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    • 1. 发明专利
    • Plasma film-forming apparatus
    • 等离子体成膜装置
    • JP2013237885A
    • 2013-11-28
    • JP2012110380
    • 2012-05-14
    • Toyota Motor Corpトヨタ自動車株式会社Komiyama Electron Co Ltdコミヤマエレクトロン株式会社
    • IIZUKA KAZUTAKAWATANABE KAZUHIROWATANABE SHINGOTANAKA MASAHIKO
    • C23C16/44H01M8/02
    • Y02E60/50
    • PROBLEM TO BE SOLVED: To provide a technology for downsizing a mechanism for a substrate delivery step by improving efficiency of the substrate delivery step in a plasma film-forming apparatus.SOLUTION: A plasma film-forming apparatus 300 is equipped with first and second film-forming treatment systems 301 and 302 that alternately perform a film-forming treatment. The first and second film-forming treatment systems 301 and 302 are each equipped with a delivery mechanism 310, a vacuum spare chamber 320 and a film-forming chamber 330. The delivery mechanism 310 is equipped with a cylinder shaft 311 having a tip to which a substrate-holding part 325 for holding a substrate 5 is connected. In the plasma film-forming apparatus 300, the substrate-holding part 325 on which the substrate 5 is placed is delivered from the vacuum spare chamber 320 to the film-forming chamber 330 by linearly sliding the cylinder shaft 311 with a gate valve 322 being opened. The cylinder shaft 311 has a valve body 324 attached thereto, wherein the valve body 324 blocks an inlet of the film-forming chamber 330 when the substrate-holding part 325 is housed in the film-forming chamber 330.
    • 要解决的问题:提供一种通过提高等离子体成膜装置中的基板输送步骤的效率来减小基板输送步骤的机构的技术。解决方案:等离子体成膜装置300配备有第一和第二膜 交替进行成膜处理的处理系统301和302。 第一和第二成膜处理系统301和302分别配备有输送机构310,真空备用室320和成膜室330.输送机构310配备有具有尖端的圆筒轴311, 连接用于保持基板5的基板保持部325。 在等离子体膜形成装置300中,将基板5放置在其上的基板保持部325通过使闸阀322直线滑动而从真空备用室320被输送到成膜室330 开了 气缸轴311具有附接到其上的阀体324,其中当基板保持部325容纳在成膜室330中时,阀体324阻挡成膜室330的入口。
    • 3. 发明专利
    • Biologic improvement gas and feed unit for the same
    • 生物改良气体和饲料单位
    • JP2009280414A
    • 2009-12-03
    • JP2008130945
    • 2008-05-19
    • Fine Energy KkKomiyama Electron Co Ltdコミヤマエレクトロン株式会社ファインエナジー株式会社
    • WATANABE AKIOKASUYA YASUONAGATANI NORITOSHI
    • C01B3/00A61K33/00C25B9/00
    • Y02E60/324
    • PROBLEM TO BE SOLVED: To provide a biologic improvement gas which improves biologic functions and its feed unit.
      SOLUTION: The biologic improvement gas is a mixed gas of hydrogen, oxygen and air, in which the percentage of hydrogen is confined to about 5% of the entire gas. The biologic improvement gas feed unit 1 includes: a primary mixed gas producer 11 which produces a mixed gas of hydrogen and oxygen by electrolysis of water; a secondary mixed gas producer 12 which produces a mixed gas in which the percentage of hydrogen is about 5% of the entire gas (biologic improvement gas) by mixing the mixed gas of hydrogen and oxygen produced in the producer 11 with air introduced from the surrounding air; and a gas feed member 8 for feeding the biologic improvement gas to a living body.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供改善生物功能的生物改良气体及其饲料单元。 解决方案:生物改良气体是氢,氧气和空气的混合气体,其中氢气的百分比限制在整个气体的约5%。 生物改良气体供给单元1包括:初级混合气体生成器11,其通过电解电解产生氢和氧的混合气体; 二次混合气体生产器12,其通过将在生产者11中产生的氢气和氧气的混合气体与从周围引入的空气混合而产生氢气的百分比为全部气体的约5%的混合气体(生物改良气体) 空气; 以及用于将生物改良气体供给到生物体的气体供给部件8。 版权所有(C)2010,JPO&INPIT
    • 4. 发明专利
    • Waste disposal method and device
    • 废物处理方法和装置
    • JP2009174740A
    • 2009-08-06
    • JP2008011677
    • 2008-01-22
    • Fine Energy KkKomiyama Electron Co Ltdコミヤマエレクトロン株式会社ファインエナジー株式会社
    • HASHIGUCHI HARUO
    • F23G7/06
    • PROBLEM TO BE SOLVED: To thermally decompose an exhaust gas and other waste by a new combustion style to render them harmless.
