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1. 发明专利

JP2014078304A Magnetic recording medium, manufacturing method of magnetic recording medium, and magnetic recording/reproducing device 有权
标题翻译：磁记录介质，磁记录介质的制造方法和磁记录/再现装置
公开(公告)号：JP2014078304A
公开(公告)日：2014-05-01
申请号：JP2012226345
申请日：2012-10-11
申请人： Showa Denko Kk , 昭和電工株式会社 , Toshiba Corp , 株式会社東芝 , Tohoku Univ , 国立大学法人東北大学
发明人： SHIBATA HISATO , INOUE TAKESHI , OKADA TSUBASA , KUROKAWA GOHEI , SAITO SHIN , HYUGA SHINTARO , TAKAHASHI KEN , MAEDA TOMOYUKI , ISOWAKI YOSUKE , KIKITSU SATORU
IPC分类号： G11B5/738 , G11B5/02 , G11B5/64 , G11B5/65 , G11B5/84 , G11B5/851
CPC分类号： G11B5/738 , G11B5/7325 , G11B5/84
摘要： PROBLEM TO BE SOLVED: To provide a magnetic recording medium capable of achieving high density recording.SOLUTION: In a magnetic recording medium 50, at least an orientation control layer 9 for controlling an orientation of an immediate above layer, and a perpendicular magnetic layer 4 whose axis of easy magnetization is oriented mainly perpendicular to a nonmagnetic substrate 1 are laminated on the nonmagnetic substrate 1. The orientation control layer 9 includes an Ru containing layer 3 containing Ru or an Ru alloy; and a diffusion prevention layer 8 which is arranged at a perpendicular magnetic layer 4 side of the Ru containing layer 3, has a melting point of 1500°C or more, is formed of a covalently bonded or ionically-bonded material, and prevents diffusion of Ru atoms of the Ru containing layer 3 due to heat. The perpendicular magnetic layer 4 has columnar crystals continuing in a thickness direction with crystal grains by transferring a crystalline structure of the crystal grains of the Ru containing layer 3 via the diffusion prevention layer 8.
摘要翻译：要解决的问题：提供能够实现高密度记录的磁记录介质。解决方案：在磁记录介质50中，至少用于控制立即上层的取向的取向控制层9和垂直磁性层4 其易磁化轴主要垂直于非磁性基板1定向在非磁性基板1上。取向控制层9包括含Ru或Ru合金的含Ru层3。并且通过共价键合或离子键合材料形成布置在含Ru层3的垂直磁性层4侧的扩散防止层8的熔点为1500℃以上，并且防止扩散 Ru含有层3的Ru原子。通过经由扩散防止层8转移含Ru层3的晶粒的结晶结构，垂直磁性层4具有在厚度方向上与晶粒连续的柱状晶体。

2. 发明专利

JP2009146507A Perpendicular magnetic recording medium and magnetic recording/reproducing device 审中-公开
标题翻译：全能磁记录介质和磁记录/再现装置
公开(公告)号：JP2009146507A
公开(公告)日：2009-07-02
申请号：JP2007322980
申请日：2007-12-14
申请人： Showa Denko Kk , Tohoku Univ , Toshiba Corp , 国立大学法人東北大学 , 昭和電工株式会社 , 株式会社東芝
发明人： TAKAHASHI KEN , ISHIBASHI SHINICHI , KUROKAWA GOHEI , SASAKI YUZO , TAKEO AKIHIKO , MAEDA TOMOYUKI
IPC分类号： G11B5/738 , G11B5/65 , G11B5/667
摘要： PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording device and a magnetic recording/reproducing device for recording and reproducing high-density information. SOLUTION: The perpendicular magnetic recording medium 10 has at least a backing layer 2, an orientation control layer 9, a magnetic recording layer 6, and a protection layer 7 on a non-magnetic substrate. The orientation control layer 9 is composed by laminating at least two layers including a seed layer 3 and intermediate layers 4, 5 successively laminated from a non-magnetic substrate side 1. The seed layer 3 includes at least one kind of element selected from a group consisting of W, Ta, Nb, Mo as major constituents and has a film thickness of 0.3 to 2 nm; and the intermediate layer has (002)-orientation. