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1. 发明专利

JP2000150643A DRY ETCHING METHOD 失效
公开(公告)号：JP2000150643A
公开(公告)日：2000-05-30
申请号：JP31791498
申请日：1998-11-09
申请人： TOSHIBA CORP , SHIBAURA MECHATRONICS CORP
发明人： KOBAYASHI AKIRA , JINBO SADAYUKI , HATTORI KEI , YOSHIMORI HIROAKI , NONAKA MIKIO , MUTO MAKOTO , KASAI MASARU , ONODA TOSHIYASU
IPC分类号： H01L21/302 , C23F4/00 , H01L21/28 , H01L21/3065 , H01L21/768 , H01L23/522
摘要： PROBLEM TO BE SOLVED: To provide an etching method for a metal film wherein a connection hole is formed at an inter-layer insulating film of a semiconductor substrate and a metal film comprising at least two layers is formed, and then a metal film other than the connection hole is removed by etching with no seam at the center of the connection hole widened. SOLUTION: An inter-layer insulating film of a semiconductor substrate 3 is etched in an etching chamber to form a connection hole while a metal film comprising at least two layers is formed in the connection hole and on the inter-layer insulating film, and then a metal film other than the connection hole is removed by etching. Here, a mixed gas fluorine atom and oxygen atom used as a reactive gas, a metal film other than a connection hole is etched with each layer substantially at the same etching speed at 150 deg.C or above or 150-250 deg.C of a semiconductor substrate. Thus, the metal film is packed in the connection hole to flatten its surface. The metal film may comprise a barrier metal layer and a tungsten film over it.

2. 发明专利

JP2004030779A Recording device, recording method, reproducing device and reproducing method 审中-公开
公开(公告)号：JP2004030779A
公开(公告)日：2004-01-29
申请号：JP2002185484
申请日：2002-06-26
申请人： Toshiba Corp , 株式会社東芝
发明人： KOBAYASHI AKIRA , ONODA ATSUSHI
IPC分类号： G06F12/14 , G06F12/00 , G11B7/004 , G11B7/007 , G11B20/10 , G11B20/12
摘要： PROBLEM TO BE SOLVED: To provide a recording device, recording method, a reproducing device, and a reproducing method for keeping security by a contents unit and secrecy of contents. SOLUTION: When a recoding instruction of contents with security is received, a data processor 21 records an inputted pass word in a first control region of an optical disk 2, records contents in a recordable user region 106, and records an address in which contents are written in a second control region 101. Then, when a reading instruction of contents with security is received, the data processor 21 reads the pass word from the first control region of the optical disk, as a result of verification, when they are the same, access for the corresponding second control region can be performed, the address in which contents data is recorded is read from the second control region, and contents to be read is reproduced. COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2001290567A COMPUTER PERIPHERAL DEVICE AND IMAGE REPRODUCING DEVICE 失效
公开(公告)号：JP2001290567A
公开(公告)日：2001-10-19
申请号：JP2000104494
申请日：2000-04-06
申请人： TOSHIBA CORP
发明人： KOBAYASHI AKIRA , KAWAMOTO KOTARO
IPC分类号： G06F1/28 , H04N5/765 , H04N5/85
摘要： PROBLEM TO BE SOLVED: To prevent a defect in operation in the case of battery-over state during the battery operation of computer peripheral equipment connected to a portable information processor. SOLUTION: In the figure, 16 is a battery reset monitor circuit and 17 is a resistance for detecting the charging and discharging currents of a battery 13. A submicrocontroller 10 when detecting (battery residual capacity)

4. 发明专利

JPH11161960A OPTICAL DISK DEVICE 失效
公开(公告)号：JPH11161960A
公开(公告)日：1999-06-18
申请号：JP32929897
申请日：1997-11-28
申请人： TOSHIBA CORP , TOSHIBA AVE KK
发明人： KAWAMOTO KOTARO , KOBAYASHI AKIRA
IPC分类号： G11B20/10 , G11B7/00 , G11B7/004 , H03M7/30
摘要： PROBLEM TO BE SOLVED: To provide an optical disk device capable of reducing complex processings in the case where the information quantity of recording data exceeds the storage capacity of one sheet of an optical disk. SOLUTION: This optical disk device is provided with a compressing means 19 generating data for compressed recording by compressing the recording data, recording means 2, 7 which reflect the data for compressed recording to a light beam for recording data and records the data for compressed recording with respect to an optical disk 1 by irradiating the disk 1 with the light beam for recording the data to which the data for compressed recording are reflected, reproducing means 2, 7 which irradiates the disk 1 with the light beam for reproducing data and reproduces the data of the disk 1 by receiving the reflected light to which the data of the disk are reflected recorded on the disk 1 and an expanding means 20 which expands the data of the optical disk and outputs the expanded data of the disk as reproduced data.

