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1. 发明专利

JP2010225654A SEMICONDUCTOR DEVICE 审中-公开
公开(公告)号：JP2010225654A
公开(公告)日：2010-10-07
申请号：JP2009068481
申请日：2009-03-19
申请人： TOYOTA CENTRAL RES & DEV
发明人： FUJITSUKA TOKUO , FUJIYOSHI MOTOHIRO
IPC分类号： H01L29/84 , H01L21/3205 , H01L21/60 , H01L23/52
摘要： PROBLEM TO BE SOLVED: To provide a technology for reducing a parasitic capacitance without excessively reducing a function of a conductor such as reduction in wiring resistance and bonding work. SOLUTION: The semiconductor device includes a conductive substrate layer, an insulator BL2 stacked at a part of the surface of substrate layer, and a conductor 300 which is stacked on the surface of insulator and has an extended part 320 which extends beyond a presence range of the insulator. At the extended part of the conductor of the semiconductor device, a through-hole 300h that penetrates the extended part in the stacking direction is formed. COPYRIGHT: (C)2011,JPO&INPIT

2. 发明专利

JP2007040763A Correction device of acceleration sensor 审中-公开
标题翻译：加速度传感器校正装置
公开(公告)号：JP2007040763A
公开(公告)日：2007-02-15
申请号：JP2005223504
申请日：2005-08-01
申请人： Toyota Central Res & Dev Lab Inc , Toyota Motor Corp , トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人： SUGIHARA HISAYOSHI , NONOMURA YUTAKA , FUJIYOSHI MOTOHIRO
IPC分类号： G01P21/00
CPC分类号： G01P21/00
摘要： PROBLEM TO BE SOLVED: To provide a device capable of correcting the sensor output of an acceleration sensor with a simple constitution and capable of precisely detecting the acceleration, in its turn detecting the attitude angle of a moving body.
SOLUTION: An attitude angle operation unit 14 operates the attitude angle of a robot from the output of acceleration sensor 10. An attitude angle comparator 16 compares the angle at a prescribed attitude angle set in a register 20 with a detected attitude angle, and outputs the difference to a correction operator unit 18. A correction operator 18 outputs the correction value to a zero point corrector 26 or a sensitivity corrector 28 so as to eliminate the difference. The attitude angle set in the register 20 can be set via the input unit 22.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够以简单的结构校正加速度传感器的传感器输出并且能够精确地检测加速度的装置，从而检测移动体的姿态角度。姿态角度运算单元14根据加速度传感器10的输出对机器人的姿势角进行动作。姿势角比较器16将设定在寄存器20中的规定姿态角度的角度与检测到的姿势角进行比较，并将差值输出到校正运算器单元18.校正运算器18将校正值输出到零点校正器26或灵敏度校正器28，以消除差异。寄存器20中设置的姿态角可以通过输入单元22来设定。版权所有：（C）2007，JPO＆INPIT

3. 发明专利

JP2001183127A DEFORMATION DETECTING DEVICE AND CRUSH DETECTING DEVICE 失效
公开(公告)号：JP2001183127A
公开(公告)日：2001-07-06
申请号：JP36715899
申请日：1999-12-24
申请人： TOYOTA CENTRAL RES & DEV
发明人： SHIMAOKA KEIICHI , NONOMURA YUTAKA , TSUKADA ATSUSHI , FUJIYOSHI MOTOHIRO
IPC分类号： B60R21/00 , B60R21/16 , G01B17/04 , G01M5/00 , G01N29/04
摘要： PROBLEM TO BE SOLVED: To detect an object deforming and to specify its deformation part. SOLUTION: A reflected wave of vibration that a vibrator generator 30 causes the object to generate is detected by a reflected wave detector 30 and a reflected wave analysis part 52 compares the waveform of the detected reflected wave with the waveform of a reflected wave from the object which does not deform to detect the object deforming and specify the part of the deformation. Here, the deformation of the object and the part of the deformation can be specified by analyzing the reflected wave since the reflected wave of the applied vibration has a waveform characteristic of the object depending upon the shape, size, material, etc., of the object and when the object deforms, the waveform of the reflected wave corresponding to the deformed part deforms. When a vehicle is applied as the object, a clash due to a collision of the vehicle can be detected and the place of the clash can be specified.

