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1. 发明公开

KR1020170071426A 가스 유량 감시 방법 및 가스 유량 감시 장치 审中-实审
标题翻译：气体流量监测方法和气体流量监测装置
公开(公告)号：KR1020170071426A
公开(公告)日：2017-06-23
申请号：KR1020160168414
申请日：2016-12-12
申请人： 시케이디 가부시키가이샤 , 가부시키가이샤 호리바 에스텍
发明人： 나카다아키코 , 니시무라야스노리 , 이토미노루 , 니시카와마사미 , 하야시시게유키 , 이에키아츠시
IPC分类号： H01L21/02 , H01L21/67 , F17C13/04 , F17C13/02
CPC分类号： C23C16/52 , C23C16/45561 , G01F1/34 , G01F3/36 , G01F3/38
摘要： 프로세스에영향을미치는일 없이, 프로세스가스의유량을인라인으로감시할수 있는가스유량감시방법및 가스유량감시장치를제공하는것이다. 프로세스가스공급원(130)으로부터의프로세스가스를유량제어하여소정의프로세스챔버(140)에공급하는 MFC(유량제어기기)(10)와, 상기 MFC(10)의상류측에배치되는개시차단밸브(21)와, 상기개시차단밸브(21)와상기 MFC(10) 사이에배치되는압력계(23)를갖고, 상기개시차단밸브(21)를폐쇄하여상기 MFC(10)의상류측에있어서의압력의강하를상기압력계(23)로측정함으로써상기 MFC(10)의유량을측정하고, 그후, 상기개시차단밸브(21)를개방함으로써, 상기 MFC(10)의유량을감시하는가스유량감시방법에있어서, 상기개시차단밸브(21)를개방하기전에, 상기 MFC(10)를온 상태로부터오프상태로한다.
摘要翻译：一种能够在不影响工艺的情况下在线监测工艺气体的流量的气体流量监测方法和气体流率监测装置。处理MFC（流量控制装置），以从气体供给源130流动的工艺气体的速度控制用于提供预定处理腔室140（10），开始被设置在MFC 10，服装ryucheuk关闭阀（21 ）和截止阀21和MFC（10）的开始具有根据MFC（10）服装ryucheuk在关闭所公开的切断阀21的压力设置在降之间的压力计23 根据由测量的气体流率监测方法由压力计23次测量的MFC的流率（10），然后，通过打开所公开的截止阀21，并监测MFC的流率（10），在开始关闭阀21打开之前，MFC10从暖态切断。

2. 发明授权

KR102116746B1 유체혼합소자 有权
公开(公告)号：KR102116746B1
公开(公告)日：2020-06-01
申请号：KR1020130161472
申请日：2013-12-23
申请人： 가부시키가이샤 호리바 에스텍
发明人： 야스다다다히로 , 하야시시게유키
IPC分类号： H01L21/02

3. 发明授权

KR102044844B1 밸브 요소 및 유체 제어 밸브 有权
公开(公告)号：KR102044844B1
公开(公告)日：2019-11-14
申请号：KR1020130098340
申请日：2013-08-20
申请人： 가부시키가이샤 호리바 에스텍
发明人： 하야시시게유키 , 야스다다다히로 , 오사가즈야
IPC分类号： F16K31/02 , G05D7/06 , F16K31/04

