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    • 8. 发明专利
    • Magnesium zinc oxide film and production method therefor
    • 氧化镁氧化镁膜及其生产方法
    • JP2013093484A
    • 2013-05-16
    • JP2011235630
    • 2011-10-27
    • Toyota Motor Corpトヨタ自動車株式会社
    • MAEKAWA RYOSUKEAWANO HIROMOTOMATSUNAGA TOMOYATAKEDA YUICHIROSAKAI TAKENOBU
    • H01L21/368H01L31/04
    • H01L31/18C23C18/1216C23C18/1245C23C18/1283H01L21/02422H01L21/02425H01L21/02554H01L21/02565H01L21/02628H01L31/0256H01L31/1832Y02E10/541Y02P70/521
    • PROBLEM TO BE SOLVED: To provide a production method of a ZnMgO film in which addition of Mg for Zn can be 30 mol% or more.SOLUTION: A production method of a ZnMgO film includes: an adjusting step for adjusting the pH of aqueous ammonia solution in a region between a line α and a line β and adjusting the zinc ion concentration and the magnesium ion concentration in the aqueous ammonia solution, by dissolving a Zn material and an Mg material into an aqueous ammonia solution where the line α defining the precipitation region of Zn(OH)and the region ZnOmay be present is located closer to the low pH side than the line β defining the region magnesium ion may be present and the precipitation region of Mg(OH), in an aqueous solution state diagram where the ordinate represents zinc ion concentration and magnesium ion concentration and the abscissa represents pH; a heating step for raising the temperature of the aqueous ammonia solution to the precipitation temperature of Zn(OH)and Mg(OH)after the adjusting step; and a calcination step for calcining the precipitates after the heating step.
    • 待解决的问题:提供ZnMgO膜的制造方法,其中Zn的添加量可以为30摩尔%以上。 解决方案:ZnMgO膜的制备方法包括:调节在线α和线β之间的区域中的氨水溶液的pH值并调节锌离子浓度和水溶液中的镁离子浓度的调节步骤 氨溶液,通过将Zn材料和Mg材料溶解到氨水溶液中,其中定义Zn(OH) 2 的沉淀区的线α和区域ZnO 2 2 - 可能存在位于比限定可能存在的区域镁离子的线β更靠近低pH侧,并且析出 在水溶液状态图中,纵坐标表示锌离子浓度和镁离子浓度,横坐标表示pH; Mg(OH) 2 将氨水溶液的温度升高至Zn(OH) 2 和Mg(OH) 2的沉淀温度的加热步骤, SB>调整步骤后; 和煅烧步骤,用于在加热步骤之后煅烧沉淀物。 版权所有(C)2013,JPO&INPIT