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供用于记录和再现高密度信息的垂直磁记录装置和磁记录/再现装置。解决方案：垂直磁记录介质10在非磁性基板上至少具有背衬层2，取向控制层9，磁记录层6和保护层7。取向控制层9通过层叠至少两层，包括从非磁性基板侧1依次层叠的种子层3和中间层4,5。至于种子层3，至少包含一种选自组由W，Ta，Nb，Mo组成，膜厚为0.3〜2nm; 中间层具有（002）取向。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2011086350A Manufacturing method of magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing device 审中-公开
标题翻译：磁记录介质，磁记录介质，磁记录和再现装置的制造方法
公开(公告)号：JP2011086350A
公开(公告)日：2011-04-28
申请号：JP2009239130
申请日：2009-10-16
申请人： Showa Denko Kk , Tohoku Univ , Toshiba Corp , 国立大学法人東北大学 , 昭和電工株式会社 , 株式会社東芝
发明人： HASHIMOTO ATSUSHI , SASAKI YUZO , KUROKAWA GOHEI , SAITO SHIN , TAKAHASHI KEN , MAEDA TOMOYUKI , TAKEO AKIHIKO
IPC分类号： G11B5/84 , G11B5/65 , G11B5/66 , G11B5/738 , G11B5/851
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording medium maintaining the high perpendicular orientation on the perpendicular magnetic layer and enabling a much higher density recording. SOLUTION: This is the manufacturing method of a magnetic recording medium made by stacking a soft magnetic layer 11, an orientation control layer 12 controlling the orientation of the upper layer thereon, and a perpendicular magnetic layer 13 having its easy magnetization axis mostly perpendicular to the nonmagnetic substrate 1 at least on a nonmagnetic substrate. The method includes steps of: forming columnar crystals S1 regularly arranged in one direction by growing the crystal particles constituting the orientation control layer 12 aslant to the substrate surface; and making the perpendicular magnetic layer 13 of two or more magnetic layers 14, 15, and forming the columnar crystals S2, S3 continuing in thickness direction by perpendicularly growing the crystal particles constituting the magnetic layers 14, 15 from the tops of the columnar crystals S1 constituting the orientation control layer 12 to the substrate surface. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供在垂直磁性层上保持高垂直取向的磁记录介质的制造方法，并且能够进行高得多的密度记录。解决方案：这是通过堆叠软磁层11，控制其上层的取向的取向控制层12和其易磁化轴的垂直磁性层13而形成的磁记录介质的制造方法至少在非磁性衬底上垂直于非磁性衬底1。该方法包括以下步骤：通过将构成取向控制层12的晶体颗粒生长到衬底表面而形成沿一个方向规则排列的柱状晶体S1; 并且通过从柱状晶体S1的顶部垂直地生长构成磁性层14,15的结晶粒子，使两个或更多个磁性层14,15的垂直磁性层13形成在厚度方向上延续的柱状晶体S2，S3 将取向控制层12构成到基板表面。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2010044842A Magnetic recording medium, method for manufacturing the same, and magnetic recording and reproducing device 有权
标题翻译：磁记录介质，其制造方法以及磁记录和再现装置
公开(公告)号：JP2010044842A
公开(公告)日：2010-02-25
申请号：JP2008209907
申请日：2008-08-18
申请人： Showa Denko Kk , Tohoku Univ , Toshiba Corp , 国立大学法人東北大学 , 昭和電工株式会社 , 株式会社東芝
