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    • 9. 发明专利
    • WASTE WATER RECYCLING SYSTEM
    • JPH09327689A
    • 1997-12-22
    • JP14700496
    • 1996-06-10
    • HITACHI LTD
    • OKAMOTO AKIRA
    • B01D61/02C02F1/22C02F1/32C02F1/42C02F1/44C02F1/78C04B18/04H01L21/304
    • PROBLEM TO BE SOLVED: To process waste water at the optimum condition and to perform recycling by obtaining data on operating condition on a surface treatment installation, etc., contg. a waste water system and on quality of water of waste water processing in a factory and monitoring organically and wholly the system. SOLUTION: Waste water is drained from a plating process 1, an etching process 2, a base sheet cleaning process 3, etc., and cooling water in an air conditioning installation 4 and cooling water in a part finishing installation 5 are recovered and allover waste water processing is performed in a waste water processing installation 6 and recycling is performed in a recycle water recycling installation. In this case, the amt. of water for industrial use used in a factory, the amt. of recycled water and the quality of water are controlled and monitored by an operation monitoring panel 8 for monitoring operating conditions of these installations. In addition, this operation monitoring panel 8 can store and display each site of each installation and changes with time in the qualities of the water for industrial use, the waste water, the recycled water, etc. It is possible thereby to minimize the amt. of use of the water for industrial use used in the factory, to decrease the waste water to the utmost and to make the quality at most the water quality standard.