4. 发明专利

JP2000349065A SEMICONDUCTOR DEVICE HAVING MOVABLE PART AND MANUFACTURE THEREOF 失效
公开(公告)号：JP2000349065A
公开(公告)日：2000-12-15
申请号：JP15437099
申请日：1999-06-01
申请人： TOYOTA CENTRAL RES & DEV
发明人： FUJITSUKA TOKUO , SHIMAOKA KEIICHI , FUJIYOSHI MOTOHIRO , OMURA YOSHITERU , NONOMURA YUTAKA , MIZUNO KENTAROU
IPC分类号： H01L21/3063 , C23F1/44 , C25F3/14 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To obtain a semiconductor device which prevents sticking of a movable part. SOLUTION: A surface 10 of a substrate 1 opposed to a movable part 300 is partially etched to be rough. Accordingly, the movable part 300 can be less stuck onto the surface 10. As a method of partially etching the surface 10, a vicinity of the surface 10, the movable part 300 and an active layer 3 are made of silicon (Si) having different impurity compositions, subjected to an electrolytic etching process using an aqueous solution of hydrofluoric (HF) acid, to a selective etching process using a mixture of hydrofluoric acid/ concentrated nitric acid/acetic acid, to an electrochemical etching stop process in an aqueous solution of potassium hydroxide (KOH), or an anodic oxidation process with use of a pulse current.

5. 发明专利

JPH11132770A VIBRATION TYPE ANGULAR SPEED DETECTOR 失效
公开(公告)号：JPH11132770A
公开(公告)日：1999-05-21
申请号：JP31446097
申请日：1997-10-29
申请人： TOYOTA CENTRAL RES & DEV
发明人： FUJIYOSHI MOTOHIRO , OMURA YOSHITERU , FUJITSUKA TOKUO , NONOMURA YUTAKA
IPC分类号： G01C19/56 , G01C19/5755 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To improve the detection accuracy by suppressing leak vibration in vibrating a mass part in the direction of excitation axis in a vibration type angular speed detector. SOLUTION: Movable electrodes 31 to 38 of a twist angle control electrode are provided in the direction of x-axis for excitation beams 21 to 24 extended in the direction of y-axis from both sides of a mass part 10 and fixed electrodes opposing from both sides in the dereliction of z-axis for them are provided. A voltage is applied between the fixed electrodes and the movable electrodes to generate electrostatic force therebetween and to generate around around a central axis parallel with y-axis of the excitation beams 21 to 24 so that twist angles of the excitation beams 21 to 24 can be controlled. As a result, it is possible to prevent leak vibration in the direction of z-axis caused due to unsymmetric property of a cross sectional shape vertical to y-axis of the excitation beams 21 to 24 when the mass part 10 is excited in the direction of x-axis. Consequently, the vibration in the direction of z-axis becomes proportional to angular speed and the detection accuracy is improved.

6. 发明专利

JPH06340452A PRODUCTION OF ELECTROSTATIC CAPACITY TYPE SENSOR 失效
公开(公告)号：JPH06340452A
公开(公告)日：1994-12-13
申请号：JP12904093
申请日：1993-05-31
申请人： TOYOTA CENTRAL RES & DEV
发明人： SHIMAOKA KEIICHI , TABATA OSAMU , KIMURA MASAHITO , FUNABASHI HIROBUMI , FUJIYOSHI MOTOHIRO , SUGIYAMA SUSUMU , NAKAGAWA TOSHIAKI , TSURUMI YASUAKI
IPC分类号： C03C27/06
摘要： PURPOSE:To provide the high-sensitivity electrostatic capacity type acceleration sensor by connecting a silicon structural body and a stationary electrode formed on a glass member at the time of anode joining thereby preventing the generation of static electric force between both members and narrowing the spacing formed between a silicon moving part and the stationary electrode. CONSTITUTION:A connecting wiring 75 for connecting the moving electrode output terminal and stationary electrode output terminal 74 formed on an insulating film 72 on the surface of the silicon structural body 70 is formed. A stationary electrode lead 84 formed on the glass member 80 and a stationary electrode output terminal lead 78 formed on the silicon structural body 70 are pressed within a joining region by placing the glass member 80 on the silicon structural body 70. As a result, the stationary electrode 82 of the glass member and the silicon structural body 70 are electrically connected and both members 70, 82 attain the same potential at the time of anode joining, by which the generation of the static electric force is prevented. The connecting wiring 75 for connecting the moving electrode output terminal and the stationary electrode output terminal 74 is cut after the anode joining.

