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    • 32. 发明授权
    • 빔 스플리터를 이용하여 근적외선 신호 및 테라헤르츠 대역의 신호를 검출하는 광학 시스템
    • 使用光束分离器的近红外和泰勒赫兹波段的信号检测光学系统
    • KR101375378B1
    • 2014-03-19
    • KR1020130001581
    • 2013-01-07
    • 한국 천문 연구원
    • 한정열강용우남욱원
    • G01J3/00G01J1/04
    • G01J1/0414G01J1/0295G01J3/12G01J2003/1204
    • The present invention relates to an optical system for detecting a near-infrared signal, and a signal at a terahertz band using a beam splitter. An optical system for detecting a near-infrared signal, and a signal at a terahertz band using a beam splitter according to an embodiment of the present invention comprises: a main reflector part provided with a first main reflector having an optical tube portion, and a plurality of second main reflectors positioned at the periphery of the first main reflector; a sub-reflector part positioned to face the main reflector part, and reflecting, to the optical tube portion, light reflected from the first and second main reflectors; a beam splitter positioned at the lower end of the optical tube portion, passing a signal at a terahertz band among light passing through the optical tube portion, and reflecting the rest of the light; a first imaging optical system configured to filter infrared light from the light reflected from the beam splitter to form an image; an image sensor configured to photograph the image obtained by the first imaging optical system to output an electrical signal; a second imaging optical system configured to filter the signal at the terahertz band, which passes through the beam splitter; and a terahertz band signal detector configured to detect the signal at the terahertz band filtered by the second imaging optical system.
    • 本发明涉及一种用于检测近红外信号的光学系统和使用分束器在太赫兹频带处的信号。 根据本发明实施例的用于检测近红外信号的光学系统和使用分束器的在太赫兹频带处的信号包括:主反射器部分,其设置有具有光学管部分的第一主反射器,以及 多个第二主反射器位于第一主反射器的周边; 定位成面向主反射器部分并且将从第一和第二主反射器反射的光反射到光管部分的子反射器部分; 位于光管部分的下端的分束器,在通过光学管部分的光中通过太赫兹频带处的信号,并反射其余的光; 第一成像光学系统,被配置为过滤来自分束器反射的光的红外光以形成图像; 被配置为拍摄由第一成像光学系统获得的图像以输出电信号的图像传感器; 第二成像光学系统,被配置为对穿过分束器的太赫兹频带处的信号进行滤波; 以及太赫兹频带信号检测器,被配置为检测由第二成像光学系统滤波的太赫兹频带处的信号。
    • 35. 发明公开
    • 순차 파면 센서
    • 顺序波形传感器
    • KR1020080100433A
    • 2008-11-18
    • KR1020087020303
    • 2006-12-21
    • 클레러티 메디칼 시스템즈 인코포레이티드
    • 쥬얀짜오큉춘웨이수웨이수
    • G01J9/00G01J3/06A61B3/12
    • G01J9/00A61B3/1015A61B3/14G01J1/0414G01J1/0437
    • A sequential wavefront sensor comprises a light beam scanning module (212), a sub-wavef ront focusing lens (220), a detector (222) with more than one photosensitive area and a processor for calculating the sequentially obtained centroids of a number focused light spots from the sub-wavefront s to determine the aberration of the input wavefront. A sequential wavefront sensing method comprises the steps of ; sequentially projecting a number of sub-wavefronts onto a sub-wavefront focusing lens and a detector with more than one photosensitive areas, calculating the centroid of the focused light spot from each sub-wavefront, and processing the centroid information to determine the aberration of the wavefront. In particular, a method for auto-focusing and/or auto-astigmatism-correction comprises the steps of sequentially projecting a number of sub-wavef ronts around an annular ring of a wavefront to a sub-wavefront focusing lens and a detector, calculating the centroid of focused light spot from each sub-wavefront to figure out the centroid trace and hence the defocus and/or astigmatism, adjusting the focus and/or astigmatism of the optical imaging system before the wavefront sensor so that the measured defocus and/or astigmatism is minimized.
