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41. 发明公开

KR1020140117207A 기상 증착 장치, 이를 이용한 증착 방법 및 유기 발광 표시 장치 제조 방법 审中-实审
标题翻译：蒸气沉积装置及制造有机发光显示装置的方法
公开(公告)号：KR1020140117207A
公开(公告)日：2014-10-07
申请号：KR1020130032362
申请日：2013-03-26
申请人： 삼성디스플레이 주식회사
发明人： 장철 , 김승훈 , 송승용 , 김진광
IPC分类号： H01L51/56 , C23C16/448
摘要： The present invention relates to a vapor deposition apparatus which forms a deposition film on a substrate so as to enhance properties of the deposition film. The apparatus includes: a first injection part which supplies a first deposition material toward the substrate; a second injection part which supplies a second deposition material toward the substrate; a plurality of ventilation parts which is arranged at least between the first injection part and the second injection part; and a barrier gas injection part which is arranged between two adjacent ventilation parts among the ventilation parts and supplies barrier gas toward the substrate.
摘要翻译：本发明涉及一种在基板上形成沉积膜以提高沉积膜性质的气相沉积设备。该装置包括：向衬底提供第一沉积材料的第一注入部分; 第二注入部，其向所述基板供给第二沉积材料; 多个通风部，其至少布置在所述第一喷射部和所述第二喷射部之间; 以及阻挡气体注入部，其配置在所述通气部中的两个相邻的通气部之间，并且向所述基板供给阻挡气体。

42. 发明公开

KR1020140052526A 기상 증착 장치, 이를 이용한 박막 형성 방법 및 유기 발광 표시 장치 제조 방법 审中-实审
标题翻译：具有该蒸气沉积装置的蒸气沉积装置，使用其形成薄膜的方法和用于制造有机发光显示装置的方法
公开(公告)号：KR1020140052526A
公开(公告)日：2014-05-07
申请号：KR1020120118677
申请日：2012-10-24
申请人： 삼성디스플레이 주식회사
发明人： 김인교 , 허명수 , 정석원 , 장철민 , 김재현 , 김진광 , 심창우 , 기성훈
IPC分类号： H01L51/56 , C23C16/44 , H05B33/10
CPC分类号： H01L21/30 , C23C16/45538 , C23C16/45551 , C23C16/45578 , C23C16/545 , H01L51/52 , H01L51/56
摘要： The present invention relates to a vapor deposition apparatus for depositing a thin film on a substrate which comprises: a cover including a receiving portion and a communicating portion, connected to the receiving portion, which is formed to the substrate direction; and a body which is disposed within the receiving portion and includes a first part and a second part, wherein the first part is disposed on a first position of the body and is connected with a first injection unit for injecting a first material to the substrate, a second part is disposed on a second position of the body and is connected with a second injection unit for injecting a second material to the substrate, and the body rotates to at least one direction for the first part and the second part to communicate alternately with the communicating portion.
摘要翻译：本发明涉及一种用于在基板上沉积薄膜的气相沉积设备，该气相沉积设备包括：盖，包括接收部分和连通部分，连接到形成在基板方向的接收部分; 以及设置在所述容纳部内并且包括第一部分和第二部分的主体，其中所述第一部分设置在所述主体的第一位置，并且与用于将第一材料注射到所述基板的第一注射单元连接，第二部分设置在主体的第二位置，并与第二注射单元连接，用于将第二材料注射到基底上，并且主体旋转到至少一个方向，使第一部分和第二部分交替地与通信部。

