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    • 9. 发明专利
    • Group ii-iv compound semiconductor device
    • 组II-IV化合物半导体器件
    • JPS60211851A
    • 1985-10-24
    • JP6801784
    • 1984-04-05
    • Nec Corp
    • MATSUMOTO TAKU
    • H01L21/365H01L31/04H01L33/16H01L33/28
    • H01L21/02409H01L21/02477H01L21/0251H01L21/02562H01L21/02579H01L21/0262Y02E10/543
    • PURPOSE:To obtain excellent hetero-interface and P-N junction by forming an N type grated epitaxial layer, a lattice constant thereof changes continuously or by stages, on a CdSe substrate having wurtz structure and growing P type ZnTe having Wurtz structure on the grated epitaxial layer in an epitaxial manner. CONSTITUTION:The decomposition of a CdSe substrate 6 is prevented while H2Se is fed during a temperature rise, a temperature reaches to a set temperature, and Cd(CH3)2 and H2Se are fed to grow a CdSe layer 7 in approximately 0.2mum. The molar fractions of Cd(CH3)2 and Zn(C2H5)2 are changed, and continuous grated epitaxial growth in approximately 3mum thickness is executed. The final mixed crystal composition of a grated epitaxial layer 8 at that time is represented by ZnxCd1-xSe(X=0.098). A ZnxCd1-xSe(X=0.098) layer 9 having a constant composition is grown in approximately 1mum, a gas composition is changed over to Zn(C2H5)2 and Te(CH3)2, and a ZnTe epitaxial layer 10 is grown in approximately 2mum. The ZeTe epitaxial layer 10 acquired through the method has excellent mirror surface properties, and displays wurtzite type crystallographic structure, and a conduction mechanism takes a P type conduction. The ZnxCd1-xSe(0
    • 目的:为了通过形成N型烧结外延层获得优异的异质界面和PN结,其晶格常数连续或逐步地在具有wurtz结构的CdSe衬底上变化,并且在烧结外延层上生长具有Wurtz结构的P型ZnTe 以外延方式。 构成:在温度升高,温度达到设定温度的同时,在供给H2Se的同时,防止CdSe基板6的分解,并且供给Cd(CH 3)2和H 2 Se,生长约0.2μm的CdSe层7。 改变Cd(CH 3)2和Zn(C 2 H 5)2的摩尔分数,并且执行约3μm厚度的连续研磨外延生长。 此时的格栅外延层8的最终混合晶体组成由Zn xCd 1-x Se(X = 0.098)表示。 将具有恒定组成的Zn xCd 1-x Se(X = 0.098)层9生长在约1μm,将气体组成转变为Zn(C 2 H 5)2和Te(CH 3)2,并且ZnTe外延层10生长在大约 2mum 通过该方法获得的ZeTe外延层10具有优异的镜面性质,并且显示纤锌矿型晶体结构,并且导电机制采用P型导电。 Zn xCd1-xSe(0 <= x <= 0.098)格栅外延层8显示N型导通,并且形成优异的P-N结。
    • 10. 发明专利
    • Liquid phase epitaxial growth device
    • 液相外延生长装置
    • JPS5921029A
    • 1984-02-02
    • JP13140182
    • 1982-07-27
    • Fujitsu Ltd
    • MARUYAMA KENJIITOU MICHIHARUUEDA TOMOSHIYOSHIKAWA MITSUO
    • H01L21/208H01L21/368
    • H01L21/02625H01L21/02411H01L21/02562
    • PURPOSE:To bring a substrate into contact with a melted liquid, and to form an epitaxial layer onto the substrate by each forming indentations at positions displaced from diametral lines on mutually opposite surfaces in a heat-resisting sealed tube and turning the sealed tube under the state in which the substrate, crystals thereof must be grown, is held between the indentations. CONSTITUTION:The device is constituted by a pair of opposite support members 11 made of columnar carbon, and the recessed grooves 13 which can hold and support the substrate 12 in CdTe at the positions displaced from the diametral lines are formed onto the opposite surfaces of the support members. An alloy 15 of Hg, Cd and Te as a material for a crystal layer, which must be formed onto the substrate 12, is filled under the substrate 12 in CdTe while being inserted into a small tube 14 in quartz. The inside is exhausted, and an end section D is welded to seal the tube. The reaction tube is heated to melt the material of Hg1-xCdxTe. The sealed tube is rotated in a 180 deg. arc, the specular- polished surface E of the substrate 12 is brought into contact with a liquid phase of Hg1-xCdxTe, the temperature of a heating furnace is dropped, and the epitaxial layer in Hg1-xCdxTe is formed onto the substrate 12.
    • 目的:使基材与熔融液体接触,并通过在耐热密封管中的彼此相对的表面上从径向线偏离的位置上形成凹陷而在基板上形成外延层,并将密封管转动在 其中必须生长底物的晶体的状态保持在凹陷之间。 构成:该装置由一对由柱状碳构成的相对的支撑构件11构成,并且能够在从直径线偏离的位置处将基板12保持并支撑在CdTe中的凹槽13形成在 支持会员 必须形成在基板12上的作为用于晶体层的材料的Hg,Cd和Te的合金15被填充在CdTe的基板12的下方,同时插入到石英的小管14中。 内部被耗尽,并且端部D被焊接以密封管。 将反应管加热以熔化Hg1-xCdxTe的材料。 密封管在180度旋转。 使基板12的镜面抛光面E与Hg1-xCdxTe的液相接触,加热炉的温度下降,在基板12上形成Hg1-xCdxTe的外延层。