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JP2010176727A Method for manufacturing magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus 有权
标题翻译：用于制造磁记录介质，磁记录介质和磁记录和再现装置的方法
公开(公告)号：JP2010176727A
公开(公告)日：2010-08-12
申请号：JP2009015635
申请日：2009-01-27
申请人： Showa Denko Kk , Tohoku Univ , Toshiba Corp , 国立大学法人東北大学 , 昭和電工株式会社 , 株式会社東芝
发明人： SASAKI SHINGO , SAITO SHIN , TAKAHASHI KEN , HASHIMOTO ATSUSHI , SASAKI YUZO , KUROKAWA GOHEI , MAEDA TOMOYUKI , TAKEO AKIHIKO
IPC分类号： G11B5/851 , G11B5/66
CPC分类号： G11B5/851 , C23C14/14 , C23C14/34 , G11B5/65 , G11B5/82 , Y02T50/67
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic recording medium which is excellent in terms of both recording and reproduction characteristics and thermal decay characteristics without reducing the density and hardness of the perpendicular magnetic layer; a magnetic recording medium; and a magnetic recording and reproducing apparatus with excellent recording density characteristics. SOLUTION: At least a portion of the perpendicular magnetic layer 4 is formed as a magnetic layer having a granular structure that contains Co as a major component and also contains an oxide of at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W, and Mg; and a target for forming the perpendicular magnetic layer 4 by sputtering includes an oxide of Co and a compound of Co and at least one nonmagnetic metal selected from the group consisting of Cr, Si, Ta, Al, Ti, W, and Mg, and the proportion of oxygen contained in the target is set to be higher than the proportion of oxygen contained in the perpendicular magnetic layer 4, and sputtering gas pressure during formation of the perpendicular magnetic layer 4 is set to 1 Pa or less. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种在不降低垂直磁性层的密度和硬度的情况下，在记录和再现特性以及热衰减特性方面优异的磁记录介质的制造方法; 磁记录介质; 以及具有优异的记录密度特性的磁记录和重放装置。解决方案：垂直磁性层4的至少一部分形成为具有包含Co作为主要成分的颗粒结构的磁性层，并且还包含至少一种非磁性金属的氧化物，其选自Cr ，Si，Ta，Al，Ti，W和Mg; 并且通过溅射形成垂直磁性层4的目标包括Co的氧化物和Co化合物和选自Cr，Si，Ta，Al，Ti，W和Mg中的至少一种非磁性金属的氧化物，以及将靶中所含的氧的比例设定为高于垂直磁性层4中所含的氧的比例，在垂直磁性层4的形成期间的溅射气体压力设定为1Pa以下。版权所有（C）2010，JPO＆INPIT

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