43. 发明公开

KR1020140013726A 기상 증착 장치 및 유기 발광 표시 장치 제조 방법 无效
标题翻译：蒸气沉积装置及制造有机发光显示装置的方法
公开(公告)号：KR1020140013726A
公开(公告)日：2014-02-05
申请号：KR1020120081971
申请日：2012-07-26
申请人： 삼성디스플레이 주식회사
发明人： 김재현 , 김진광 , 허명수
IPC分类号： H01L51/56 , C23C16/44
CPC分类号： H01L33/005 , C23C16/452 , C23C16/45519 , C23C16/54
摘要： The preset invention provides a vapor deposition apparatus and a method for manufacturing an organic light emitting display apparatus. The vapor deposition apparatus comprises at least one first region including a first injecting unit that injects a first raw material, a first purging unit that injects purge gas, and a first exhaust unit that performs a pumping operation and is disposed between the first injecting unit and the first purging unit; at least one second region including a second injecting unit that injects a second raw material, a second purging unit that injects purge gas, and a second exhaust unit that performs a pumping operation and is disposed between the second injecting unit and the second purging unit; a first blocking unit A formed between the first exhaust unit and the first injecting unit and between the first exhaust unit and the first purging unit in the first region so as to avoid any common region between the first exhaust unit and the first injecting unit and to avoid any common region between the first exhaust unit and the first purging unit; and a first blocking unit B formed between the second exhaust unit and the second injecting unit and between the second exhaust unit and the second purging unit in the second region so as to avoid any common region between the second exhaust unit and the second injecting unit and to avoid any common region between the second exhaust unit and the second purging unit.
摘要翻译：本发明提供了一种蒸镀装置和制造有机发光显示装置的方法。气相沉积装置包括至少一个第一区域，该第一区域包括注入第一原料的第一注入单元，注入吹扫气体的第一净化单元和执行抽吸操作的第一排气单元，并且设置在第一注入单元和第一个清洗单元; 至少一个第二区域，包括喷射第二原料的第二喷射单元，喷射吹扫气体的第二吹扫单元和进行抽吸操作并设置在第二喷射单元和第二吹扫单元之间的第二排气单元; 形成在第一排气单元和第一喷射单元之间以及在第一区域中的第一排气单元和第一吹扫单元之间的第一分隔单元A，以避免第一排气单元和第一喷射单元之间的任何公共区域，以及避免第一排气单元和第一排气单元之间的任何公共区域; 以及形成在所述第二排气单元和所述第二喷射单元之间以及在所述第二区域中的所述第二排气单元和所述第二吹扫单元之间的第一阻挡单元B，以避免所述第二排气单元和所述第二喷射单元之间的任何公共区域，以及以避免第二排气单元和第二吹扫单元之间的任何公共区域。

44. 发明授权

KR101288129B1 기상 증착 장치, 기상 증착 방법 및 유기 발광 표시 장치 제조 방법 有权
标题翻译：蒸镀装置，气相沉积方法及制造有机发光显示装置的方法
公开(公告)号：KR101288129B1
公开(公告)日：2013-07-19
申请号：KR1020110069487
申请日：2011-07-13
申请人： 삼성디스플레이 주식회사
发明人： 서상준 , 김승훈 , 김진광 , 송승용
IPC分类号： C23C16/44 , C23C16/448 , H01L51/56 , H01L21/205
CPC分类号： C23C16/042 , C23C16/45544 , C23C16/45563 , C23C16/4587 , H01L51/001
摘要： 본 발명은 증착 공정을 효율적으로 진행할 수 있고 증착막 특성을 용이하게 향상하는 복수의 기판에 박막을 증착하기 위한 기상 증착 장치에 관한 것으로서, 배기구를 구비하는 챔버, 상기 챔버 내에 배치되고 상기 복수의 기판을 장착하도록 복수의 장착면을 구비하는 스테이지 및 상기 기판의 박막이 형성될 평면 방향과 평행하도록 기체를 주입하는 적어도 하나 이상의 주입홀을 구비하는 주입부를 포함하는 기상 증착 장치, 기상 증착 방법 및 유기 발광 표시 장치 제조 방법을 제공한다.

