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    • 10. 发明公开
    • 반도체 소자의 제조방법
    • 制造半导体器件的方法
    • KR1020080090933A
    • 2008-10-09
    • KR1020070034414
    • 2007-04-06
    • 삼성전자주식회사
    • 김홍석황기현최시영백승재양상렬이주열박광민
    • H01L27/115H01L21/8247
    • H01L21/28273H01L21/31144H01L21/76224
    • A method for manufacturing a semiconductor device is provided to suppress lateral charge spreading while preventing failure from being generated during a following process by using a cutting method for the charge trap layer including a step of depositing a smooth poly silicon layer on a silicon nitride layer which becomes the charge trap layer by using Si3H8 as a source. A method for manufacturing a semiconductor device comprises the following steps of: sequentially forming a tunnel oxide layer, a silicon nitride layer and a poly silicon layer on a semiconductor substrate; forming a mask film pattern on the poly silicon layer; sequentially etching the poly silicon layer, the silicon nitride layer, the tunnel oxide layer and the semiconductor layer to the inside of the semiconductor substrate by using the mask layer pattern as etch mask to form a poly silicon layer pattern, a silicon nitride layer pattern(23a) and a tunnel oxide layer pattern(22a), thereby forming a groove; forming a first oxide layer pattern filling the groove; removing the mask film pattern to expose the poly silicon layer pattern; removing the poly silicon layer pattern to expose the silicon nitride layer pattern; and forming a gate material layer(27) on the silicon nitride layer pattern.
    • 提供一种制造半导体器件的方法,用于抑制横向电荷扩展,同时通过使用用于电荷捕获层的切割方法防止在后续处理中产生故障,包括在氮化硅层上沉积光滑多晶硅层的步骤 通过使用Si3H8作为源,成为电荷陷阱层。 一种制造半导体器件的方法包括以下步骤:在半导体衬底上依次形成隧道氧化物层,氮化硅层和多晶硅层; 在所述多晶硅层上形成掩模膜图案; 通过使用掩模层图案作为蚀刻掩模,将多晶硅层,氮化硅层,隧道氧化物层和半导体层依次蚀刻到半导体衬底的内部以形成多晶硅层图案,氮化硅层图案( 23a)和隧道氧化物层图案(22a),从而形成凹槽; 形成填充所述槽的第一氧化物层图案; 去除掩模膜图案以暴露多晶硅图案; 去除所述多晶硅层图案以暴露所述氮化硅层图案; 以及在所述氮化硅层图案上形成栅极材料层(27)。