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    • 6. 发明专利
    • Multi-stage dry pump
    • 多级干泵
    • JP2004293377A
    • 2004-10-21
    • JP2003085207
    • 2003-03-26
    • Aisin Seiki Co Ltdアイシン精機株式会社
    • NAITO YOSHIHIRO
    • F04C27/00F04C18/12F04C23/00F04C25/02
    • F04C18/126F04C23/001F04C2220/10
    • PROBLEM TO BE SOLVED: To provide a multi-stage dry pump which has a compact structure and prevents entry of process gas to a bearing side.
      SOLUTION: The multi-stage dry pump has a housing 2 equipped with a plurality of pump chambers 8, 9, 10, 11, two pieces of rotating shafts 16, 16' attached to rotors 12, 13, 14, 15 mutually rotating in the reverse direction in respective pump chambers 8, 9, 10, 11, a pair of bearings 24, 24' for supporting the rotating shafts 16, 16' attached to the housing 2. At least one impeller wheel including chamber 29, 29' is formed between the pump chamber 8, 8' and the bearings 24, 24'. At least one impeller wheel 26, 26' attached to the rotating shafts 16, 16' are provided so that surfaces on both sides pass through the fine clearance between inside walls 30, 30', 31, 31' of the impeller wheel including chamber.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供具有紧凑结构并防止工艺气体进入轴承侧的多级干式泵。 解决方案:多级干式泵具有壳体2,壳体2配备有多个泵室8,9,10,11,两个相互连接在转子12,13,14,15上的转动轴16,16' 在相应的泵室8,9,10,11中沿相反方向旋转一对轴承24,24',用于支撑附接到壳体2的旋转轴16,16'。至少一个叶轮,包括腔室29,29 “形成在泵室8,8'和轴承24,24'之间。 设置至少一个附接到旋转轴16,16'的叶轮26,26',使得两侧的表面通过包括腔室的叶轮的内壁30,30',31“,31”之间的微小间隙。 版权所有(C)2005,JPO&NCIPI