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    • 5. 发明专利
    • Method of manufacturing electronic device
    • 制造电子器件的方法
    • JP2011187534A
    • 2011-09-22
    • JP2010048853
    • 2010-03-05
    • Seiko Epson Corpセイコーエプソン株式会社
    • KAMAKURA TOMOYUKIMOMOSE KAORU
    • H01L21/60H01L23/52
    • H01L24/82H01L24/76H01L2224/24H01L2224/24226H01L2224/24998H01L2224/25H01L2224/32225H01L2224/73267H01L2224/82007H01L2924/01005H01L2924/01006H01L2924/01013H01L2924/01029H01L2924/01033H01L2924/01047H01L2924/01079H01L2924/00H01L2924/00012
    • PROBLEM TO BE SOLVED: To reduce connection resistance when connection wiring is formed on a connection pad made of Al by a droplet discharging method.
      SOLUTION: A method of manufacturing an electronic device performs, in order: a first process of arranging an electronic element 10, having the connection pad 20 made of a conductive material formed on a first surface 11 so that at least a part of the surface is exposed, on a wiring board 30 having a wiring pattern 32 on at least one surface so that a second surface 12 as the surface on the opposite side from the first surface 11 faces the one surface; a second process of arranging an oxide removing liquid 48 with which an oxide of the conductive material can be etched on a surface of the connection pad 20; a third process of arranging, after the oxide removing liquid 48 is dried, a liquid body 47 including metal particulates on the surface of the connection pad 20 and the wiring pattern 32, and between the connection pad 20 and wiring pattern 32; and a fourth process of forming connection wiring 35 connecting the connection pad 20 and wiring pattern 32 to each other by heating the liquid body 47 to bake the metal particulates.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了减少当通过液滴喷射方法在由Al制成的连接垫上形成连接布线时的连接电阻。 解决方案:电子设备的制造方法按顺序执行:布置电子元件10的第一工序,其具有形成在第一表面11上的由导电材料制成的连接焊盘20,使得至少部分 表面在至少一个表面上具有布线图案32的布线板30上露出,使得作为与第一表面11相反一侧的表面的第二表面12面向该表面; 布置氧化物去除液体48的第二工序,可以在连接焊盘20的表面上蚀刻导电材料的氧化物; 在氧化物去除液48干燥之后,在连接焊盘20的表面和布线图案32之间以及连接焊盘20和布线图案32之间布置包括金属微粒的液体47的第三工序; 以及通过加热液体47以形成金属微粒而形成将连接焊盘20和布线图案32相互连接的连接布线35的第四工序。 版权所有(C)2011,JPO&INPIT