专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

KR1020110025362A 로봇암의 웨이퍼 감지 장치 无效
标题翻译：用于检测机器人臂的波形的装置
公开(公告)号：KR1020110025362A
公开(公告)日：2011-03-10
申请号：KR1020090083392
申请日：2009-09-04
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/677 , B25J13/08 , B25J15/00
CPC分类号： H01L21/67766 , B25J13/086 , B25J19/022 , H01L21/67265 , H01L21/68707 , Y10S414/137
摘要： PURPOSE: A wafer sensing device of a robot arm is provided to accurately determine the state of a wafer by including a plurality of sensors. CONSTITUTION: A plurality of sensors are positioned in the end of a robot arm to sense a wafer loaded on the robot arm. The robot arm supports a wafer. A controller(120) determines the state of a wafer according to the sensing result of the sensor. A sensor includes a first sensor(111) and a second sensor(112). The first and second sensors transmit a first signal in a side direction of the wafer and receive a second signal reflected from the wafer.
摘要翻译：目的：提供机器人臂的晶片感测装置，通过包括多个传感器来精确地确定晶片的状态。构成：将多个传感器定位在机器人臂的末端以感测装载在机器人手臂上的晶片。机器人臂支撑晶片。控制器（120）根据传感器的感测结果确定晶片的状态。传感器包括第一传感器（111）和第二传感器（112）。第一和第二传感器在晶片的侧面方向上传送第一信号并接收从晶片反射的第二信号。

2. 发明公开

KR1020080072257A 기판 이송 장치 및 이를 이용한 기판 이송 방법 无效
标题翻译：用于传送基板的装置和使用该基板传送基板的方法
公开(公告)号：KR1020080072257A
公开(公告)日：2008-08-06
申请号：KR1020070010756
申请日：2007-02-01
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/68
CPC分类号： H01L21/67742 , H01L21/67017 , H01L21/68707
摘要： A substrate transferring apparatus and a substrate transferring method using the same are provided to prevent deformation of a plate or a FOUP(Front Opening Unified Pod) by forming an air curtain at an upper part of a substrate. A substrate transferring apparatus includes an arm unit, a plate(33), and a nozzle unit(32). The plate is coupled with the arm unit through a connective unit(31). A substrate is loaded on the plate. The nozzle unit discharges a gas(50) onto the substrate. The nozzle unit is arranged on the connective unit. A gas supply unit provides the gas. The gas supply unit is formed in the inside of the connective unit in order to supply the gas to a tube(20) connected to the nozzle unit.
摘要翻译：提供了一种基板转印装置和使用其的基板转印方法，以通过在基板的上部形成气帘来防止板或FOUP（前开口统一荚）的变形。基板转印装置包括臂单元，板（33）和喷嘴单元（32）。板通过连接单元（31）与臂单元联接。将基板装载在板上。喷嘴单元将气体（50）排放到基板上。喷嘴单元布置在连接单元上。气体供应单元提供气体。气体供给单元形成在连接单元的内部，以将气体供应到连接到喷嘴单元的管（20）。

3. 发明公开

KR1020080072265A 기판 처리 장치, 기판 이송 로봇, 기판 이송 로봇의 구동방법 无效
标题翻译：用于加工基板的装置，用于承载基板的机器人，其操作方法
公开(公告)号：KR1020080072265A
公开(公告)日：2008-08-06
申请号：KR1020070010768
申请日：2007-02-01
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/68
CPC分类号： H01L21/67742 , H01L21/67242
摘要： A substrate processing unit, a substrate transferring robot, and a driving method of the substrate transferring robot are provided to prevent a breakdown of a substrate by preventing collision between the substrate transferring robot and a peripheral unit. A plurality of baths(11-15) are arranged in a row. A plurality of substrate transferring robots(100-1,100-2) are used for transferring a substrate from one of the baths to another of the baths. A sensor is installed at each of the baths in order to prevent collision with a peripheral unit by measuring a distance from the peripheral unit. The substrate transferring robot includes a body part to be moved in left/right directions, a head part installed in the body part to be moved in upper/lower directions, an arm part installed in the head part to be moved in left/right directions, and a chuck part installed in the arm part to fix the substrate.
摘要翻译：提供基板处理单元，基板传送机器人以及基板传送机器人的驱动方法，以防止基板传送机器人与外围单元之间的碰撞而导致基板的破坏。多排浴（11-15）排成一列。使用多个基板转印机器人（100-1,100-2）将基底从一个浴转移到另一个浴。在每个浴池中安装传感器，以便通过测量与外围设备的距离来防止与外围设备的碰撞。基板搬送机器人具有左右方向移动的主体部，安装在主体部的上下方向的头部，安装在头部的臂部，左右方向移动以及安装在臂部中以固定基板的卡盘部。