5. 发明专利

JPH10112068A DISK AND DISK REPRODUCING DEVICE 失效
公开(公告)号：JPH10112068A
公开(公告)日：1998-04-28
申请号：JP26473996
申请日：1996-10-04
申请人： TOSHIBA CORP , TOSHIBA AVE KK
发明人： KAWAMOTO KOTARO , KOBAYASHI AKIRA
IPC分类号： G11B7/24 , G11B7/00 , G11B7/004 , G11B19/12
摘要： PROBLEM TO BE SOLVED: To surely and instantly discriminate the number of reflection layers on one surface of a disk by providing a first area where information are recorded by the formation of bit and a second area where disk form information capable of discriminating the number of reflection layers of one surface of the disk are recorded by selectively eliminating the reflection layers on the disk. SOLUTION: A reflection layer elimination pattern data recording area B to be constituted by recording patterns of target data while selectively eliminating the reflection layers is provided at the inner peripheral side of an ordinary data recording area A where data are recorded by the formation of bit on the disk. Since the reflected light detection level of a reflection elimination part is sufficiently lower than the bottom detection level of the signal of the data recording area A and is an equal value independent of the number of the reflection layers, a constant binary signal is easily obtained and the reproducing of data is performed satisfactorily. Thus, the number of layers of the single surface of the disk is surely and instantly discriminated.

6. 发明专利

JPH08148473A PLASMA PROCESSING DEVICE 失效
公开(公告)号：JPH08148473A
公开(公告)日：1996-06-07
申请号：JP30541594
申请日：1994-11-15
申请人： TOSHIBA CORP
发明人： KOBAYASHI AKIRA
IPC分类号： C30B25/02 , C23C16/50 , C23C16/511 , H01L21/302 , H01L21/3065 , H05H1/46
摘要： PURPOSE: To provide a plasma processing device which is equipped with a shielding plate that is less deformed and produces less contaminants. CONSTITUTION: A plasma processing device is equipped with a reaction chamber 4 where reactive gas is turned plasmatic by microwaves 2, a wafer processing chamber 7 which processes the surface of at semiconductor wafer 8, and a insulating shielding plate 5 which separates the reaction chamber 4 from the processing chamber 7. The insulating shielding plate 5 prevents ions generated from plasmatic reactive gas from penetrating into the reaction chamber 4 but introduces radicals generated from plasmatic reactive gas into the reaction chamber 4, and furthermore, a mesh provided to the insulating shielding plate 5 is replaced with a finer mesh, whereby ions are stopped from passing through the insulating shielding plate 5. A quartz plate is used as a shielding plate which hardly contaminates the reaction chamber, and a composite shielding plate, which is composed of an aluminum plate and a quartz plate, not only grounds ions but also protects the reaction chamber against contamination and enables the aluminum plate to absorb ions that pass through the shielding plate. By a heater installed inside the wafer processing chamber 7, plasma processing is carried out at a high reaction speed without causing damage to a work.

7. 发明专利

JPH04301222A DISK REPRODUCING DEVICE 失效
公开(公告)号：JPH04301222A
公开(公告)日：1992-10-23
申请号：JP9007391
申请日：1991-03-28
申请人： TOSHIBA CORP
发明人： KOBAYASHI AKIRA , YOSHIDA TAKUJI , HATTORI HISAHIDE , TAKABAYASHI TOSHIYA
IPC分类号： G11B7/00 , G11B7/005 , G11B7/14 , G11B25/04
摘要： PURPOSE:To provide disk reproducing device which reads out all digital data recorded on a disk in a short time and is suitable to be used specially for the data reproduction of a CD-ROM disk. CONSTITUTION:Plural pieces of optical pickups are arranged at different positions in the radial direction of the disk 11, and they are constituted so that the total of the data reading ranges from the disk 11 by the movement of the lens of each optical pickup covers the whole surface of the signal recording surface of the disk 11, and the data of the disk 11 is read all at once by every optical pickup.

