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1. 发明专利

JPS60166018A SUPPORTING DEVICE FOR FILTER 失效
公开(公告)号：JPS60166018A
公开(公告)日：1985-08-29
申请号：JP1999284
申请日：1984-02-08
申请人： TOKYO ELECTRIC POWER CO , TOHOKU ELECTRIC POWER CO , CHUBU ELECTRIC POWER , HOKURIKU ELECTRIC POWER , CHUGOKU ELECTRIC POWER , NIPPON GENSHIRYOKU HATSUDEN , HITACHI LTD , TOSHIBA KK
发明人： ISHIZUKA AKIRA , OZAWA YUTAKA , MIURA ICHITAROU , KONDOU MITSUOKI , MITARAI YUTAKA , KANEKAWA MASAO , HIRATSUKA YUTAKA , ODAJIMA KENJI , OKAMOTO AKIRA
IPC分类号： B01D29/11 , B01D35/30
摘要： PURPOSE:To enable attaching and detaching a filter easily to or from a piping part for repetitive filtration by executing attaching and detaching of a filter by only one motion of pushing down a lower keep plate. CONSTITUTION:When a cylindrical filter 1 is to be held, a lower keep plate 21 is first pushed downward; the cylindrical filter 1 is held between flanges 12, 13 for clamping the filter; the direction and the position of a projection 9 of a flange 7 of the filter 1 is matched so as to fit to a recess 19 of the clamping flange 12; then pushing down of the keep plate 21 is ceased, and the filter is held firmly by the force of a spring. When the filter 1 is to be detached, the lower keep plate 21 is pushed downward, and the freed filter 1 is detached from a supporting device 50, then pushing down of the keep plate 21 is ceased.

2. 发明专利

JPH0212606B2 失效
公开(公告)号：JPH0212606B2
公开(公告)日：1990-03-22
申请号：JP1999284
申请日：1984-02-08
申请人： TOKYO DENRYOKU KK , TOHOKU DENRYOKU KK , CHUBU DENRYOKU KK , HOKURIKU DENRYOKU KK , CHUGOKU DENRYOKU KK , NIPPON GENSHIRYOKU HATSUDEN KK , HITACHI SEISAKUSHO KK , TOSHIBA KK
发明人： ISHIZUKA AKIRA , OZAWA YUTAKA , MIURA ICHITARO , KONDO MITSUOKI , MITARAI YUTAKA , KANEKAWA MASAO , HIRATSUKA YUTAKA , ODAJIMA KENJI , OKAMOTO AKIRA
IPC分类号： B01D29/11 , B01D35/30

3. 发明专利

JPS61206226A PLASMA MONITOR 失效
公开(公告)号：JPS61206226A
公开(公告)日：1986-09-12
申请号：JP4657285
申请日：1985-03-11
申请人： HITACHI LTD
发明人： OKAMOTO AKIRA , KOMIYAMA YUZURU , KANEKAWA MASAO , OSADA HISAJIRO
IPC分类号： C23F4/00 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To improve the plasma control capacity by a method wherein multiple photosensers to sense specific light passing through optical filters are arranged on the surface of a plasma etching apparatus to measure with time the luminous intensity of specific chemical product produced in the plasma. CONSTITUTION:Multiple photosensers 3a-3d composed of optical filters (interferofilters) 6 passing specific wavelength only, photoconversion elements sensing the light passing through said interferofilters 6 to convert it into electric signals and an amplifier are arranged at an equal interval around a parallel and flat plate type dry etching apparatus 1 so that the photosensers 3a-3d may face toward the surface of a work 8 to be etched contained in the dry etching apparatus 1. The spectral lines 12 radiated from gas plasma excited in the plasma etching apparatus 1 enter into the photosensers 3a-3d through pin holes 9 to be converted into electric signals. Those signals may be transmitted to a multiple type recorder 5 by coaxial cables 4a-4d to record any luminous intensity on a chart by this recorder.