发明人： ISHIBASHI SHINICHI , TAKAHASHI KEN , SAITO SHIN , SASAKI YUZO , HASHIMOTO ATSUSHI , KUROKAWA GOHEI , MAEDA TOMOYUKI , TAKEO AKIHIKO
IPC分类号： G11B5/738 , G11B5/65 , G11B5/667 , G11B5/851 , H01F10/28 , H01F10/30 , H01F41/20
CPC分类号： G11B5/732 , B82Y25/00 , B82Y40/00 , G11B5/65 , G11B5/667 , H01F10/3272 , H01F41/306
摘要： PROBLEM TO BE SOLVED: To provide a magnetic recording medium capable of maintaining writing ability during recording, making an improvement in the perpendicular orientation of a perpendicular magnetic recording layer compatible with the uniformity and micronization of the crystal grain diameter, and recording and reproducing high-density information, to provide a method of manufacturing the magnetic recording medium, and to provide a magnetic recording and reproducing device. SOLUTION: The magnetic recording medium 10 includes at least a soft magnetic underlayer 2, an orientation control layer 3, a magnetic recording layer 4 and a protective layer 5 on a non-magnetic substrate 1 and the orientation control layer 3 includes a seed layer 6 and an intermediate layer 7. The seed layer 6 includes a Cu-Ti alloy comprising essentially Cu and having a face-centered cubic structure as a main material. The Cu-Ti alloy has a (111) plane crystals oriented in a direction perpendicular to the surface of the non-magnetic substrate 1 and has a pseude-hexagonal structure. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在记录期间保持书写能力的磁记录介质，使得与晶粒直径的均匀性和微粉化相容的垂直磁记录层的垂直取向得到改善，并且记录和再现高密度信息，提供一种制造磁记录介质的方法，并提供磁记录和再现装置。解决方案：磁记录介质10至少包括在非磁性基板1上的软磁性底层2，取向控制层3，磁记录层4和保护层5，并且取向控制层3包括种子层6和中间层7.种子层6包括基本上包含Cu并具有面心立方结构作为主要材料的Cu-Ti合金。 Cu-Ti合金具有在与非磁性基板1的表面垂直的方向上取向的（111）面晶体，并且具有pseude-六边形结构。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2014075162A Magnetic recording medium, and magnetic recording/reproducing device 有权
标题翻译：磁记录介质和磁记录/再现设备
公开(公告)号：JP2014075162A
公开(公告)日：2014-04-24
申请号：JP2012221485
申请日：2012-10-03
申请人： Showa Denko Kk , 昭和電工株式会社 , Toshiba Corp , 株式会社東芝 , Tohoku Univ , 国立大学法人東北大学
发明人： SAITO SHIN , TAKAHASHI KEN , KUROKAWA GOHEI , INOUE TAKESHI , KIKITSU SATORU , MAEDA TOMOYUKI , ISOWAKI YOSUKE
IPC分类号： G11B5/66 , G11B5/64 , G11B5/738
摘要： PROBLEM TO BE SOLVED: To provide a magnetic recording medium which has excellent resistance against heat fluctuation, and excellent writing property.SOLUTION: The magnetic recording medium includes at least a soft magnetic under layer, an orientation control layer for controlling orientation of an immediately above layer, and a perpendicular magnetic layer comprising one or more magnetic layers in which easily magnetizing axes are oriented perpendicular to a nonmagnetic substrate, which are arranged on the nonmagnetic substrate in this order. At least the one magnetic layer, constituting the perpendicular magnetic layer, includes a magnetic alloy containing Co, Pt, and Rh. The content of the Rh is in a range of 10 to 40 atomic%.