4. 发明公开

KR1020130040741A 유량 제어 장치, 유량 제어 장치에 이용되는 진단 장치, 및 진단용 프로그램이 기록된 기록 매체 审中-实审
标题翻译：流量控制装置，诊断装置和记录用于流量控制装置的诊断程序的记录介质
公开(公告)号：KR1020130040741A
公开(公告)日：2013-04-24
申请号：KR1020120113584
申请日：2012-10-12
申请人： 가부시키가이샤 호리바 에스텍
发明人： 야스다다다히로 , 하야시시게유키 , 다카하시아키토 , 시미즈데츠오
IPC分类号： G05D7/06 , G01F1/00 , G05B23/02 , H01L21/02
CPC分类号： G01F1/6842 , G05D7/0635 , Y10T137/776
摘要： PURPOSE: A flow control device, a diagnosis device utilized for the flow control device, and a recording medium in which a program for diagnosis is recorded are provided to diagnose the abnormality of a fluid control valve based on high reliability by determining whether an error is occurred at a first measured fluid value based on a second measured fluid value or a measured pressure value. CONSTITUTION: A first flow measuring instrument(1) measures the flow of a fluid flowing in a fluid path(ML). A flow control valve(2) is formed on the fluid path. A valve control part(21) inputs a positioning control parameter into the flow control valve for controlling the positioning of the flow control valve. The fluid measuring tool measures the flow or pressure of the fluid flowing in the fluid path. A first measured flow diagnosing part(5) diagnoses the abnormality of a first measured flow value based on a second measured flow value or a measured pressure value. A valve diagnosing part(7) diagnoses the abnormality of the flow control valve. [Reference numerals] (14) Thermal type flow rate calculation part; (21) Valve control part; (34) Pressure type flow rate calculation part; (4) Stable state determination part; (5) Thermal type flow rate diagnosing part; (6) Valve applied voltage storage part; (7) Valve diagnosing part;
摘要翻译：目的：提供一种流量控制装置，用于流量控制装置的诊断装置和记录有诊断程序的记录介质，以通过确定误差是否为误差来诊断流体控制阀的高可靠性的异常基于第二测量流体值或测量的压力值发生在第一测量流体值。构成：第一流量测量仪（1）测量在流体路径（ML）中流动的流体的流动。流体控制阀（2）形成在流体路径上。阀控制部件（21）将定位控制参数输入流量控制阀，以控制流量控制阀的定位。流体测量工具测量在流体路径中流动的流体的流量或压力。第一测量流量诊断部件（5）基于第二测量流量值或测量的压力值来诊断第一测量流量值的异常。阀诊断部（7）诊断流量控制阀的异常。（附图标记）（14）热式流量计算部; （21）阀门控制部件; （34）压力式流量计算部分; （4）稳定状态判定部; （5）热式流量诊断部分; （6）阀门施加电压存储部分; （7）阀门诊断部位;

5. 发明授权

KR102210858B1 유체 제어 밸브 有权
公开(公告)号：KR102210858B1
公开(公告)日：2021-02-02
申请号：KR1020157030470
申请日：2014-10-15
申请人： 가부시키가이샤 호리바 에스텍
发明人： 야스다다다히로 , 하야시시게유키
IPC分类号： F16K7/12 , F16K27/02 , F16K31/00 , F16K47/08 , G05D7/01 , G05D7/06
摘要： 압력이나유량등의유체제어의정밀도를해치지않고, 내부용적을저감할수 있으며, 예를들면하강응답성능을향상시킬수 있는유체제어밸브를제공하는것을목적으로한다. 본발명의유체제어밸브는, 밸브시트부(61)와, 상기밸브시트부(61)에대해서접리가능하게마련된밸브체(4)와, 유체저항(5)과, 상기유체저항(5)을협지하는한 쌍의협지부재(H)를구비하며, 상기유체저항(5) 및상기한 쌍의협지부재(H)는, 상기밸브체(4) 또는상기밸브체(4)를이동시키는구동부재의적어도일부가수용되는밸브내 공간(S2)을형성하고있으며, 유체가상기밸브내 공간(S2)으로부터상기유체저항(5)을통과하여외부로유출하도록구성했다.

