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    • 3. 发明公开
    • 다층 세라믹 기판의 소성용 세터 및 이를 이용한 다층 세라믹 기판의 제조방법
    • 用于多层陶瓷基板的设置和使用该多层陶瓷基板的多层陶瓷基板的制造方法
    • KR1020110050144A
    • 2011-05-13
    • KR1020090106996
    • 2009-11-06
    • 삼성전기주식회사
    • 김용석장병규김형호이택정
    • H05K3/46
    • PURPOSE: A setter for firing multi-layer ceramic substrate and a manufacturing method of a multi-layer ceramic substrate using the same are provided to prevent the failure of a multi-layer ceramic substrate by preventing a mechanical and thermal deformation of the multi-layer ceramic substrate. CONSTITUTION: A sintering setter(10) of a multilayer ceramic substrate includes a pressure setter(11) and a shock absorbing setter(12). The pressure setter applies a fixed load to an un-sintered multilayer ceramic substrate. A target side to be laminated is formed in the un-sintered multilayer ceramic substrate which has higher porosity and thermal conductivity than the pressure setter. The shock absorbing setter is made of at least one of activated charcoal, a carbon hotwire, aluminum-nitride(AlN), boron nitride(BN), and silicon carbide(SiC).
    • 目的:提供一种用于烧制多层陶瓷基板的固定器和使用其的多层陶瓷基板的制造方法,以通过防止多层陶瓷基板的机械和热变形来防止多层陶瓷基板的故障 陶瓷基板。 构成:多层陶瓷基板的烧结固定器(10)包括压力调节器(11)和减震装置(12)。 压力调节器对未烧结的多层陶瓷衬底施加固定的负载。 在比压力调节器高的孔隙率和导热性的未烧结的多层陶瓷基板中形成待层压的靶侧。 吸震固定器由活性炭,碳热丝,氮化铝(AlN),氮化硼(BN)和碳化硅(SiC)中的至少一种制成。
    • 7. 发明公开
    • LDI 노광장치
    • 用于激光直接图像过程的装置
    • KR1020090067699A
    • 2009-06-25
    • KR1020070135448
    • 2007-12-21
    • 삼성전기주식회사
    • 최성환성정경김형호구봉완김재연양덕진
    • H01L21/027H01L21/66
    • G03F7/70383G03F7/2053G03F7/70025G03F7/7085
    • A LDI(Laser Direct Imaging) exposure apparatus is provided to improve panel productivity by performing a simultaneous exposure process for a plurality of panels. A LDI exposure apparatus includes a stage, a scanning unit(30), a transportation unit, an image unit, and a control unit(60). The stage is formed to fix each of panels(10). The scanning unit is installed at an upper part of the stage in order to scan each of the panels. The transportation unit is installed at a lower part of the stage in order to move the stage. The image unit is installed at one side of the scanning unit in order to detect a reference point(13) of the panel. The control unit controls a position of the stage or a position of the scanning position in order to match the position of the reference point detected by the image unit and the position of the stored panel reference point.
    • 提供LDI(激光直接成像)曝光装置,通过对多个面板执行同时曝光处理来提高面板生产率。 LDI曝光装置包括台,扫描单元(30),传送单元,图像单元和控制单元(60)。 形成台阶以固定每个面板(10)。 扫描单元安装在舞台的上部,以扫描每个面板。 运输单元安装在舞台的下部,以便移动舞台。 图像单元安装在扫描单元的一侧,以便检测面板的参考点(13)。 控制单元控制舞台的位置或扫描位置的位置,以便匹配由图像单元检测的参考点的位置和存储的面板参考点的位置。
    • 8. 发明授权
    • 적층 세라믹 기판의 제조방법
    • 多层陶瓷基板的制造方法
    • KR100887127B1
    • 2009-03-04
    • KR1020070120470
    • 2007-11-23
    • 삼성전기주식회사
    • 유수현이종면박은태김형호
    • H01L23/12H01L21/304
    • H05K3/0052H01L21/481H05K1/0306H05K3/0029H05K3/4611H05K3/4629H05K2203/308
    • A manufacturing method of multilayer ceramic substrate is provided to cut a desired cutting area without an expensive apparatus by forming a void due to organic material on a cutting area. A ceramic laminate is formed by laminating a plurality of ceramic green sheets(111, 112, 113, 114, 115). A cutting area is printed on at least one ceramic green sheet among the ceramic green sheets by using organic pastes(121, 122, 123, 124). The ceramic laminate is sintered. A cutting operation is performed according to the cutting area of a sintered ceramic laminate. A print of the cutting area is performed by printing the organic pastes on the ceramic green sheet with one method among a screen printing or an inkjet printing.
    • 提供多层陶瓷基板的制造方法,通过在切割区域上形成由于有机材料形成的空隙,而不需要昂贵的装置来切割所需的切割区域。 通过层叠多个陶瓷生片(111,112,113,114,115)形成陶瓷层压体。 通过使用有机浆料(121,122,123,124),在陶瓷生片中的至少一个陶瓷生片上印刷切割区域。 陶瓷层压体被烧结。 根据烧结陶瓷层叠体的切割面积进行切割操作。 通过丝网印刷或喷墨印刷中的一种方法将有机浆料印刷在陶瓷生片上进行切割区域的印刷。
    • 9. 发明授权
    • 캐패시터 내장형 세라믹 기판 제조방법
    • 用嵌入式电容器制造陶瓷板的方法
    • KR100764389B1
    • 2007-10-05
    • KR1020060065231
    • 2006-07-12
    • 삼성전기주식회사
    • 유수현박은태추호성조범준고민지최용석김형호
    • H05K1/16H05K3/46
    • H05K1/162H05K3/1291H05K3/4076H05K3/4644
    • A manufacturing method of a ceramic substrate with an embedded capacitor is provided to use a dielectric layer of a capacitor unit as dielectric material with high permittivity by forming the embedded capacitor on the substrate and to reduce problems caused by simultaneous sintering of different materials by coupling an organic substrate and a ceramic substrate. A manufacturing method of a ceramic substrate(21) with an embedded capacitor includes the steps of: sintering a ceramic laminate with a first interlayer circuit, and preparing the ceramic substrate(21); forming at least one capacitor unit(C1,C2) electrically connected with the first interlayer circuit by sequentially laminating a first electrode layer, a dielectric layer, and a second electrode layer on at least one area of the upper surface of the ceramic substrate(21); and pressing and laminating an organic substrate(31) consisting of a plurality of organic layers with a second interlayer circuit formed on the ceramic substrate, wherein the second interlayer is electrically connected with the first interlayer circuit and the capacitor(C1,C2).
    • 提供具有嵌入式电容器的陶瓷基板的制造方法,通过在基板上形成嵌入式电容器,使用电容器单元的介质层作为具有高介电常数的介电材料,并且通过连接不同材料同时烧结不同材料而引起的问题 有机基板和陶瓷基板。 具有嵌入式电容器的陶瓷基板(21)的制造方法包括以下步骤:用第一层间电路烧结陶瓷层叠体,制备陶瓷基板(21)。 通过在陶瓷基板(21)的上表面的至少一个区域上依次层叠第一电极层,电介质层和第二电极层,形成与第一层间电路电连接的至少一个电容器单元(C1,C2) ); 并且在陶瓷基板上形成有由第二层间电路构成的由多个有机层构成的有机基板(31)压接和层叠,其中,所述第二中间层与所述第一层间电路和所述电容器(C1,C2)电连接。