      SOLUTION: In this method, the combustion flame 1 is composed of a mixture gas 2 of a hydrogen gas and an oxygen gas generated by the electrolysis of water, and the exhaust gas 3 is introduced into the combustion flame 1 from a tip nozzle 20 of the combustion flame 1 by utilizing a phenomenon that the combustion gas 1 is burnt and contracted to be burned so that the combustion gas 3 is included in the combustion flame 1. To execute this method, the device comprises a combustion flame forming nozzle 21 for feeding the mixture gas 2 and forming the combustion flame 1 at the tip nozzle 20, and an exhaust gas introduction nozzle 31 connected with the tip nozzle 20 of the combustion flame forming nozzle 21 and introducing the exhaust gas 3 to the inside of the combustion flame 1 from the tip nozzle 20.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:通过新的燃烧方式对废气和其他废物进行热分解,使其无害化。 解决方案:在该方法中,燃烧火焰1由氢气和通过电解水产生的氧气的混合气体2组成,并且废气3从尖端引入燃烧火焰1 通过利用燃烧气体1燃烧和收缩以燃烧的现象,使得燃烧气体3被包括在燃烧火焰1中,从而燃烧火焰1的喷嘴20。为了执行该方法,该装置包括燃烧火焰形成喷嘴 21,供给混合气体2并在尖端喷嘴20形成燃烧火焰1,和与燃烧火焰形成喷嘴21的前端喷嘴20连接的排气导入喷嘴31,将排气3导入到 来自尖端喷嘴20的燃烧火焰1.版权所有(C)2009,JPO&INPIT
    • 5. 发明专利
    • Conveyance system
    • 输送系统
    • JP2012218144A
    • 2012-11-12
    • JP2011100118
    • 2011-04-11
    • Komiyama Electron Co Ltdコミヤマエレクトロン株式会社
    • WATANABE SHINGOTANAKA MASAHIKO
    • B25J9/00B65G49/06H01L21/677
    • PROBLEM TO BE SOLVED: To provide a conveyance system that conveys a heavy weight for a long distance.SOLUTION: In a conveyance system 10, a first arm 12 is linked to a first joint 24 so that the first arm 12 rotates about the first joint 24, and a second arm 14 is linked to a second joint 26 so that the second arm 14 rotates at a speed twice that of the first arm 12 about the second joint 26. A linking member 30 fixes a third arm 16 to the second arm 14. A first stage 18 is linked to the linking member 30 so that the first stage 18 moves along a direction L in which the linking member 30 moves when the first arm 12 rotates about the first joint 24. A second stage 20 is linked to a third joint 40 so that the second stage 20 moves along the direction L when the first arm 12 rotates about the first joint 24.
    • 要解决的问题:提供长距离传送重物的输送系统。 解决方案:在输送系统10中,第一臂12连接到第一接头24,使得第一臂12围绕第一接头24旋转,并且第二臂14连接到第二接头26,使得 第二臂14围绕第二关节26以第一臂12的速度旋转两倍。连接构件30将第三臂16固定到第二臂14.第一台18连接到连接构件30,使得第一臂 当第一臂12围绕第一关节24旋转时,台架18沿着连接构件30移动的方向L移动。第二阶段20连接到第三关节40,使得第二阶段20沿着方向L移动,当 第一臂12围绕第一关节24旋转。版权所有(C)2013,JPO&INPIT