6. 发明授权

KR101737147B1 유량 측정 기구, 매스 플로우 콘트롤러 및 압력 센서 有权
标题翻译：流量测量仪，质量流量控制器和压力传感器
公开(公告)号：KR101737147B1
公开(公告)日：2017-05-17
申请号：KR1020127008331
申请日：2010-09-17
申请人： 가부시키가이샤 호리바 에스텍
发明人： 하야시시게유키 , 구와하라아키라
IPC分类号： G01F1/36 , G01F1/88 , G05D7/06 , G01L7/08
CPC分类号： G01F1/36 , G01F1/88 , G05D7/0635 , Y10T137/7759
摘要： 본발명은, 측정해야할 대상유체가흐르는내부유로를가진몸체유닛과, 상기몸체유닛에장착되어내부유로의압력을검지하는압력센서를구비하고, 상기압력센서가검지한유체압력에근거하여상기유체의유량을산출가능하게구성한유량측정기구에있어서, 상기몸체유닛이길이방향을가짐과아울러그 길이방향에평행한면에부품장착면을설정하고, 상기부품장착면에상기압력센서를, 그감압면이상기부품장착면에대략수직으로또한상기길이방향에대략평행이되도록장착함으로인해서, 압력측정의감도저하를초래하지않고, 폭방향치수를종래에비해비약적으로저감한것이다.
摘要翻译：本发明是安装在测量体部和与所述内部通道中流动的压力传感器做用于检测流路中的压力，所述主体单元的目标流体上，其中，基于所述流体压力，该压力的压力传感器检测流体在流动速率的流量测量装置可以被配置，计算机，所述主体部具有长度和具有方向以及在元件安装表面上的压力传感器的纵向方向的部件安装在平行表面设置到一侧，并且所述压力侧由于通过安装大致垂直的也到移相器以使组件安装表面大致平行于所述纵向方向，向一个，而不会导致压力测量，宽度方向的尺寸，在与现有的相比显着降低的劣化的敏感性。

7. 发明公开

KR1020140118756A 유체 제어 밸브 审中-实审
标题翻译：流体控制阀
公开(公告)号：KR1020140118756A
公开(公告)日：2014-10-08
申请号：KR1020140028556
申请日：2014-03-11
申请人： 가부시키가이샤 호리바 에스텍
发明人： 야스다다다히로 , 하야시시게유키 , 가난노부유키
IPC分类号： F16K1/04 , G05D7/06
CPC分类号： F16K41/10 , F16K31/007 , Y10T137/7895
摘要： According to the present invention, a fluid control valve can have an increased caliber and an increased output. The present invention is highly deformed for a higher stroke even when a backlash force from an actuator is not large. Also, even a thin formation rarely causes a defect in the fluid control valve that is provided with a diaphragm structure. A fluid control valve (V) is provided with a diaphragm structure (4) and an actuator (3) that presses the diaphragm structure (4). The diaphragm structure (4) is formed to have a tube shape, and is provided with a protruding portion (42) which is pressed by the actuator (3), a collar portion (41) which is widened outside with respect to the protruding portion (42) from a base end of the protruding portion (42), and a supporting portion (FI) which is formed on an outer circumference of the collar portion (41) and is mounted on another member. The collar portion (41) is formed to have a film form.
摘要翻译：根据本发明，流体控制阀可以具有增加的口径和增加的输出。即使当来自致动器的间隙力不大时，本发明也对于更高的行程而高度变形。此外，即使薄的结构也很少引起设置有隔膜结构的流体控制阀的缺陷。流体控制阀（V）设有隔膜结构（4）和按压隔膜结构（4）的致动器（3）。膜片结构（4）形成为管状，并且设置有被致动器（3）按压的突出部（42），凸缘部（41）相对于突出部（42）从所述突出部（42）的基端开始，并且形成在所述套环部（41）的外周上并且安装在另一构件上的支撑部（FI）。凸缘部分（41）形成为具有薄膜形式。

8. 发明公开

KR1020140086858A 유체혼합소자 审中-实审
标题翻译：流体混合元件
公开(公告)号：KR1020140086858A
公开(公告)日：2014-07-08
申请号：KR1020130161472
申请日：2013-12-23
申请人： 가부시키가이샤 호리바 에스텍
发明人： 야스다다다히로 , 하야시시게유키
IPC分类号： H01L21/02
CPC分类号： B01F5/0082 , B01F3/02 , B01F5/04 , B01F5/045 , B01F13/1016 , B01F2005/0088 , B01F2005/0091 , Y10T137/2224
摘要： A fluid mixing element according to the present invention forms a first internal flow channel (3) whose starting end opens on an end surface of one end part and whose terminal end opens on an end surface of the other end part (13), and a second internal flow channel (4) whose starting end opens on a side peripheral surface of a middle part and whose terminal end opens on an end surface of the other end part (13). It is possible for the fluid mixing element to securely mix a first fluid flowing in a main flow channel with a second fluid flowing in a sub-flow channel by the use of a pipe with a short length with a simple arrangement.
摘要翻译：根据本发明的流体混合元件形成第一内部流动通道（3），其第一内部流动通道（3）的起始端在一个端部的端面上开口，并且其末端在另一端部（13）的端面上开口，第二内部流路（4），其起始端在中间部的侧面开口，其末端在另一端部（13）的端面开口。流体混合元件可以通过使用具有简单布置的短长度的管道将在主流动通道中流动的第一流体与在子流动通道中流动的第二流体可靠地混合。