    • 顺序波前传感器包括光束扫描模块(212),子波聚焦透镜(220),具有多于一个感光区域的检测器(222)和用于计算顺序获得的聚焦光的重心的处理器 来自子波前的点以确定输入波前的像差。 顺序波前感测方法包括以下步骤: 顺序地将多个子波前投影到子波前聚焦透镜和具有多于一个感光区域的检测器,计算来自每个子波前的聚焦光点的质心,以及处理质心信息以确定 波前。 特别地,一种用于自动聚焦和/或自动像散校正的方法包括以下步骤:将多个子波场围绕波前的环形环连续投影到子波前聚焦透镜和检测器,计算 从每个子波前聚焦的光斑的重心,以计算出质心轨迹,从而计算散焦和/或散光,调整光学成像系统在波前传感器之前的焦点和/或散光,使得测量的散焦和/或散光 被最小化。
    • 37. 发明公开
    • 광 검출 장치, 조명 광학 장치, 노광 장치, 및 노광 방법
    • 光检测装置,照明光学装置,曝光装置和曝光方法
    • KR1020070026797A
    • 2007-03-08
    • KR1020077000653
    • 2005-06-06
    • 가부시키가이샤 니콘
    • 고야마모토오
    • H01L21/027
    • G03F7/7085G01J1/04G01J1/0407G01J1/0414G03F7/70558
    • A light detecting apparatus which can be arranged even in a light path having a relatively large converging angle and can highly accurately detect light that enters in a prescribed direction in the light path. The light detecting apparatus (10) detects the light that enters in the prescribed direction in the light path. The light detecting apparatus is provided with a light branching element (11) having two optical planes (11a, 11b) arranged in the light path, and a photoelectric detector (12) for photoelectrically detecting the light propagated inside the light branching element and extracted from a side plane (11c) of the light branching element. The light branching element has an incidence angle converting part (13) for converting a part of the light that entered one of the optical planes of the light branching element into light that enters the other optical plane at an incidence angle of a total reflection angle or more. ® KIPO & WIPO 2007
    • 光检测装置,即使在具有较大会聚角的光路中也能够配置,能够高精度地检测在光路中规定的方向进入的光。 光检测装置(10)检测在光路中沿规定方向进入的光。 光检测装置具有配置在光路中的具有两个光学平面(11a,11b)的光分支元件(11),以及光电检测器(12),用于光电检测在光分支元件内部传播的光并从 光分支元件的侧面(11c)。 光分支元件具有入射角转换部分(13),用于将进入光分支元件的一个光学平面的光的一部分转换成以全反射角度的入射角进入另一光学平面的光;或 更多。 ®KIPO&WIPO 2007
    • 39. 发明公开
    • 오류신호 보정기능을 가진 지능형 태양정밀추적 센서 모듈및 제어기
    • 用于更正传感器错误的智能信号跟踪传感器模块和校正错误信号的控制器
    • KR1020050020318A
    • 2005-03-04
    • KR1020030058152
    • 2003-08-22
    • 현웅근정영수
    • 현웅근정영수
    • G01J1/04
    • G01J1/4257G01J1/0414G01J2001/4266
    • PURPOSE: An intelligent sun tracking sensor module and controller for correcting error signals are provided to cope with sensor errors by dividing sensors into large range sensors and small range sensors. CONSTITUTION: An intelligent sun tracking sensor module and controller for correcting error signals includes a motor driving part(4), a large range sensor(1), a small range sensor(2), a blocking film(3) for tracking the large range sensor(1), and a sunbeam introduction tube(6). The small range sensor(2) includes an introduction tube(5) for tracking the small range sensor. The controller processes signals obtained from four large range sensors and four small range sensors. The motor driving part(4) rotates according to signals processed through the controller. A sensor modeling processor performs sampling for values of sensors normally operating in a sunbeam detection sensor.
    • 目的:提供用于校正误差信号的智能太阳跟踪传感器模块和控制器,通过将传感器分为大范围传感器和小范围传感器来应对传感器误差。 构成:用于校正误差信号的智能太阳跟踪传感器模块和控制器包括马达驱动部分(4),大范围传感器(1),小范围传感器(2),用于跟踪大范围的阻挡膜 传感器(1)和阳光引导管(6)。 小范围传感器(2)包括用于跟踪小范围传感器的导入管(5)。 控制器处理从四个大范围传感器和四个小范围传感器获得的信号。 电机驱动部件(4)根据通过控制器处理的信号进行旋转。 传感器建模处理器对通常在阳光检测传感器中工作的传感器的值进行采样。
    • 40. 发明公开
    • 광조사 장치
    • 光照射装置
    • KR1020020089162A
    • 2002-11-29
    • KR1020020027512
    • 2002-05-17
    • 우시오덴키 가부시키가이샤
    • 요네지마구니히로
    • G01J1/00
    • G01J4/02G01J1/0271G01J1/0414
    • PURPOSE: To irradiate an irradiation region with desired irradiance and desired illuminance distribution in a light irradiation device having a plurality of rod- shaped lamps. CONSTITUTION: In the light irradiation device 1 which irradiates the irradiation region set on a surface to be irradiated with light from a plurality of lamps L1 and L2 by overlapping with each other, the optical sensors S1 and S2 of the number corresponding to the number of lines of the lamps L1 and L2 are prepared and arranged so that only each optical sensor S1 and S2 is irradiated with the light of the corresponding lamps L1 and L2. Then, signals from the optical sensors S1 and S2 are inputted in a control part (not shown), and electric power to be supplied to the corresponding lamps from a lamp power source is controlled on the basis of the signal from each optical sensor S1 and S2 corresponding to each lamp L1 and L2.
    • 目的:在具有多个棒状灯的光照射装置中照射具有所需辐照度和期望照度分布的照射区域。 构成:在通过彼此重叠照射照射来自多个灯L1和L2的要照射的光的表面上的照射区域的光照射装置1中,光传感器S1和S2的数量对应于 准备并布置灯L1和L2的线,使得只有每个光学传感器S1和S2被相应的灯L1和L2的光照射。 然后,来自光学传感器S1和S2的信号被输入到控制部分(未示出)中,并且基于来自每个光学传感器S1的信号来控制从灯电源提供给相应的灯的电力,以及 S2对应于每个灯L1和L2。