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    • 10. 发明专利
    • Magnetic thin film and thin-film magnetic device
    • 磁薄膜和薄膜磁性器件
    • JP2009182168A
    • 2009-08-13
    • JP2008020193
    • 2008-01-31
    • Tdk CorpTdk株式会社
    • MASAI MIGAKU
    • H01F10/13
    • H01F10/132H01F10/138H01F10/14H01F10/265H01F17/0006H01F41/042H01F41/046Y10T428/2495
    • PROBLEM TO BE SOLVED: To provide a magnetic thin film that more effectively improves magnetic permeability in a soft magnetic thin film. SOLUTION: On a Co amorphous soft magnetic film 121 which is a soft magnetic film having magnetic permeability higher than that of a Fe soft magnetic film 122, the Fe soft magnetic film 122 is formed, which facilitates magnetization reversal in the Fe system soft magnetic film 122 and increases magnetic permeability of a magnetic thin film (a lower magnetic film 12A and upper magnetic film 12B) as a whole. A ratio of film thickness between the Co amorphous soft magnetic film 121 and the Fe soft magnetic film 122 is set in a suitable range (≥0.005 and ≤0.030), thereby decreasing the impact of stress from the Co amorphous soft magnetic film 121 to the Fe soft magnetic film 122 and suppressing the reduction of magnetic permeability of the magnetic thin film as a whole under impact of stress. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种更有效地提高软磁性薄膜的磁导率的磁性薄膜。 解决方案:在具有比Fe软磁膜122的磁导率高的软磁性膜的Co非晶软磁膜121上形成Fe软磁膜122,这有助于Fe系统中的磁化反转 软磁膜122,并且整体上增加磁性薄膜(下部磁性膜12A和上部磁性膜12B)的磁导率。 Co非晶软磁性膜121与Fe软磁性膜122之间的膜厚比设定在适当的范围(≥0.005以上且≤0.030以下),能够降低Co非晶磁性体膜121的应力对 Fe软磁性膜122,并且在应力冲击下整体上抑制磁性薄膜的磁导率的降低。 版权所有(C)2009,JPO&INPIT