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    • 7. 发明专利
    • Tool exchange system
    • 工具交换系统
    • JP2010012522A
    • 2010-01-21
    • JP2008171919
    • 2008-07-01
    • Matsuura Machinery Corp株式会社松浦機械製作所
    • AMAYA KOICHIYAMAGUCHI HIROYUKIARAKAWA YASUSHISHINTANI ARIHIRO
    • B23Q3/155B23Q3/157
    • B23Q3/1552B23Q3/15503Y10T483/12Y10T483/175Y10T483/1767Y10T483/1786Y10T483/1845
    • PROBLEM TO BE SOLVED: To provide a structure of a tool exchange system capable of preventing waiting time from occurring as much as possible in an arrangement of an intermediate magazine of a smaller capacity than conventional technology. SOLUTION: A program relating to the order of activation of tools 7 to be activated and their operating time is set in the tool exchange system. When the operating time of an individual tool 7 is shorter than conveyance time by reciprocation of a tool conveyor 3 between a tool magazine 1 and a tool exchange arm 4, at least a part of tools 7 expected to activate in a subsequent step to the tool 7 (referred to as "a tool requiring waiting time") can be arranged on an intermediate magazine 5, and thereafter it can be transferred to the tool exchange arm 4. Thus, the tool exchange system can solve the problem. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种能够在比常规技术更小容量的中间料斗的布置中尽可能多地防止等待时间发生的工具更换系统的结构。

      解决方案:在工具交换系统中设置与激活工具7的激活顺序及其操作时间有关的程序。 当单个工具7的工作时间通过工具传送带3在工具仓1和工具更换臂4之间的往复运动而比传送时间短时,工具7的至少一部分预期在后续步骤中激活到工具 7(称为“需要等待时间的工具”)可以布置在中间仓5上,然后可以传送到工具更换臂4.因此,工具更换系统可以解决问题。 版权所有(C)2010,JPO&INPIT

    • 8. 发明专利
    • Exchanging method and program for processing apparatus in processor
    • 处理器处理装置的交换方法和程序
    • JP2007208182A
    • 2007-08-16
    • JP2006028379
    • 2006-02-06
    • Tokyo Electron Ltd東京エレクトロン株式会社
    • TAJIRI NAOYUKISUZUKI AKIFUMIHONMA DAISUKE
    • H01L21/027H01L21/02
    • H01L21/67276Y10S414/135Y10T29/4973Y10T483/10Y10T483/11Y10T483/115Y10T483/12Y10T483/14
    • PROBLEM TO BE SOLVED: To provide the exchanging method and program of a processing apparatus for exchanging a processing apparatus to be provided for processing while continuing the processing of a processing unit having a processing apparatus other than the object of exchange. SOLUTION: This method for exchanging a processing cup in a processor for carrying an object to be processed in a processing unit by a conveyance means, and for operating processing to the object be processed in such a status that it can be surrounded by the processing cup as the processing apparatus includes a step S104 for confirming that the processing of the object to be processed has ended by the object processing unit as the object of cup exchange, a step S105 for notifying an operator that a processing apparatus exchanging operation becomes startable and a step S107 for releasing the operation inhibiting status of the conveying means which rushes according as the shutter of the object processing unit as the object of cup exchange is closed for performing the cup exchanging operation, and for validating a carriage-in and out operation to another processing unit which is not the object of exchange. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种用于交换处理装置的交换方法和程序,该处理装置用于交换处理装置,同时继续具有除了交换对象之外的处理装置的处理单元的处理。 解决方案:用于在处理器中交换处理杯的方法,用于通过传送装置在处理单元中传送要处理的物体,并且用于对物体进行操作处理,处理状态为可以被包围的状态 作为处理装置的处理杯包括:步骤S104,用于通过作为杯子交换对象的对象处理单元确认被处理对象的处理结束;步骤S105,用于通知操作者处理装置交换操作变为 并且执行步骤S107,用于释放作为杯形交换对象的作为对象处理单元的快门而冲出的输送装置的操作禁止状态,以进行杯子更换操作,并且用于验证进出口 操作到不是交换对象的另一个处理单元。 版权所有(C)2007,JPO&INPIT