摘要翻译：要解决的问题：提供具有优异的耐热波动性和优异的书写性能的磁记录介质。解决方案：磁记录介质至少包括软磁下层，用于控制正上方的取向的取向控制层以及包含一个或多个磁性层的垂直磁性层，其中易磁化轴垂直于非磁性基板定向，这些磁性层依次布置在非磁性基板上。构成垂直磁性层的至少一个磁性层包括含有Co，Pt和Rh的磁性合金。 Rh的含量在10〜40原子％的范围内。

6. 发明专利

JP2009059433A Perpendicular magnetic recording medium, its manufacturing method, and magnetic recording and reproducing device 有权
标题翻译：全磁磁记录介质，其制造方法和磁记录和再现装置
公开(公告)号：JP2009059433A
公开(公告)日：2009-03-19
申请号：JP2007226648
申请日：2007-08-31
申请人： Showa Denko Kk , Tohoku Univ , Toshiba Corp , 国立大学法人東北大学 , 昭和電工株式会社 , 株式会社東芝
发明人： TAKAHASHI KEN , SAITO SHIN , KUROKAWA GOHEI , SASAKI YUZO , KOMATSUDA TATSU , HASHIMOTO ATSUSHI , TAKEO AKIHIKO , MAEDA TOMOYUKI
IPC分类号： G11B5/738 , G11B5/65 , G11B5/851
CPC分类号： G11B5/732 , G11B5/7325 , G11B5/8404 , G11B5/851
摘要： PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording medium capable of performing recording and reproduction of information of high density by compatibly attaining fineness of a crystal grain diameter and high density of magnetic crystal grains while perpendicular alignability of a magnetic recording layer is maintained, to provide its manufacturing method and to provide a magnetic recording and reproducing device. SOLUTION: In the perpendicular magnetic recording medium provided with at least a backing layer, an orientation control layer, a magnetic recording layer and a protective layer on a non-magnetic substrate, the orientation control layer is constituted of three or more layers including a seed layer, a first intermediate layer and a second intermediate layer from the substrate side, crystal grains which constitute the first intermediate layer are epitaxially grown on crystal grains which constitute the seed layer, crystal grains which constitute the second intermediate layer are epitaxially grown on the crystal grains which constitute the first intermediate layer and the crystal grains which constitute the second intermediate layer are made finer as compared with the crystal grains which constitute the first intermediate layer. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决问题：为了提供能够通过兼容地获得晶粒直径的细度和高密度的磁性晶粒进行高密度信息的记录和再现的垂直磁记录介质，同时磁记录层的垂直对准以提供其制造方法并提供磁记录和再现装置。解决方案：在非磁性基板上至少设置有背衬层，取向控制层，磁记录层和保护层的垂直磁记录介质中，取向控制层由三层以上构成包括种子层，第一中间层和第二中间层，构成第一中间层的晶粒在构成种子层的晶粒上外延生长，构成第二中间层的晶粒外延生长与构成第一中间层的晶粒和构成第二中间层的晶粒相比，与构成第一中间层的晶粒相比更细。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2014103172A Magnetic thin film, manufacturing method therefor, high frequency oscillation device using magnetic thin film, magnetic head, magnetic recording medium, and magnetic recorder/reproducer 审中-公开
标题翻译：磁薄膜，其制造方法，使用磁薄膜，磁头，磁记录介质和磁记录器/再现器的高频振荡器件
公开(公告)号：JP2014103172A
公开(公告)日：2014-06-05
申请号：JP2012252623
申请日：2012-11-16
申请人： Toshiba Corp , 株式会社東芝 , Tohoku Univ , 国立大学法人東北大学 , Showa Denko Kk , 昭和電工株式会社
发明人： TAKEO AKIHIKO , KIKITSU SATORU , MAEDA TOMOYUKI , TAKAHASHI KEN , SAITO SHIN , INOUE TAKESHI , KUROKAWA GOHEI
IPC分类号： H01F10/32 , G11B5/02 , G11B5/31 , G11B5/64 , G11B5/667 , G11B5/738 , G11B5/84 , H01F10/16 , H01L29/82 , H01L43/08 , H01L43/10
CPC分类号： G11B5/1278 , G11B5/235 , G11B5/3146 , G11B5/656 , G11B5/732 , G11B5/7325 , G11B2005/0024 , H01F10/30 , H01F10/3286 , H01F10/329 , H01F41/30 , H03B15/006 , H03B28/00
摘要： PROBLEM TO BE SOLVED: To provide a magnetic thin film having strong negative anisotropy suitable as a high frequency oscillator material oscillating with a high frequency of 20 GHz or more, or a soft magnetic lining layer material of a perpendicular magnetic recording medium.SOLUTION: In a magnetic thin film having negative anisotropy of -6×10erg/cmand having, at least on a nonmagnetic substrate, a seed layer composed of one layer or more of metal or a metal compound, a ruthenium base layer for controlling the orientation of a layer immediately above, and a magnetic layer containing two kinds of Co and Ir, having negative anisotropy in the direction normal to the film surface, as main components, the additive element concentration of Ir in the magnetic layer is 10-45 at%.