9. 发明公开

KR1020120115110A 유체 제어 밸브 审中-实审
标题翻译：流体控制阀
公开(公告)号：KR1020120115110A
公开(公告)日：2012-10-17
申请号：KR1020120034700
申请日：2012-04-04
申请人： 가부시키가이샤 호리바 에스텍
发明人： 하야시시게유키
IPC分类号： F16K1/34 , G05D7/00
CPC分类号： F16K1/34 , F16K31/007 , F16K47/10 , Y10T137/7722 , Y10T137/86734 , Y10T137/86759
摘要： PURPOSE: A fluid control valve is provided to minimize an actuator for actuating a valve body member because a distance between a seat face and a valve seat face is shortened by making multiple bottom grooves with reduced width of the bottom grooves. CONSTITUTION: A fluid control valve comprises a seat face(6a) and a pair of valve members(6). First bottom grooves and second bottom grooves are overlapped by turns on the seat face or a valve seat face. The communication of the openings of the first bottom grooves and the openings of second bottom grooves is blocked in a state where the seat face and the valve seat face are closed in order to make a closed state in which an upstream passage and a downstream passage are not connected. The openings of the first bottom grooves and the openings of the second bottom grooves are communicated through a gap between the seat face and the valve seat in a state where the seat face and the valve seat face are separated in order to make an opened state in which the upstream passage and the downstream passage are connected.
摘要翻译：目的：提供一种流体控制阀，以便通过制造具有减小的底部槽宽度的多个底部凹槽来缩短用于致动阀体构件的致动器，因为座面和阀座面之间的距离缩短。构成：流体控制阀包括座面（6a）和一对阀构件（6）。第一底槽和第二底槽在座面或阀座面上匝重叠。在座面和阀座面关闭的状态下，第一底槽的开口和第二底槽的开口的连通被阻塞，以便形成上游通道和下游通道的关闭状态未连接。第一底槽的开口和第二底槽的开口在座面和阀座面分离的状态下通过座面和阀座之间的间隙连通，以便在上游通道和下游通道连接。

10. 发明公开

KR1020170115454A 밸브 요소 및 유체 제어 밸브 审中-实审
标题翻译：阀元件和流体控制阀
公开(公告)号：KR1020170115454A
公开(公告)日：2017-10-17
申请号：KR1020170045260
申请日：2017-04-07
申请人： 가부시키가이샤 호리바 에스텍
发明人： 하야시시게유키 , 샤쿠도가즈야
IPC分类号： F16K1/36 , F16K1/46 , F16K27/02 , F16K31/00
CPC分类号： F16K27/02 , F16K1/44 , F16K25/005 , F16K31/007 , G05D7/0629
摘要： 오염이생기기어려운유체제어밸브(3) 및해당유체제어밸브(3)를이용한유체제어장치를제공하기위해, 밸브시트부재(4) 또는밸브체부재(6) 중적어도어느일방이, 금속제의베이스체(61)와상기베이스체(61)의표면을피복하여밸브시트면(4a) 또는착좌면(6a)을형성하는수지층(62)을구비한것에있어서, 상기수지층(62)을, 상기베이스체(61)에직접화학결합시켰다.
摘要翻译：阀座构件4和阀体构件6中的任何一个可用于提供使用流体控制阀3和流体控制阀3的流体控制装置，以及树脂层（62），其覆盖基体（61）的表面并形成阀座表面（4a）或座面（6a），其特征在于，树脂层（62）直接化学键合到基体（61）上。

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