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    • 3. 发明专利
    • Optical element and light spot position adjustment method
    • 光学元件和光点位置调整方法
    • JP2006107584A
    • 2006-04-20
    • JP2004290705
    • 2004-10-01
    • Konica Minolta Opto Incコニカミノルタオプト株式会社
    • OKITSU MASAHIROOGURA KAZUYUKIKONNO KENJIHATANO HIROSHI
    • G11B7/135G11B7/22
    • G11B7/1374G11B7/08505G11B7/1387Y10S977/862
    • PROBLEM TO BE SOLVED: To provide an optical element for generating near-field light and its light spot position adjustment method capable of accurately detecting the positions of the fine structures formed on a thin metal film provided on a light condensing surface. SOLUTION: This is an optical element to condense the incident light and to generate near-field light smaller than the condensed light spot B near the condensing area. Thin metal films 74 are formed on the light condensing surface of the optical element, and apertures (fine structure patterns) 71 are formed in a matrix for generating the near-field light on the metal films 74. A position detecting pattern 73 for the apertures 71 is formed at the position separating the apertures 71. By scanning in the X and Y directions with an optical beam, the positions of the apertures 71 are found by detecting the reflected return light. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种用于产生近场光的光学元件及其光点位置调整方法,其能够精确地检测形成在设置在聚光表面上的薄金属膜上的微细结构的位置。

      解决方案:这是一种用于冷凝入射光并产生比凝结区域附近的聚光点B小的近场光的光学元件。 薄金属膜74形成在光学元件的聚光表面上,并且孔(精细结构图案)71形成为矩阵,用于在金属膜74上产生近场光。用于孔的位置检测图案73 71形成在分离孔71的位置。通过用光束在X和Y方向扫描,通过检测反射的返回光来找到孔71的位置。 版权所有(C)2006,JPO&NCIPI