4. 发明授权

KR100331779B1 반도체 세정설비의 구동 제어방법 失效
标题翻译：半导体清洁设备的驱动控制方法
公开(公告)号：KR100331779B1
公开(公告)日：2002-04-09
申请号：KR1019990026520
申请日：1999-07-02
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/66
摘要： PURPOSE: A method for controlling driving of semiconductor cleaning equipment is provided to obtain information necessary for repairing the cleaning equipment and extending the capacity of the cleaning equipment by easily monitoring and controlling various data according to the operation of the cleaning equipment. CONSTITUTION: Various parameters are initiated and a system control unit is connected to a database. After the data of the database is read, the system control unit is connected to a programmable logic controller(PLC) to which a plurality of sensors for sensing the operation state of the cleaning equipment are connected. The data of the PLC is read to check at least one of an alarm state, temperature, density, resistivity, an equipment state, end data, a start state of a lot, a parameter data input, an alarm code input and a lot data setup as compared with the data of the database.

5. 发明公开

KR1020080072260A 얼라이너 및 이를 포함하는 반도체 제조 장비 无效
标题翻译：对准器和半导体制造设备，包括它们
公开(公告)号：KR1020080072260A
公开(公告)日：2008-08-06
申请号：KR1020070010761
申请日：2007-02-01
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/02
摘要： An aligner and a semiconductor manufacturing apparatus including the same are provided to reduce a standby time of a transfer robot by aligning a plurality of substrates. A plurality of pin units(102a,102b) are installed in an inside of an alignment chamber. A plurality of substrates(W1,W2) are loaded into the pin units. An aligner includes a plurality of spin chucks(104a,104b). The spin chucks are formed to align constantly a direction of the substrates loaded on the pin units. The spin chucks are installed in the inside of the alignment chamber corresponding to the pin units. The pin units have different levels of height. The substrates loaded on the adjacent pin units are overlapped partially with each other.
摘要翻译：提供了一种对准器和包括该对准器的半导体制造装置，以通过对准多个基板来减少传送机器人的待机时间。多个销单元（102a，102b）安装在对准室的内部。多个基板（W1，W2）被装载到销单元中。对准器包括多个旋转卡盘（104a，104b）。旋转卡盘被形成为恒定地对装在引脚单元上的基板的方向进行对准。旋转卡盘安装在对应于销单元的对准室的内部。针单元具有不同的高度。装载在相邻引脚单元上的基板彼此部分地重叠。

