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JP2007208182A Exchanging method and program for processing apparatus in processor 有权
标题翻译：处理器处理装置的交换方法和程序
公开(公告)号：JP2007208182A
公开(公告)日：2007-08-16
申请号：JP2006028379
申请日：2006-02-06
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社
发明人： TAJIRI NAOYUKI , SUZUKI AKIFUMI , HONMA DAISUKE
IPC分类号： H01L21/027 , H01L21/02
CPC分类号： H01L21/67276 , Y10S414/135 , Y10T29/4973 , Y10T483/10 , Y10T483/11 , Y10T483/115 , Y10T483/12 , Y10T483/14
摘要： PROBLEM TO BE SOLVED: To provide the exchanging method and program of a processing apparatus for exchanging a processing apparatus to be provided for processing while continuing the processing of a processing unit having a processing apparatus other than the object of exchange. SOLUTION: This method for exchanging a processing cup in a processor for carrying an object to be processed in a processing unit by a conveyance means, and for operating processing to the object be processed in such a status that it can be surrounded by the processing cup as the processing apparatus includes a step S104 for confirming that the processing of the object to be processed has ended by the object processing unit as the object of cup exchange, a step S105 for notifying an operator that a processing apparatus exchanging operation becomes startable and a step S107 for releasing the operation inhibiting status of the conveying means which rushes according as the shutter of the object processing unit as the object of cup exchange is closed for performing the cup exchanging operation, and for validating a carriage-in and out operation to another processing unit which is not the object of exchange. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于交换处理装置的交换方法和程序，该处理装置用于交换处理装置，同时继续具有除了交换对象之外的处理装置的处理单元的处理。解决方案：用于在处理器中交换处理杯的方法，用于通过传送装置在处理单元中传送要处理的物体，并且用于对物体进行操作处理，处理状态为可以被包围的状态作为处理装置的处理杯包括：步骤S104，用于通过作为杯子交换对象的对象处理单元确认被处理对象的处理结束;步骤S105，用于通知操作者处理装置交换操作变为并且执行步骤S107，用于释放作为杯形交换对象的作为对象处理单元的快门而冲出的输送装置的操作禁止状态，以进行杯子更换操作，并且用于验证进出口操作到不是交换对象的另一个处理单元。版权所有（C）2007，JPO＆INPIT

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