4. 发明专利

JPS62247231A PLASMA MONITOR 失效
公开(公告)号：JPS62247231A
公开(公告)日：1987-10-28
申请号：JP8992486
申请日：1986-04-21
申请人： HITACHI LTD
发明人： OKAMOTO AKIRA , KANEKAWA MASAO , KOMIYAMA YUZURU
IPC分类号： G01N21/62
摘要： PURPOSE:To achieve a smaller size along with compactization, by constructing a tuning circuit, an arithmetic unit, a display and a recorder integral with a rotary disc and a detector section. CONSTITUTION:Radiated light 3 from a plasma 2 generated within a plasma- applied unit 1 is sampled with an optical fiber 6 fixed in a hood 5 to be introduced to a rotary disc 8 provided with a plurality of interference filters 7a-7d varied in the transmission wavelength at an equal interval on a concentric circle, where the light is analyzed with the separate interference filters to detect intensities of light for respective transmission wavelengths with a photoelectric multiplier 9. An output from the photomultiplier 9 is applied to a peak holding circuit 12 after amplification with an amplifier 11 and processed with a tuning circuit 13 and an A/D converter 14. Then, an operational circuit 15 computes the ratio of signal intensity with the beams of transmission light from other interference filters 7b-7d based on the signal intensity of the beam of transmission light from the interference filter 7a as reference. The results of the computation are shown on a display 16 while being recorded on a recorder 17.

5. 发明专利

JPS59192941A Plasma distribution monitor 失效
标题翻译：等离子体分布监测仪
公开(公告)号：JPS59192941A
公开(公告)日：1984-11-01
申请号：JP6566083
申请日：1983-04-15
申请人： Hitachi Ltd
发明人： KANEKAWA MASAO , OSADA HISAJIROU , EDAMURA TAKAO
IPC分类号： G01N21/64 , H05H1/00
CPC分类号： G01N21/6402
摘要： PURPOSE:To measure the two-dimensional distribution state of chemical species securely even when fluoresce is weak by providing a fluoresce converging means on the side opposite to the incidence side of a plasma utilizing device for laser light for excitation. CONSTITUTION:The plasma utilizing device 4 has an incidence window 5 formed in its vacuum container, and transmitted laser light 25 passed through plasma is guided out of a measurement window 6 formed on the side opposite to the incidence window 5. Laser light 24 incident to the device 4 operates on plasma material 28 to generate fluoresce. This fluoresce is incident to a polarizer 28 together with the transmitted laser light 25 by the laser light 24, so an electric signal corresponding to light with the wavelength of the fluoresce is obtained from a detector 11. A microprocessor 18 performs specific arithmetic every time laser light 23 is pulsated and outputted by a variable laser oscillator 1, and a desired integral value is diagramed and displayed on a display device 19.
摘要翻译：目的：通过在激光的激光等离子体利用装置的入射侧的相反侧提供荧光收敛装置，即使在荧光弱的情况下，也可以安全地测量化学物质的二维分布状态。构成：等离子体利用装置4具有在其真空容器内形成的入射窗5，通过等离子体的透射激光25从形成在与入射窗5相反的一侧的测量窗6引出。激光24入射到器件4在等离子体材料28上操作以产生荧光。这种荧光通过激光24与透射的激光25一起入射到偏振器28，因此从检测器11获得对应于具有荧光波长的光的电信号。微处理器18每次在激光器光23被可变激光振荡器1脉冲输出，并且所需的积分值被示出并显示在显示装置19上。