7. 发明专利

JP2007078610A Sensing object value estimating device, and method therefor 审中-公开
标题翻译：感测对象价值评估装置及其方法
公开(公告)号：JP2007078610A
公开(公告)日：2007-03-29
申请号：JP2005269774
申请日：2005-09-16
申请人： Toyota Central Res & Dev Lab Inc , Toyota Motor Corp , トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人： SUGIHARA HISAYOSHI , FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA
IPC分类号： G01D3/00
摘要： PROBLEM TO BE SOLVED: To provide a sensing object value estimating device for improving detection precision by estimating a sensing object value when there is input exceeding a dynamic range of a sensor, and to provide its estimating method.
SOLUTION: An integration value estimating device 20 has a first loop memory 21 for recording transition of a sensor output value, a range-over start/range-in return determining part 27 for detecting deviation from the inside of a dynamic range of the sensing object value on the basis of the sensor output value and detecting return to the inside of the dynamic range, and a sensing object value estimating part 28 for estimating the transition of the sensing object value on the basis of the transition of the sensor output value before deviation recorded to the first loop memory 21.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于通过在输入超过传感器的动态范围的情况下估计检测对象值来提高检测精度的检测对象值估计装置，并提供其估计方法。解决方案：积分值估计装置20具有用于记录传感器输出值的转换的第一循环存储器21，用于检测从动态范围内的偏差的范围开始/范围返回确定部27 基于传感器输出值和检测到动态范围内部的检测对象值，以及感测对象值估计部28，用于基于传感器输出的转变来估计感测对象值的转变偏差前的值记录到第一循环存储器21中。（P）版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2002098611A MEASURING METHOD AND DEVICE FOR LEAKAGE GAS AND EVALUATION DEVICE OF THE LEAKAGE GAS MEASURING DEVICE 失效
公开(公告)号：JP2002098611A
公开(公告)日：2002-04-05
申请号：JP2000358472
申请日：2000-11-24
申请人： TOYOTA MOTOR CORP , TOYOTA CENTRAL RES & DEV
发明人： SENDA HIDEMI , FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA , OMURA YOSHITERU , TSUKADA ATSUSHI , SAKATA JIRO
IPC分类号： G01F1/00 , G01F3/22 , G01M3/04 , G01M3/20
摘要： PROBLEM TO BE SOLVED: To provide a measuring method for accurately measuring the small flow rate of leakage gas. SOLUTION: In the leakage gas measuring method for measuring the gas quantity leaking out of an inspection object S1 having a nearly closed space wherein helium gas is sealed, a process exhausting a chamber by way of a first exhaust pipe 12 connected with the chamber 11 containing the inspection object, a process for accumulating the gas leaking out of the inspection object into the chamber by closing the chamber for a specific time TS, a process for measuring the total amount LS of the gas by supplying the gas accumulated in the chamber after elapsing for the specific time to a mass spectrometer 21, and a process calculating the leakage gas flow rate Lout by dividing the total amount LS of the measured gas by the specific time TS are contained.

9. 发明专利

JP2001121500A SEALED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD 失效
公开(公告)号：JP2001121500A
公开(公告)日：2001-05-08
申请号：JP29741599
申请日：1999-10-19
申请人： TOYOTA CENTRAL RES & DEV
发明人： FUJITSUKA TOKUO , SHIMAOKA KEIICHI , OMURA YOSHITERU , MIZUNO KENTAROU , FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA
IPC分类号： B81C3/00 , B81B1/00 , G01C19/56 , G01C19/5755 , G01C19/5769 , G01P15/125 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide a sealed semiconductor device with high sealing degree. SOLUTION: This device is made to have a structure in which an n type reversal part 35 is provided on a part of a surface layer of a p type frame part 30 and a p+ type electric circuit 36 is provided on the n type inversion part 35. The p+ type electric circuit 36 is connected by a bridge 501 constituted of each p type electrode 32 and each metallic film. The p type frame part 30 and the p type electrode 32 are insulated across a groove part 600 and the p type electrode 32 is electrically connected with the p+ type electric circuit 36. The p type frame part 30 is formed by p type silicon, the n type inversion part 35 is inverted to an n type in conductivity by impurity and the p+ type electric circuit 36, is further made a p+ type by impurity. Because both of the n type inversion part 35 and the p+ type electric circuit 36 are formed in the vicinity of the surface layer of the p type frame part 30 in injection of impurity, the smoothness degree is extremely good, and projection and collapse may be neglected. Therefore, a joining with extremely excellent airtightness can be performed at the time of jointing with a cover part.

10. 发明专利

JP2000055669A OSCILLATING TYPE ANGULAR VELOCITY DETECTOR 失效
公开(公告)号：JP2000055669A
公开(公告)日：2000-02-25
申请号：JP23007898
申请日：1998-07-31
申请人： TOYOTA CENTRAL RES & DEV
发明人： FUJITSUKA TOKUO , FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA , OMURA YOSHITERU
IPC分类号： G01C19/56 , B81B3/00 , G01C19/5762 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To provide an oscillating type angular velocity detector which stably operates against a temperature variation. SOLUTION: This angular velocity detector comprises a mass portion 10 having an inertia mass and supporting beams 21, 22, 23, 24. In the oscillating type angular velocity detector in which an excitation vibration direction is orthogonal to a detection vibration direction, a lateral hole 310 penetrating in parallel to the excitation vibration direction is provided on a mass portion 10 of the vibrator 210 and is sealed with a viscous medium. The vibrator 210 has a small viscous resistance received from the viscous medium in the excitation vibration direction and a big viscous resistance in the detection vibration direction. Regarding a frequency characteristic, since the Q value of the excitation vibration is big and the Q value of the detection vibration is small, the oscillating type angular velocity detector stably operating against a temperature variation is obtained by exciting it with a resonance frequency in the excitation vibration direction.

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