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    • 4. 发明专利
    • Method for manufacturing magnetic recording medium
    • 制造磁记录介质的方法
    • JP2012014779A
    • 2012-01-19
    • JP2010149612
    • 2010-06-30
    • Ulvac Japan Ltd株式会社アルバック
    • KIKUCHI MAKOTOYAMAGUCHI NOBORUNISHIBASHI TSUTOMUSAKATA GENJI
    • G11B5/84C23C14/48C23C14/58C23C16/27G11B5/65G11B5/851H01F41/32
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording medium with which the shortening of processing time can be achieved without deteriorating the removal efficiency of a pattern mask.SOLUTION: In a method for manufacturing a magnetic recording medium according to one embodiment of the prevent invention, the temperature of a substrate 11 is increased to the temperature region of removal reaction of a resist pattern 13 during a step of ion injection for magnetically separating a magnetic layer 12. After ion injection, the temperature of the substrate is utilized, performing the ashing processing of the resist pattern 13. As a result, the time of processing for removing a resist pattern can be shortened without deteriorating the removal efficiency of a resist pattern.
    • 解决的问题:提供一种可以在不降低图案掩模的去除效率的情况下实现缩短处理时间的磁记录介质的制造方法。 解决方案:在根据本发明的一个实施方案的制造磁记录介质的方法中,基板11的温度在离子注入步骤期间增加到抗蚀剂图案13的去除反应的温度区域 磁分离磁性层12.离子注入后,利用基板的温度,进行抗蚀剂图案13的灰化处理。结果,可以缩短去除抗蚀剂图案的时间,而不会降低除去效率 的抗蚀剂图案。 版权所有(C)2012,JPO&INPIT
    • 6. 发明专利
    • Thin-film magnetic device and its fabrication process
    • 薄膜磁性器件及其制造工艺
    • JP2008192645A
    • 2008-08-21
    • JP2007022354
    • 2007-01-31
    • Tdk CorpTdk株式会社
    • MASAI MIGAKUHASHIMOTO RYUJI
    • H01F10/08H01F41/32
    • H01F41/0273H01F10/14H01F10/16H01F17/0006H01F38/023H01F41/045H01F41/046H01F2003/103H01F2017/0066H01L23/5227H01L2924/0002Y10T29/4902H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a thin-film magnetic device in which permeability can be enhanced easily in the high frequency region. SOLUTION: At least on the surface or the backside of a lower magnetic film 11 and an upper magnetic film 14, flaw-like grooves 16 and 17 are formed to extend along the extending direction of a coil 13 (e.g., the Y axis direction which is the extending direction of a second coil pattern). In the region for forming the flaw-like grooves 16 and 17 (the region for forming the lower magnetic films 11B, 11D and the upper magnetic films 14B, 14D), the direction of anisotropic magnetization Mb, Md is controlled and displacement (rotation) of the direction of anisotropic magnetization Mb, Md is pinned by means of the flaw-like grooves 16 and 17. Consequently, some permeability is sustained even in the high frequency region. Production process is not complicated by formation of such flaw-like grooves 16 and 17. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种能够在高频区域容易地提高磁导率的薄膜磁性装置。 解决方案:至少在下磁性膜11和上磁性膜14的表面或背面上,形成有沿着线圈13的延伸方向延伸的缺陷状凹槽16和17(例如,Y 轴方向是第二线圈图案的延伸方向)。 在用于形成缺陷槽16和17(用于形成下磁膜11B,11D和上磁性膜14B,14D的区域)中,各向异性磁化Mb,Md的方向被控制,位移(旋转) 通过各向异性磁化Mb的方向,Md通过缺陷状凹槽16和17被固定。因此,即使在高频区域中也可以维持一些磁导率。 生产过程并不复杂,因为形成这种缺陷状凹槽16和17。版权所有(C)2008,JPO&INPIT
    • 9. 发明专利
    • Manufacturing method of magnetic recording medium
    • 磁记录介质的制造方法
    • JP2005235357A
    • 2005-09-02
    • JP2004046926
    • 2004-02-23
    • Tdk CorpTdk株式会社
    • HATTORI KAZUHIROOKAWA SHUICHISUWA TAKAHIROHIBI MIKIHARU
    • G11B5/84G11B5/851G11B5/855H01F1/00H01F41/32
    • G11B5/855G11B5/851H01F41/32
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording medium by which a magnetic recording medium which has a recording layer formed with an irregular pattern, of which the surface is sufficiently flat and recording/reproducing accuracy is good can be manufactured efficiently.
      SOLUTION: This method comprises a non-magnetic material filling process (S104) in which a concave part of the irregular pattern is filled by film-forming a non-magnetic material on the recording layer formed on a substrate with the prescribed irregular pattern, and a flattening process (S106) in which surplus non-magnetic material on the recording layer is moved by dry etching and the surface is flattened, wherein process conditions are set so that an etching rate of the non-magnetic material for dry etching of the flattening process and an etching rate of the recording layer are made equal substantially.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供一种磁记录介质的制造方法,通过该磁记录介质具有形成有表面足够平坦且记录/再现精度良好的不规则图案的记录层的磁记录介质 有效地制造。 解决方案:该方法包括非磁性材料填充过程(S104),其中通过在形成在基板上的记录层上形成非磁性材料来填充不规则图案的凹部,其中规定的不规则 图案和平坦化处理(S106),其中记录层上的剩余非磁性材料通过干蚀刻移动并且表面变平,其中设置工艺条件使得用于干蚀刻的非磁性材料的蚀刻速率 的平坦化处理和记录层的蚀刻速率基本上相等。 版权所有(C)2005,JPO&NCIPI
    • 10. 发明专利
    • Manufacturing method of magnetic recording medium
    • 磁记录介质的制造方法
    • JP2005228363A
    • 2005-08-25
    • JP2004032856
    • 2004-02-10
    • Tdk CorpTdk株式会社
    • HATTORI KAZUHIROOKAWA SHUICHISUWA TAKAHIROHIBI MIKIHARU
    • G11B5/84G11B5/855H01F1/00H01F41/32
    • H01F41/32G11B5/855
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording medium by which the magnetic recording medium having a recording layer formed by using a projecting and recessed pattern and satisfactory recording/reproducing characteristics can be efficiently manufactured.
      SOLUTION: The manufacturing method of the magnetic recording medium includes a non-magnetic material filling step (S104) for film-depositing a non-magnetic material on the recording layer formed by using the prescribed projecting and recessed pattern on a substrate and filling recessed parts of the projecting and recessed pattern with the non-magnetic material; and a flattening step for removing the excess non-magnetic material on the recording layer by dry etching to flatten the surface thereof. The flattening step includes a pre-flattening step (S106) and a post-flattening step (S108) for finishing.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种磁记录介质的制造方法,通过该方法可以有效地制造具有通过使用突出凹陷图案形成的记录层和令人满意的记录/再现特性的磁记录介质。 解决方案:磁记录介质的制造方法包括:非磁性材料填充步骤(S104),用于在通过在基板上使用规定的突出和凹陷图案形成的记录层上非磁性材料成膜, 用非磁性材料填充凹凸图案的凹部; 以及通过干蚀刻去除记录层上的多余非磁性材料以使其表面变平的平整步骤。 平整步骤包括预平展步骤(S106)和用于精加工的后平展步骤(S108)。 版权所有(C)2005,JPO&NCIPI