6. 发明专利

JPS59188618A Laser optical path changing device 失效
标题翻译：激光光路改变装置
公开(公告)号：JPS59188618A
公开(公告)日：1984-10-26
申请号：JP6216183
申请日：1983-04-11
申请人： Hitachi Ltd
发明人： TOCHIGI KENJI , KANEKAWA MASAO
IPC分类号： H01S3/101 , G02B27/28
CPC分类号： G02B27/283
摘要： PURPOSE:To raise a measuring sensitivity by constituting so that each polarizing and separating surface of two polarizing cube prisms for transmitting a polarizing component of an incident light being parallel to an advancing direction of the incident light, and separating a polarizing component of an incident light vertical to an advancing direction of the incident light in the direction of 90 deg. is used as a reflecting surface. CONSTITUTION:A laser light 1 consisting of a linear polarizing component in the direction vertical to an advancing direction of an incident light, and a background light 2 consisting of each random polarizing component, passing through the same optical path as this light 1 are made incident to the first polarizing cub prism 4 placed by inclining a polarizing and separating surface 3 by 45 deg. against an optical path of the laser light 1. As for the laser light 1 and the background light 2 which are made incident to the polarizing and separating surface 3, a polarizing component 5 in the direction vertical to an advancing direction of the incident light is reflected in the direction of 90 deg. against the incident direction, and a background light 6 consisting of other polarizing direction component transmits in the extending direction of the incident direction. An intensity of the background light 5 reflected by this polarization and separation is reduced to 1/2-1/3 of an intensity of the original background light 2.
摘要翻译：目的：为了提高测量灵敏度，通过构成使得两个偏振棱镜的偏振分离表面与入射光的前进方向平行的入射光的偏振分量透射，并将入射光的偏振分量垂直于入射光的行进方向在90度的方向上。用作反射面。构成：在垂直于入射光的前进方向的方向上由线性偏振分量组成的激光1和通过与该光1相同的光路的每个随机偏振分量组成的背景光2入射通过将偏振和分离表面3倾斜45度而放置的第一偏振立方棱镜4。对于激光1和入射到偏振分离面3的背景光2，在与入射光的前进方向垂直的方向上的偏振光分量5为反映在90度的方向。并且由其他偏振方向分量构成的背景光6沿着入射方向的延伸方向透过。通过该偏振和分离反射的背景光5的强度被降低到原始背景光2的强度的1 / 2-1 / 3。

7. 发明专利

JPS59162446A Automatic ion monitoring apparatus 失效
标题翻译：自动离子监测仪
公开(公告)号：JPS59162446A
公开(公告)日：1984-09-13
申请号：JP3578483
申请日：1983-03-07
申请人： Hitachi Ltd
发明人： KANEKAWA MASAO , HARAZONO MASAAKI , WATANABE MASAHIRO
IPC分类号： G01N21/27 , G01N27/26 , G01N27/416
CPC分类号： G01N27/4166
摘要： PURPOSE:To make it possible to measure the concentration of ions automatically, by mixing a coloring liquid into a concentration-adjusting diluting liquid for a standard liquid and sample water, computing the concentration of the liquid based on the value measured by an absorption photometer, using the expression of relation with respect to the potential which is simultaneously measured by an ion electrode, and utilizing a microcomputer. CONSTITUTION:A coloring liquid is mixed into a diluting liquid, which is used for adjusting the concentration of a standard liquid 3 and sample water 2. The concentration of the diluted liquid is introduced based on the absorbance measured by an absorption photometer 19. The concentration of ions is obtained by the expression of relation with respect to the potential, which is simultaneously measured by an ion electrode 21. The control of pumps 5 and 6 and valves 9 and 10 and the operation processing of the absorbance and the value of the A-D conversion of the potential are performed by a microcomputer. Continuous automatic measurement of the ion concentration is performed in this way. Thus the apparatus can be utilized as a monitor in an in-line process wherein the ion concentration is continuously changed.
摘要翻译：目的：为了可以自动测定离子浓度，通过将着色液体混合到标准液体和样品水的浓度调节稀释液中，根据吸收式光度计测定的值计算液体浓度，使用与通过离子电极同时测量的电位的关系表达式，并利用微型计算机。构成：将着色液体混合到稀释液中，稀释液用于调节标准液体3和样品水2的浓度。基于由吸收光度计19测量的吸光度，引入稀释液体的浓度。浓度通过用离子电极21同时测量的电位表达关系来获得离子。泵5和6以及阀9和10的控制以及吸光度和AD值的操作处理电位的转换由微电脑进行。以这种方式进行离子浓度的连续自动测量。因此，该装置可以用作在线过程中的监测器，其中离子浓度不断变化。