6. 发明公开

KR1020080072259A 풉 오프너 및 그 구동 방법 无效
标题翻译： FOUP开口器及其操作方法
公开(公告)号：KR1020080072259A
公开(公告)日：2008-08-06
申请号：KR1020070010760
申请日：2007-02-01
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/68
CPC分类号： H01L21/67373 , H01L21/67259 , H01L21/67766
摘要： A FOUP(Front Opening Unified Pod) opener and a driving method thereof are provided to prevent a breakdown of a door and/or a transfer robot by preventing collision with a transfer robot. A FOUP loading unit(120) is installed at a body unit(110). A FOUP is loaded in the FOUP loading unit. A door(130) is installed in the body unit in order to open/close a cover of the FOUP. An anti-collision sensor(150) is installed in the body unit in order to sense an entering state of a transfer robot in the inside of the FOUP. One or more slots are installed in the inside of the FOUP. One or more substrates are loaded onto the slots. The anti-collision sensor is arranged in a direction perpendicular to the slots.
摘要翻译：提供了一种FOUP（前开式统一荚）开启器及其驱动方法，以防止与传送机器人碰撞时门和/或传送机器人的故障。 FOUP装载单元（120）安装在主体单元（110）上。 FOUP装载在FOUP装载单元中。门体（130）安装在主体单元中以打开/关闭FOUP的盖。防碰撞传感器（150）安装在主体单元中，以便感测FOUP内部的传送机器人的进入状态。一个或多个插槽安装在FOUP的内部。一个或多个衬底被加载到槽上。防碰撞传感器沿垂直于槽的方向排列。

7. 发明公开

KR1020080072258A 풉 오프너 无效
标题翻译： FOUP OPENER
公开(公告)号：KR1020080072258A
公开(公告)日：2008-08-06
申请号：KR1020070010759
申请日：2007-02-01
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/673 , H01L21/00
CPC分类号： H01L21/67373 , H01L21/67772 , H01L21/67778
摘要： A FOUP opener is provided to improve operation reliability of the FOUP opener by preventing an operator to manually close an opening of a FOUP using a cover. A FOUP(Front Open Unified Pod) opener includes a body unit, a plate(120), and a door(130). The plate is installed on the body unit. A FOUP is mounted on the plate. The door is installed on the body unit and opens/closes the cover of the FOUP. The door pushes the cover of the FOUP in a first direction toward an opening of the FOUP. The plate pushes the cover of the FOUP in a second direction, which is opposite to the first direction, such that the opening of the FOUP is closed by the cover of the FOUP.
摘要翻译：提供了一种FOUP开启器，通过防止操作者使用盖手动关闭FOUP的开口来提高FOUP开启器的操作可靠性。 FOUP（前开式统一荚）开启器包括主体单元，板（120）和门（130）。板体安装在身体单元上。 FOUP安装在板上。门安装在身体单元上，打开/关闭FOUP的盖子。门将第一个方向的FOUP的盖子推向FOUP的开口。该板沿着与第一方向相反的第二方向推动FOUP的盖，使得FOUP的开口被FOUP的盖封闭。

8. 发明公开

KR1019990073317A 반도체 세정설비의 구동 제어방법 失效
标题翻译：半导体清洗设备的驱动控制方法及其装置
公开(公告)号：KR1019990073317A
公开(公告)日：1999-10-05
申请号：KR1019990026520
申请日：1999-07-02
申请人： 세메스 주식회사
发明人： 문인호
IPC分类号： H01L21/66
摘要： 본발명은세정설비의공정조건을모니터링하면서설정하는한편설정된공정조건에따라설비의세정공정을제어할수 있도록하는반도체세정설비의구동제어방법및 그장치에관한것이다. 본발명에따른반도체세정설비의구동제어방법및 그장치는, 각종변수를초기화한후 시스템제어부를데이터베이스에연결하여주는단계와, 상기데이터베이스의데이터를읽어낸후 세정설비의동작상태를감지하는다수개의센서들이연결되어있는 PLC에상기시스템제어부를연결하여주는단계및 상기 PLC의데이터를읽어내서상기데이터베이스의데이터와대비하여세정설비의경보상태, 온도, 농도, 비저항, 설비상태, 엔드데이터, LOT 시작상태, 파라미터데이터입력, 알람코드입력, LOT 데이터설정중 하나이상을체크하는단계로구성된다. 본발명에따르면, 세정설비의동작에따른각종데이터를용이하게모니터링할수 있을뿐만아니라관리할수 있으며, 이로부터세정설비의고장수리및 기능확장시필요한정보를얻을수 있는것이다.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式