摘要翻译：要解决的问题：提供具有强的负各向异性的磁性薄膜，其适合作为以20GHz以上的高频振荡的高频振荡器材料，或垂直磁记录介质的软磁衬层材料。解决方案：在具有-6×10erg / cm的负各向异性的磁性薄膜，并且至少在非磁性基底上具有由一层或多层金属或金属化合物构成的晶种层，用于控制层的取向的钌基底层并且具有与膜表面垂直的方向具有负各向异性的两种Co和Ir的磁性层作为主要成分，磁性层中的Ir的添加元素浓度为10-45原子％。

8. 发明专利

JP2010176727A Method for manufacturing magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus 有权
标题翻译：用于制造磁记录介质，磁记录介质和磁记录和再现装置的方法
公开(公告)号：JP2010176727A
公开(公告)日：2010-08-12
申请号：JP2009015635
申请日：2009-01-27
申请人： Showa Denko Kk , Tohoku Univ , Toshiba Corp , 国立大学法人東北大学 , 昭和電工株式会社 , 株式会社東芝
发明人： SASAKI SHINGO , SAITO SHIN , TAKAHASHI KEN , HASHIMOTO ATSUSHI , SASAKI YUZO , KUROKAWA GOHEI , MAEDA TOMOYUKI , TAKEO AKIHIKO
IPC分类号： G11B5/851 , G11B5/66
CPC分类号： G11B5/851 , C23C14/14 , C23C14/34 , G11B5/65 , G11B5/82 , Y02T50/67
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording medium which is excellent in terms of both recording and reproduction characteristics and thermal decay characteristics without reducing the density and hardness of the perpendicular magnetic layer; a magnetic recording medium; and a magnetic recording and reproducing apparatus with excellent recording density characteristics. SOLUTION: At least a portion of the perpendicular magnetic layer 4 is formed as a magnetic layer having a granular structure that contains Co as a major component and also contains an oxide of at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W, and Mg; and a target for forming the perpendicular magnetic layer 4 by sputtering includes an oxide of Co and a compound of Co and at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W, and Mg, and the proportion of oxygen contained in the target is set to be higher than the proportion of oxygen contained in the perpendicular magnetic layer 4, and sputtering gas pressure during formation of the perpendicular magnetic layer 4 is set to 1 Pa or less. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种在不降低垂直磁性层的密度和硬度的情况下，在记录和再现特性以及热衰减特性方面优异的磁记录介质的制造方法; 磁记录介质; 以及具有优异的记录密度特性的磁记录和重放装置。解决方案：垂直磁性层4的至少一部分形成为具有包含Co作为主要成分的颗粒结构的磁性层，并且还包含至少一种非磁性金属的氧化物，其选自Cr ，Si，Ta，Al，Ti，W和Mg; 并且通过溅射形成垂直磁性层4的目标包括Co的氧化物和Co化合物和选自Cr，Si，Ta，Al，Ti，W和Mg中的至少一种非磁性金属的氧化物，以及将靶中所含的氧的比例设定为高于垂直磁性层4中所含的氧的比例，在垂直磁性层4的形成期间的溅射气体压力设定为1Pa以下。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2010044813A Magnetic recording medium, method for manufacturing the same, and magnetic recording and reproducing device 有权
标题翻译：磁记录介质，其制造方法以及磁记录和再现装置
公开(公告)号：JP2010044813A
公开(公告)日：2010-02-25
申请号：JP2008206752
申请日：2008-08-11
申请人： Showa Denko Kk , Tohoku Univ , Toshiba Corp , 国立大学法人東北大学 , 昭和電工株式会社 , 株式会社東芝
发明人： ISHIBASHI SHINICHI , TAKAHASHI KEN , SAITO SHIN , SASAKI YUZO , HASHIMOTO ATSUSHI , KUROKAWA GOHEI , MAEDA TOMOYUKI , TAKEO AKIHIKO
IPC分类号： G11B5/738 , G11B5/65 , G11B5/667 , G11B5/84
CPC分类号： G11B5/82 , G11B5/65 , G11B5/667 , G11B5/732
