基本信息:
- 专利标题： 웨이퍼 이송위치 측정 범위를 최소화하는 트랜스퍼 모듈
- 专利标题（英）：Trasfer module
- 专利标题（中）：TRASFER MODULE
- 申请号：KR1020120153281 申请日：2012-12-26
- 公开(公告)号：KR101408164B1 公开(公告)日：2014-06-17
- 发明人： 박세운 , 황상욱
- 申请人： 주식회사 싸이맥스
- 申请人地址： 경기도 화성시 동탄면 동탄산단*길 **
- 专利权人： 주식회사 싸이맥스
- 当前专利权人： 주식회사 싸이맥스
- 当前专利权人地址： 경기도 화성시 동탄면 동탄산단*길 **
- 代理人： 오영균
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/68
摘要：
The present invention relates to a transfer module and, more specifically, to a transfer module in which a position of a wafer is accurately measured and the center of the wafer is accurately located in the center of a mounting portion of a process module by minimizing a measuring range of position coordinates of the wafer, which passes through an opening formed on a coupling surface of the transfer module, to be limited within a space between the top surface and the bottom surface of the opening. Thereby, accurate processing of the wafer in the process module can be conducted.
摘要（中）：
本发明涉及一种转印模块，更具体地说，涉及一种转印模块，其中晶片的位置被精确地测量，并且晶片的中心精确地位于处理模块的安装部分的中心， 通过形成在传送模块的耦合表面上的开口的晶片的位置坐标的测量范围被限制在开口的顶表面和底表面之间的空间内。 因此，可以进行处理模块中的晶片的精确处理。