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    • 1. 发明专利
    • Magnetic sensor
    • 磁传感器
    • JP2007258402A
    • 2007-10-04
    • JP2006080133
    • 2006-03-23
    • Denso CorpToyota Central Res & Dev Lab Inc株式会社デンソー株式会社豊田中央研究所
    • YAMADERA HIDEYAFUNABASHI HIROBUMIOKAWA MAKOTOISOBE YOSHIHIKO
    • H01L43/08G01R33/09
    • PROBLEM TO BE SOLVED: To improve the trade-off between a contact resistance between an electrode and a magnetic film and a fixed resistance caused by an intermediate film, in a magnetic sensor. SOLUTION: The magnetic sensor 10 comprises the magnetic film 36 having a magneto-resistance effect, the conductive intermediate film 35 formed on the magnetic film 36, a first electrode 32 electrically connected to the magnetic film 36 via a part 35a of the intermediate film 35, and a second electrode 38 electrically connected to the magnetic film 36 via other part 35b of the intermediate film 35. The magnetic sensor 10 also includes an insulating protection film 34 formed on the intermediate film 35. The intermediate film 35 is in a form wherein conductive particles are dispersed in an insulating film. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:在磁传感器中,改善电极和磁性膜之间的接触电阻与由中间膜引起的固定电阻之间的折衷。 解决方案:磁传感器10包括具有磁阻效应的磁性膜36,形成在磁性膜36上的导电中间膜35,经由磁性膜36的一部分35a与磁性膜36电连接的第一电极32 中间膜35和通过中间膜35的其他部分35b与磁性膜36电连接的第二电极38.磁传感器10还包括形成在中间膜35上的绝缘保护膜34.中间膜35在 其中导电颗粒分散在绝缘膜中的形式。 版权所有(C)2008,JPO&INPIT