8. 发明专利

JPH03167597A FREQUENCY RANGE DETECTING CIRCUIT 失效
公开(公告)号：JPH03167597A
公开(公告)日：1991-07-19
申请号：JP30647989
申请日：1989-11-28
申请人： TOSHIBA CORP
发明人： KOBAYASHI AKIRA
IPC分类号： H04N5/05 , G09G5/12 , G09G5/18
摘要： PURPOSE:To allow stable and sure operations with simple constitution and to provide the circuit which is economically advantageous by determining the boundary frequency for dividing the frequency range of input clock signals by the pulse widths of the pulse signals formed in a pulse forming means. CONSTITUTION:Plural monomultivibrators 29, 30 which respectively generate the pulse signals of the specified pulse widths varying from each other with the input clock signals as a trigger and hold pulse level outputs in the state of the periods of the input clock signals become shorter than the pulse width are provided. Flip-flop circuits 31, 32 respectively hold the levels of the respective pulse signals just before the start of the respective periods of the input clock signals. The frequency range of the input clock signals is discriminated by the combination of the results of the holding. Namely, the boundary frequency of the frequency range is determined by the output pulse widths of the monomultivibrators 29, 30. The stable and sure operations can be executed with the simple constitution in this way and the economically advantageous circuit is obtd.

9. 发明专利

JPH02261213A DIGITAL FILTER 失效
公开(公告)号：JPH02261213A
公开(公告)日：1990-10-24
申请号：JP8351289
申请日：1989-03-31
申请人： TOSHIBA CORP
发明人： KOBAYASHI AKIRA
IPC分类号： H03H17/02
摘要： PURPOSE:To simplify the constitution by entirely performing the process in a digital area till the mixing process providing filtering characteristic for the input digital data. CONSTITUTION:Since multiplexers 65-70 are all thrown to the position (1), digital audio data D1L, D1R of RAMs 14, 15 use a filter coefficient of a coefficient ROM with a RAM address control circuit 17, multipliers 18, 19 and accumulators 20, 21 controlled by an arithmetic timing control circuit 71 and the calculation as the low pass filter is executed simultaneously for L and R channels. The result of calculation is stored in registers 72, 73 and the circuits 20, 21 are cleared to zero. With the multiplexers 65-70 are all thrown to the position (2), a data in the register 72 and a KLL of an attenuation register 74 are multiplied by the circuit 18, a data in the register 73 and a KRR of the register 74 are multiplied by the circuit 19, the result is added to a zero data in the circuits 20, 21 and the circuits 20, 21 hold data KLL.DL and KRR.DR. Thus, a reproducing signal is kept with high quality and the constitution is simplified.

10. 发明专利

JPH0259812A CD-ROM HOST COMPUTER INTERFACE DEVICE 失效
公开(公告)号：JPH0259812A
公开(公告)日：1990-02-28
申请号：JP21133388
申请日：1988-08-25
申请人： TOSHIBA CORP
发明人： KOBAYASHI AKIRA
IPC分类号： G06F3/06 , G11B20/10
摘要： PURPOSE:To decide the end of reproduction of an audio track carried out by a CD-ROM disk reader with the least overhead and to eliminate the deterioration of the data processing ability of a host computer by using the output of a clock signal detecting means as an interruption signal source of the host computer. CONSTITUTION:The output signal SCOMP of a comparator 24 is inputted to a D flip-flop 27 and a D terminal of the fli-flop 27 is pulled up to a power supply VCC. Simultaneously, the acknowledge output signal SACKN received from an SCSI interface circuit 2 is inputted to a CL terminal of the flio-flop 27. Then a Q terminal of the flip-flop 27 is connected to an interruption signal SINTN line of a host computer extension bus via an open collector inverter 28. An interruption signal is transmitted to a host computer 8. Thus it is possible to decide the end of reproduction of an audio track carried out by a CD-ROM disk reader with the least overhead. Then the deterioration of the data processing ability can be avoided for the computer 8.

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