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1. 发明专利

JP2013237885A Plasma film-forming apparatus 有权
标题翻译：等离子体成膜装置
公开(公告)号：JP2013237885A
公开(公告)日：2013-11-28
申请号：JP2012110380
申请日：2012-05-14
申请人： Toyota Motor Corp , トヨタ自動車株式会社 , Komiyama Electron Co Ltd , コミヤマエレクトロン株式会社
发明人： IIZUKA KAZUTAKA , WATANABE KAZUHIRO , WATANABE SHINGO , TANAKA MASAHIKO
IPC分类号： C23C16/44 , H01M8/02
CPC分类号： Y02E60/50
摘要： PROBLEM TO BE SOLVED: To provide a technology for downsizing a mechanism for a substrate delivery step by improving efficiency of the substrate delivery step in a plasma film-forming apparatus.SOLUTION: A plasma film-forming apparatus 300 is equipped with first and second film-forming treatment systems 301 and 302 that alternately perform a film-forming treatment. The first and second film-forming treatment systems 301 and 302 are each equipped with a delivery mechanism 310, a vacuum spare chamber 320 and a film-forming chamber 330. The delivery mechanism 310 is equipped with a cylinder shaft 311 having a tip to which a substrate-holding part 325 for holding a substrate 5 is connected. In the plasma film-forming apparatus 300, the substrate-holding part 325 on which the substrate 5 is placed is delivered from the vacuum spare chamber 320 to the film-forming chamber 330 by linearly sliding the cylinder shaft 311 with a gate valve 322 being opened. The cylinder shaft 311 has a valve body 324 attached thereto, wherein the valve body 324 blocks an inlet of the film-forming chamber 330 when the substrate-holding part 325 is housed in the film-forming chamber 330.
摘要翻译：要解决的问题：提供一种通过提高等离子体成膜装置中的基板输送步骤的效率来减小基板输送步骤的机构的技术。解决方案：等离子体成膜装置300配备有第一和第二膜交替进行成膜处理的处理系统301和302。第一和第二成膜处理系统301和302分别配备有输送机构310，真空备用室320和成膜室330.输送机构310配备有具有尖端的圆筒轴311，连接用于保持基板5的基板保持部325。在等离子体膜形成装置300中，将基板5放置在其上的基板保持部325通过使闸阀322直线滑动而从真空备用室320被输送到成膜室330 开了气缸轴311具有附接到其上的阀体324，其中当基板保持部325容纳在成膜室330中时，阀体324阻挡成膜室330的入口。

2. 发明专利

JP2012218144A Conveyance system 审中-公开
标题翻译：输送系统
公开(公告)号：JP2012218144A
公开(公告)日：2012-11-12
申请号：JP2011100118
申请日：2011-04-11
申请人： Komiyama Electron Co Ltd , コミヤマエレクトロン株式会社
发明人： WATANABE SHINGO , TANAKA MASAHIKO
IPC分类号： B25J9/00 , B65G49/06 , H01L21/677
摘要： PROBLEM TO BE SOLVED: To provide a conveyance system that conveys a heavy weight for a long distance.SOLUTION: In a conveyance system 10, a first arm 12 is linked to a first joint 24 so that the first arm 12 rotates about the first joint 24, and a second arm 14 is linked to a second joint 26 so that the second arm 14 rotates at a speed twice that of the first arm 12 about the second joint 26. A linking member 30 fixes a third arm 16 to the second arm 14. A first stage 18 is linked to the linking member 30 so that the first stage 18 moves along a direction L in which the linking member 30 moves when the first arm 12 rotates about the first joint 24. A second stage 20 is linked to a third joint 40 so that the second stage 20 moves along the direction L when the first arm 12 rotates about the first joint 24.
摘要翻译：要解决的问题：提供长距离传送重物的输送系统。解决方案：在输送系统10中，第一臂12连接到第一接头24，使得第一臂12围绕第一接头24旋转，并且第二臂14连接到第二接头26，使得第二臂14围绕第二关节26以第一臂12的速度旋转两倍。连接构件30将第三臂16固定到第二臂14.第一台18连接到连接构件30，使得第一臂当第一臂12围绕第一关节24旋转时，台架18沿着连接构件30移动的方向L移动。第二阶段20连接到第三关节40，使得第二阶段20沿着方向L移动，当第一臂12围绕第一关节24旋转。版权所有（C）2013，JPO＆INPIT

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