摘要： PROBLEM TO BE SOLVED: To provide a magnetic recording medium capable of maintaining writing ability during recording, making an improvement in the perpendicular orientation of a perpendicular magnetic recording layer compatible with the uniformity and micronization of the crystal grain diameter, and recording and reproducing high-density information, to provide a method of manufacturing the magnetic recording medium, and to provide a magnetic recording and reproducing device. SOLUTION: In a perpendicular magnetic recording medium 10 in which at least a soft magnetic backing layer 2, an orientation control layer 31, a magnetic recording layer 5 and a protective layer 6 are formed on a non-magnetic substrate 1 in order from the bottom, the orientation control layer 31 has a laminated structure of two or more layers including an intermediate layer 4 and a seed layer 3 which is disposed closer to the non-magnetic substrate 1 than the intermediate layer 4. The seed layer 3 includes two or more kinds of elements having a face-centered cubic (fcc) structure, has face-centered cubic (fcc) (111) plane crystals oriented in a direction perpendicular to a substrate surface, and has a pseudo-hexagonal structure. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在记录期间保持书写能力的磁记录介质，使得与晶粒直径的均匀性和微粉化相容的垂直磁记录层的垂直取向得到改善，并且记录和再现高密度信息，提供一种制造磁记录介质的方法，并提供磁记录和再现装置。解决方案：在垂直磁记录介质10中，其中在非磁性基板1上至少依次形成有软磁背衬层2，取向控制层31，磁记录层5和保护层6 取向控制层31的底部具有包含中间层4和比中间层4更靠近非磁性基板1配置的种子层3的2层以上的层叠结构。种子层3包括具有面心立方（fcc）结构的两种或更多种元件具有在垂直于衬底表面的方向上取向的面心立方（fcc）（111）面晶体，并且具有假六边形结构。版权所有（C）2010，JPO＆INPIT

10. 发明专利

JP2009116987A Method for manufacturing vertical magnetic recording medium, and magnetic recording/reproducing device 审中-公开
标题翻译：用于制造垂直磁记录介质的方法和磁记录/再现装置
公开(公告)号：JP2009116987A
公开(公告)日：2009-05-28
申请号：JP2007290915
申请日：2007-11-08
申请人： Showa Denko Kk , 昭和電工株式会社
发明人： FUKUSHIMA MASATO , KUROKAWA GOHEI , SASAKI YUZO
IPC分类号： G11B5/84 , G11B5/65 , G11B5/738
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a vertical magnetic recording medium, wherein a grain diameter of a vertical magnetic recording layer is fine, vertical alignment of the vertical magnetic recording layer and corrosion resistance of the magnetic recording medium are improved and high density information recording/reproduction is made possible.
SOLUTION: In the method for manufacturing the vertical magnetic recording medium 10 which includes, on a nonmagnetic substrate 1, at least a lining layer 2, a base film 4, an intermediate layer 5, and the vertical magnetic recording layer 6 having a granular magnetic layer containing at least an oxide, the surface of the intermediate layer 5 is irradiated with inert gas ions after the intermediate layer 5 is formed.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供垂直磁记录介质的制造方法，其中垂直磁记录层的晶粒直径是细的，垂直磁记录层的垂直取向和磁记录介质的耐腐蚀性是改进和高密度信息记录/再现成为可能。解决方案：在用于制造垂直磁记录介质10的方法中，其包括在非磁性基板1上至少衬里层2，基膜4，中间层5和垂直磁记录层6，其具有至少含有氧化物的粒状磁性层，在形成中间层5之后，用惰性气体离子照射中间层5的表面。版权所有（C）2009，JPO＆INPIT

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