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    • 2. 发明专利
    • Method for manufacturing vertical resonance type surface emission semiconductor laser
    • 制造垂直共振型表面发射半导体激光的方法
    • JP2010278347A
    • 2010-12-09
    • JP2009131015
    • 2009-05-29
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • SAGA NORIHIROONISHI YUTAKA
    • H01S5/183H01S5/327
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a vertical resonance type surface emission semiconductor laser for providing satisfactory emission characteristics without deteriorating characteristics of tunnel junction. SOLUTION: A first distribution bragg reflector 13 is manufactured on the main surface 11a of a semiconductor substrate 11. A first n-type spacer semiconductor layer 15, an active layer 17, and a p-type spacer layer 19 are grown on the first distribution bragg reflector (DBR) 13. Then, a raw material gas and a carbon dopant are supplied to a growth furnace 10, and a p-type high-concentration semiconductor layer 21 for tunnel unction is grown on the p-type spacer semiconductor layer 19. After a p-type high-concentration semiconductor layer 21 is grown, the heat treatment 25 of the p-type high-concentration semiconductor layer 21 is carried out. After the heat treatment 25 is carried out, the raw material gas and the n-type dopant is supplied to the growth furnace 10, and the n-type concentration semiconductor layer 27 for tunnel junction is grown. A heat treatment temperature T TH is within a range of 500 to 600°C. COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:提供一种制造垂直共振型面发射半导体激光器的方法,用于提供令人满意的发射特性,而不会恶化隧道结的特性。 解决方案:在半导体基板11的主表面11a上制造第一分布布拉格反射器13.第一n型间隔物半导体层15,有源层17和p型间隔层19生长在 第一分配布拉格反射器(DBR)13。然后,将原料气体和碳掺杂剂供给到生长炉10,并且在p型间隔物上生长用于隧道开放的p型高浓度半导体层21 半导体层19.在生长p型高浓度半导体层21之后,进行p型高浓度半导体层21的热处理25。 在进行热处理25之后,将原料气体和n型掺杂剂供给到生长炉10,生长隧道结的n型浓度半导体层27。 热处理温度T TH 在500〜600℃的范围内。 版权所有(C)2011,JPO&INPIT
    • 10. 发明专利
    • Semiconductor optical element, and method for forming contact
    • 半导体光学元件和形成接触的方法
    • JP2005129650A
    • 2005-05-19
    • JP2003362171
    • 2003-10-22
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • NAKAMURA TAKAOKATAYAMA KOJIMORI DAIKI
    • H01L33/06H01L33/28H01S5/327H01L33/00
    • H01L33/04B82Y20/00H01L33/28H01L2224/48463
    • PROBLEM TO BE SOLVED: To provide a semiconductor optical element having a contact which can reduce an uneven distribution of a current. SOLUTION: In the semiconductor optical element, a light emitting diode includes a quantum well contact semiconductor region 3, and metallic electrodes 5. The quantum well contact semiconductor region 3 is made of a II-VI semiconductor containing zinc, selenium and tellurium. The quantum well contact semiconductor region 3 has a II-VI semiconductor region 7 and a first II-VI semiconductor layer 9. The first II-VI semiconductor layer 9 is provided between the II-VI semiconductor region 7 and the metallic electrode 5. The metallic electrode 5 is provided on the quantum well contact semiconductor region 3. The metallic electrode 5 is electrically connected to the first II-VI semiconductor layer 9. In a preferred embodiment, the first II-VI semiconductor layer 9 is made of a ZnSe semiconductor. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供具有可以减少电流不均匀分布的接触的半导体光学元件。 解决方案:在半导体光学元件中,发光二极管包括量子阱接触半导体区域3和金属电极5.量子阱接触半导体区域3由含有锌,硒和碲的II-VI半导体制成 。 量子阱接触半导体区域3具有II-VI半导体区域7和第一II-VI半导体层9.第一II-VI半导体层9设置在II-VI半导体区域7和金属电极5之间。 金属电极5设置在量子阱接触半导体区域3上。金属电极5与第一II-VI半导体层9电连接。在优选实施例中,第一II-VI半导体层9由ZnSe半导体 。 版权所有(C)2005,JPO&NCIPI