45. 发明公开

KR1020130008853A 기상 증착 장치, 기상 증착 방법 및 유기 발광 표시 장치 제조 방법 有权
标题翻译：蒸气沉积装置，用于蒸发沉积的方法和制造有机发光显示装置的方法
公开(公告)号：KR1020130008853A
公开(公告)日：2013-01-23
申请号：KR1020110069489
申请日：2011-07-13
申请人： 삼성디스플레이 주식회사
发明人： 서상준 , 허명수 , 김승훈 , 김진광 , 송승용
IPC分类号： C23C16/50 , H01L51/56 , H01L21/205
CPC分类号： C23C16/45542 , C23C16/45551 , C23C16/4587
摘要： PURPOSE: A vapor deposition apparatus, a method for vapor deposition, and a manufacturing method of an organic light emitting display apparatus are provided to prevent the impurities from flowing in by arranging a separate plasma generator. CONSTITUTION: A vapor deposition apparatus comprises a chamber(110), a stage(120), an injection part(130), and a plasma generator(180). The chamber has an outlet. The stage is arranged in the chamber and has a mounting side to mount a substrate(101). The injection part has at least one or more injection holes for injecting gas. The plasma generator is arranged to be separated from the substrate and to face the substrate. The plasma generator comprises a supply part injecting reaction gas, a first plasma electrode, a second plasma electrode, and an outlet.
摘要翻译：目的：提供蒸镀装置，气相沉积方法和有机发光显示装置的制造方法，以通过设置单独的等离子体发生器来防止杂质流入。构成：蒸镀装置包括室（110），载物台（120），注射部分（130）和等离子体发生器（180）。房间有一个出口。该台被布置在腔室中，并且具有安装基底（101）的安装侧。注射部分具有至少一个或多个注入气体的注入孔。等离子体发生器布置成与衬底分离并面对衬底。等离子体发生器包括供给部分注入反应气体，第一等离子体电极，第二等离子体电极和出口。

46. 发明公开

KR1020120107331A 유기 발광 표시 장치의 제조 방법 및 그 방법에 의해 제조된 유기 발광 표시 장치 无效
标题翻译：用于制造有机发光显示装置的方法和由该方法制成的有机发光显示装置
公开(公告)号：KR1020120107331A
公开(公告)日：2012-10-02
申请号：KR1020110024961
申请日：2011-03-21
申请人： 삼성디스플레이 주식회사
发明人： 김진광 , 서상준 , 김승훈 , 천준혁
IPC分类号： H01L51/56 , H01L51/50 , H05B33/04
CPC分类号： H01L51/5253 , H01L23/26 , H01L51/5237 , H01L51/5246
摘要： PURPOSE: A method for manufacturing an organic light emitting display device and the organic light emitting display device manufactured by the method are provided to reduce processing time and the number of chambers required for processing by forming first and second sealing films on the same equipment. CONSTITUTION: An organic light emitting device is formed on a substrate(S1). A first sealing film including a first inorganic material is formed on the substrate(S2). A second sealing film including a second inorganic material is formed on the first sealing film(S3). The first sealing film and the second sealing film are formed on the same equipment. The first inorganic material and the second inorganic material are of the same material. [Reference numerals] (AA) Start; (BB) End; (S1) Formation of an organic light emitting device on a substrate; (S2) Formation of a first sealing film having first thin film density; (S3) Formation of a second sealing film having second thin film density
摘要翻译：目的：提供一种制造有机发光显示装置的方法和通过该方法制造的有机发光显示装置，以通过在同一设备上形成第一和第二密封膜来减少加工时间和加工所需的室数。构成：在基板上形成有机发光元件（S1）。在基板（S2）上形成包括第一无机材料的第一密封膜。在第一密封膜（S3）上形成包括第二无机材料的第二密封膜。第一密封膜和第二密封膜形成在同一设备上。第一无机材料和第二无机材料是相同的材料。（附图标记）（AA）开始; （BB）结束; （S1）在基板上形成有机发光元件; （S2）形成具有第一薄膜密度的第一密封膜; （S3）形成具有第二薄膜密度的第二密封膜

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