8. 发明专利

JPS5754859A Gas analyzer 失效
标题翻译：气体分析仪
公开(公告)号：JPS5754859A
公开(公告)日：1982-04-01
申请号：JP12934580
申请日：1980-09-19
申请人： Hitachi Ltd
发明人： ODAJIMA KENJI , OSADA HISAJIROU , HIRATSUKA YUTAKA , KANEKAWA MASAO
IPC分类号： G01N33/22 , G01N30/04 , G01N30/88 , G01N33/00
CPC分类号： G01N33/0004
摘要： PURPOSE:To avoid shortening of life of a column by preventing it from adhering of coking and tar contents, by mixing a given volume of solvent into a specimen hot gas, and then, by cooling thus mixed gas down to below 35 deg.C for segregation between gaseous body and liquified body and analyzing them separately. CONSTITUTION:A specimen gas is introduced from a gas introducing pipe 1, a solvent is mixed into this gas through a solvent introducing pipe 12, thus mixed gas is cooled and segregated between gaseous body and liquefied body by a gas-liquid separator 8, thus separated gas is weighed and analyzed by a process gas chromatograph 14 equipped with a gas-weighing pipe, on the other hand, thus segregated liquid is separated into oil content and water by an oil-water separator 4, and then, the oil content 5 is weighed and analyzed by a process chromatograph 15 equipped with a liquid-weighing pipe. By conducting gas analysis using both thus obtained analytical data, it is possible to solve problems pertaining to shortening of life of a column due to adhering of coking and tar contents, reduce in volume of maintenance work and improve accuracy in analysis.
摘要翻译：目的：为了避免柱子的使用寿命缩短，防止焦油和焦油含量的混入，通过将一定体积的溶剂混合到样品热气中，然后将混合气体冷却至35℃以下，以便气体与液化体之间的分离并分别分析。构成：从气体导入管1导入试样气体，通过溶剂导入管12将溶剂混入该气体中，通过气液分离器8将混合气冷却并分离在气体与液化体之间，由此称量分离的气体，并通过配备有气体称重管的工艺气体色谱仪14进行分析，由此将分离的液体通过油水分离器4分离成油含量和水分，然后将油含量5 称重并通过配备有液体称重管的工艺色谱仪15进行分析。通过使用这样获得的分析数据进行气体分析，可以解决由于焦化和焦油含量的粘附引起的柱的寿命缩短的问题，减少维护工作量并提高分析精度。

9. 发明专利

JPH0574932B2 失效
公开(公告)号：JPH0574932B2
公开(公告)日：1993-10-19
申请号：JP4657285
申请日：1985-03-11
申请人： HITACHI LTD
发明人： OKAMOTO AKIRA , KOMYAMA YUZURU , KANEKAWA MASAO , OSADA HISAJIRO
IPC分类号： C23F4/00 , H01L21/302 , H01L21/3065

10. 发明专利

JPS61292539A PLASMA MONITOR 失效
公开(公告)号：JPS61292539A
公开(公告)日：1986-12-23
申请号：JP13407985
申请日：1985-06-21
申请人： HITACHI LTD
发明人： KOMIYAMA YUZURU , KANEKAWA MASAO , OKAMOTO AKIRA
IPC分类号： G01N21/62
摘要： PURPOSE:To enable measurement with a high reproducibility, by admitting light from one end face of a bundle of optical fibers to be equally divided at the other end face thereof. CONSTITUTION:A plasma light is made incident on a face at the tip 1a of an optical fiber bundle 1, the light equally divided through optical fibers 11-14 is transmitted through optical filters 21-23 only at a specified wavelength and then, the intensity thereof is converted with photo detectors 31-33 into electrical signals, the values of which are outputted to display sections 51 and 52. A light source section opening 6 is so arranged to extract a parallel light to a small multi-wavelength measuring type plasma monitor capable of computation or the like having terminals 71-74 to be connected to an output unit such as recorder and has a light source therebelow 6. Then, parallel light from the light source is detected with detectors 31-33 and the difference therebetween is adjusted with sensitivity adjusting knobs 41-43. Thus, the light transmission can be adjusted to equal from the optical fiber 1 to the detectors 31-33. Especially, the light from the light source can be made incident parallel with the optical axis of the optical fiber, thereby enabling accurate correction thereof.

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