B1 웨이퍼 이송위치 측정 범위를 최소화하는 트랜스퍼 모듈 有权
标题翻译： TRASFER MODULE
公开(公告)号：KR101408164B1
公开(公告)日：2014-06-17
申请号：KR1020120153281
申请日：2012-12-26
申请人： 주식회사 싸이맥스
发明人： 박세운 , 황상욱
IPC分类号： H01L21/677 , H01L21/68
CPC分类号： H01L21/67196 , H01L21/67259 , H01L21/67739
摘要： The present invention relates to a transfer module and, more specifically, to a transfer module in which a position of a wafer is accurately measured and the center of the wafer is accurately located in the center of a mounting portion of a process module by minimizing a measuring range of position coordinates of the wafer, which passes through an opening formed on a coupling surface of the transfer module, to be limited within a space between the top surface and the bottom surface of the opening. Thereby, accurate processing of the wafer in the process module can be conducted.
摘要翻译：本发明涉及一种转印模块，更具体地说，涉及一种转印模块，其中晶片的位置被精确地测量，并且晶片的中心精确地位于处理模块的安装部分的中心，通过形成在传送模块的耦合表面上的开口的晶片的位置坐标的测量范围被限制在开口的顶表面和底表面之间的空间内。因此，可以进行处理模块中的晶片的精确处理。

2. 发明授权

KR101395043B1 외벽에 챔버의 내부를 촬영하는 카메라가 부착된 트랜스퍼챔버 有权
标题翻译：相机胶粘剂转移室
公开(公告)号：KR101395043B1
公开(公告)日：2014-05-21
申请号：KR1020120153282
申请日：2012-12-26
申请人： 주식회사 싸이맥스
发明人： 박세운 , 황상욱
IPC分类号： H01L21/677
CPC分类号： H01L21/67196 , H01L21/67259 , H01L21/67739
摘要： The present invention relates to a transfer chamber to which a camera for photographing the inside of the transfer chamber is attached on the outer wall. The transfer chamber provides a moving space through which a wafer of a semiconductor device is transferred; and comprises a view port having a through-hole at the bottom of the transfer chamber; and a photographing part attached to the bottom of the view port to seal the view port and to photograph the inside of the transfer chamber. Therefore, the present invention provides a transfer chamber to which a camera for photographing the inside of the transfer chamber is attached on the outer wall to enable users to accurately grasp the position of a robot arm inside the transfer chamber and the condition of a wafer by minimizing blind spots for critical points and a visual field using a camera attached to the outer wall of the transfer chamber to photograph the inside of the transfer chamber.
摘要翻译：本发明涉及一种传送室，用于拍摄传送室内部的照相机安装在外壁上。传送室提供移动半导体器件的晶片通过其移动的空间; 并且包括在所述传送室的底部具有通孔的视图端口; 以及附接到视口的底部的拍摄部分，以密封观察端口并拍摄传送室的内部。因此，本发明提供了一种传送室，用于拍摄传送室内部的照相机附接到外壁上，以使得用户能够准确地将传送室内的机器人臂的位置和晶片的状态最小化关键点的盲点和使用附接到传送室的外壁的照相机拍摄传送室内部的视场。

3. 发明授权

KR101432136B1 질소가스 분사장치 일체형 웨이퍼 거치대 有权
标题翻译：氮气注入装置互连式水平仪
公开(公告)号：KR101432136B1
公开(公告)日：2014-08-20
申请号：KR1020130015594
申请日：2013-02-14
申请人： 주식회사 싸이맥스
发明人： 박세운 , 황상욱
IPC分类号： H01L21/673
CPC分类号： H01L21/68771 , H01L21/67034 , H01L21/6875 , H01L21/68785
摘要： The present invention relates to a nitrogen gas injection device integrated with a wafer holder and, more specifically, to a wafer holder of a side storage that has an internal space for drying wafers entering from a wafer transfer device using nitrogen gas. The wafer holder comprises a first pipe which has a first tube which is hollow for nitrogen gas supplied from the outside to pass, and multiple nitrogen gas discharge holes between stackers for nitrogen gas supplied to the first tube to be discharged to the outside; and multiple stackers which are separated at regular intervals so that the wafer can be held on the outer circumference surface of the pipe. The nitrogen gas injection device also includes a flange whose one side is coupled to an end of the wafer holder and whose the other side is coupled to a nitrogen gas supplying nozzle through which nitrogen gas is supplied from the outside.
摘要翻译：本发明涉及一种与晶片保持器集成的氮气注入装置，更具体地说，涉及一种具有用于干燥从使用氮气的晶片转移装置进入的晶片的内部空间的侧面存储器的晶片保持器。晶片保持器包括：第一管，其具有从外部供给的氮气中空的第一管，并且供给到第一管的氮气的堆积器之间的多个氮气排出孔被排出到外部; 以及以规则间隔分开的多个堆垛机，使得晶片能够保持在管的外周表面上。氮气注入装置还包括一个凸缘，其一侧连接到晶片保持器的端部，另一侧与氮气供应喷嘴相连，氮气从外部供给氮气。

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