会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明公开
    • 원자층 증착장치
    • 用于原子层沉积的装置
    • KR1020130007192A
    • 2013-01-18
    • KR1020110064229
    • 2011-06-30
    • 삼성디스플레이 주식회사
    • 김승훈서상준김진광천준혁
    • C23C16/455H01L51/56H05B33/04H01L21/20
    • C23C16/4412C23C16/45551C23C16/45563H01L51/5253
    • PURPOSE: An atomic layer deposition device is provided to improve deposition speed and membrane quality by increasing the speed of a purge process with enhanced structure of a purge gas injection nozzle. CONSTITUTION: An atomic layer deposition device comprises a reaction chamber, a substrate support, and a shower head. At least one of the substrate support and the shower head is installed to move in a first direction. Each nozzle set comprises a first nozzle set(111) for depositing first source gas and a second nozzle set(112) for depositing second source gas. The first nozzle set comprises a first source gas injection nozzle(211), a purge gas injection nozzle(301), and a purge gas outlet(311). The second nozzle set comprises a second source gas injection nozzle(221), the purge gas injection nozzle, and the purge gas outlet.
    • 目的:提供原子层沉积装置,通过增加清洗气体注入喷嘴的结构,提高吹扫过程的速度来提高沉积速度和膜质量。 构成:原子层沉积装置包括反应室,基底支架和淋浴头。 衬底支撑件和淋浴头中的至少一个被安装成沿第一方向移动。 每个喷嘴组包括用于沉积第一源气体的第一喷嘴组(111)和用于沉积第二源气体的第二喷嘴组(112)。 第一喷嘴组包括第一源气体喷射喷嘴(211),吹扫气体喷射喷嘴(301)和净化气体出口(311)。 第二喷嘴组包括第二源气体喷射喷嘴(221),净化气体喷射喷嘴和净化气体出口。
    • 8. 发明公开
    • 플렉시블 유기 발광 표시 장치 및 그 제조방법
    • 柔性有机发光显示装置及其制造方法
    • KR1020140019699A
    • 2014-02-17
    • KR1020120086397
    • 2012-08-07
    • 삼성디스플레이 주식회사
    • 박재현천준혁이동민
    • H01L51/50G09F9/00
    • H01L51/52H01L27/3241H01L51/003H01L51/0097Y02E10/549Y02P70/521H01L51/0053H01L51/5212H01L2251/558
    • Disclosed are a flexible organic light emitting display device and a method for manufacturing the same. The flexible organic light emitting display device is manufactured by the steps of forming a photodecomposition layer and an antistatic layer on a carrier substrate in order; arranging a first flexible substrate on the antistatic layer; forming a display part on the first flexible substrate; covering the display part with a second flexible substrate; and decomposing the photodecomposition layer by irradiating light to remove the carrier substrate. In the flexible organic light emitting display device manufactured by such method, the flexible substrate replaces the existing hard and thick glass substrate, thereby improving flexibility, inhibiting static by the antistatic layer in the separation work of the carrier substrate and preventing the display part from being damaged due to electric shock.
    • 公开了一种柔性有机发光显示装置及其制造方法。 柔性有机发光显示装置通过以下步骤制造:依次在载体基板上形成光分解层和抗静电层; 在抗静电层上布置第一柔性基底; 在所述第一柔性基板上形成显示部; 用第二柔性基板覆盖显示部分; 并通过照射光分解光分解层以除去载体基底。 在通过这种方法制造的柔性有机发光显示装置中,柔性基板代替了现有的硬质和厚玻璃基板,从而提高了柔性,抑制了载体基板的分离工作中的抗静电层的静电,并且防止显示部件 由于触电而损坏。